\r罗 震^{1, 2}，徐剑祥¹，敖三三¹，刘为东¹，李康柏¹，张 威¹

AuthorsHTML:\r罗 震^{1, 2}，徐剑祥¹，敖三三¹，刘为东¹，李康柏¹，张 威¹

AuthorsListE:\rLuo Zhen^{1, 2}，Xu Jianxiang¹，Ao Sansan¹，Liu Weidong¹，Li Kangbai¹，Zhang Wei¹

AuthorsHTMLE:\rLuo Zhen^{1, 2}，Xu Jianxiang¹，Ao Sansan¹，Liu Weidong¹，Li Kangbai¹，Zhang Wei¹

Unit:\r1. 天津大学材料科学与工程学院，天津 300350；
2. 上海交通大学高新船舶与深海开发装备协同创新中心，上海 200240\r
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Unit_EngLish:\r1.School of Materials Science and Engineering，Tianjin University，Tianjin 300350，China；
2.Collaborative Innovation Center of Advanced Ship and Deep-Sea Exploration，Shanghai Jiao Tong University，Shanghai 200240，China

Abstract_Chinese:\r针对传统微细电解加工存在的不足，提出了一种固态微细电解加工方法．使用PEO 与NaNO3 制备固态电解质，其表面用热压印加工出复杂的微细形貌．研究了不同的加工电压、加工时间对于阵列微坑形貌的影响．研究表明在直流加工电压3,V、加工时间20,min 的加工参数下，在阳极表面得到了6 行6 列形状精度较高的阵列微坑结
构．固态微细电解加工方法提高了表面精度及加工质量，具有良好的发展前景和研究价值．\r
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Abstract_English:\rA new solid-state electrochemical micromachining(EMM) technique is proposed that overcomes the disadvantages of conventional electrochemical micromachining. A novel solid-state electrolyte with complex micromorphologies is produced via hot embossing，and a specialized electrochemical processing system is developed. The effects of different voltages and processing times on the morphology of micro-dimple arrays have been carefully researched. Based on the results thus obtained，the optimum parameters are：3 V DC power and 20 min processing time under indoor temperature and humidity，which shows that under such parameters，micro-dimple arrays(6×6)with high precision and little spurious corrosion will exist on the anode’s surface. Solid-state EMM has improved accuracy and surface-processing quality，and shows good prospects for future developments.\r
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Keyword_Chinese:微细电解加工；固态电解质；阵列微坑\r

Keywords_English:electrochemical micromachining(EMM)；solid-state electrolyte；micro-dimple arrays\r


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