本课程选择硅基超大规模集成电路作为讨论分析对象，学习和掌握硅VLSI的主要工艺结构与原理及其有关工艺设备的特点。通过本门课程的学习，期望学生能深刻理解硅VLSI工艺技术与工艺设备的基本知识，为集成电路与系统的设计和制造打好最必要的IC技术的理论基础。本课程综合应用学生已学过的半导体物理、半导体器件基础等课程知识，去解决现代VLSI制造中的实际工艺问题。使学生具有研究本领域前沿课题的能力。 与集成电路制造相关的基础技术信息；整个集成电路工艺的制作过程；对每一种单项工艺，不仅介绍了它的物理和化学原理，还描述了用于集成电路制造的工艺设备。另外，还介绍了各种先进的工艺技术、制造流程、测量方法等。

The course focuses on the silicon VLSI, including the principles and methodology in the fabrication processes and the instrumentation involved in. Through the course, the students are expected to grasp the basic knowledge about the silicon-based VLSI processing and equipment; furthermore, to grasp the basic theoretical knowledge for the IC circuit and system design and fabrication.The course allows the students to utilize their knowledge on semiconductor physics and semiconductor device basics to resolve the practical processing issues in modern VLSI fabrication. foundational technique information related to intergrate curcuit;entire manufacture process of intergrate curcuit technics；To each kind of single item craft,it not only inculdes its physical and chemical principle，but also describes the processing equipments used in the intergrate curcuit production. What's more, it also introduces various advanced processing technology, fabrication flew，measuring technique and so on.