徐宗伟¹, 刘立芳¹, 贾瑞丽², 国晨¹
AuthorsHTML:徐宗伟¹, 刘立芳¹, 贾瑞丽², 国晨¹
AuthorsListE:Xu Zongwei ¹, Liu Lifang¹, Jia Ruili², Guo Chen¹
AuthorsHTMLE:Xu Zongwei ¹, Liu Lifang¹, Jia Ruili², Guo Chen¹
Unit:1. 天津大学精密仪器与光电子工程学院，天津 300072；2. 华为北京研究所，北京 100000
Unit_EngLish:1．School of Precision Instrument and Opto-Electronics Engineering, Tianjin University, Tianjin 300072, China
2．Huawei Research Institute in Beijing, Beijing 100000, China
Abstract_Chinese:针对纳米切削中实时检测切削力的难题, 提出了基于扫描电镜(SEM)原位纳米切削平台, 实时检测刀杆挠度变化的有效方法．通过视频采集切削过程, 对视频进行分帧处理得到刀具切削过程的图片．选取特征图像, 进行去噪、滤波、二值化、腐蚀及边缘提取等图像处理后, 提取各帧图像刀具区域目标点像素信息, 计算得到刀杆挠度的变化．将刀杆挠度值与有限元仿真所推得的力与挠度的关系相结合, 定量给出挠度与切削力的数据, 获得单晶硅切削中切削力的大小及波动情况, 解决了SEM原位纳米切削加工平台的切削力实时检测难题, 为分析实际加工中刀具变形行为以及材料切削特性提供了理论依据．
Abstract_English:Aimed at the difficulty in real-time measurement of cutting force in nanometric cutting，an effective method，which is based on the scanning electron microscope(SEM)in situ nanometric cutting device and used to detect the deflection of the cutter bar in real-time，was proposed in this paper. The cutting process was captured by video，and then the acquired video was split into frames. After the selection of feature images，images were processed by denoising，filtering，binaryzation，corrosion and edge extraction. The pixel information of target points in tool region in each frame was extracted and the value of toolbar deflection was calculated. By combining the toolbar deflection with the relationship between force and deflection derived from finite element simulation analysis，the values of deflection and cutting force were computed quantitatively. The value and fluctuation of cutting force in a single crystal silicon cutting are obtained. The method solves the problem of cutting force detection in real-time online using SEM in situ nanometric cutting platform，which provides theoretical basis for the analysis of tool deformation behavior and material cutting characteristics.
Keyword_Chinese:切削力; 挠度; 有限元; 图像处理
Keywords_English:cutting force; deflection; finite element; image processing

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