基本信息科学研究教育教学论文专著
基本信息


教育经历
1980-1984年：毕业于西北工业大学飞行器制造工程系获学士学位1984-1987年：毕业于西北工业大学飞行器制造工程系获硕士学位1989-1993年：毕业于哈尔滨工业大学机械制造学科获博士学位1993-1994年：哈尔滨工业大学机电工程学院讲师1994-1999年：哈尔滨工业大学机电工程学院副教授1999-2002年：哈尔滨工业大学机电工程学院教授2002-目前 ：哈尔滨工业大学机电工程学院博士生导师


主要任职
国际磨粒加工技术委员会（ICAT）委员中国机械工程学会生产工程分会第十届委员会委员、磨削专业委员会常务委员，精密工程及微纳技术和光整加工专业委员会委员国家高效磨削工程技术研究中心专家委员会委员《金刚石与磨料磨具工程》等期刊编委中国机械工程学会高级会员


科研项目

项目名称复合能场作用下SiC材料超精密微磨机理与关键技术

项目来源973

开始时间2011-11-01

结束时间2016-08-01

项目经费444万元

担任角色负责
项目类别横向项目
项目状态完成


项目名称大口径KDP晶体单点金刚石飞切超精密机床

项目来源“高档数控机床与基础制造装备”科技重大专项

开始时间2011-01-01

结束时间2013-12-01

项目经费786万元

担任角色负责
项目类别横向项目
项目状态完成


项目名称基于空气静压主轴非线性动力学行为分析的纳米切削加工表面微波纹形成机制研究

项目来源国家自然科学基金纳米制造的基础研究重大研究计划

开始时间2010-01-01

结束时间2012-12-01

项目经费50万元

担任角色负责
项目类别横向项目
项目状态完成


项目名称各向异性软脆功能晶体高效精密和超精密加工技术研究

项目来源国家自然科学基金重点项目

开始时间2006-01-01

结束时间2009-12-01

项目经费200万元

担任角色负责
项目类别纵向项目
项目状态完成


项目名称基于磨粒动态冲击效应的光学玻璃磨削亚表面裂纹生成机理研究

项目来源国家自然科学基金

开始时间2012-01-01

结束时间2015-12-01

项目经费60万元

担任角色参与
项目类别横向项目
项目状态完成


项目名称非球面制造砂轮技术工艺研究

项目来源横向

开始时间2011-01-01

结束时间2014-12-01

项目经费50万元

担任角色负责
项目类别横向项目
项目状态进行中


项目名称卧式液体静压主轴在超精密飞切加工中的动态行为分析及其对加工表面生成影响机制的研究

项目来源国家自然科学基金面上项目

开始时间2013.01

结束时间2016.12

项目经费￥900,000

担任角色负责
项目类别纵向项目
项目状态进行中


项目名称高能激光系统超洁净制造的关键基础科学问题研究

项目来源国家自然科学基金重点项目

开始时间2016.01

结束时间2020.12

项目经费￥3.470,000

担任角色负责
项目类别纵向项目
项目状态进行中


研究领域
主要研究方向:

主要从事精密超精密加工与纳米加工技术的研究工作，包括超精密加工新工艺及设备、纳米级超光滑表面加工技术及表面质量、新型功能材料的精密和超精密加工、硬脆材料精密和高效磨削技术、光学非球面加工等。

讲授课程
现代精密加工与超精密加工技术、

航天特种材料加工工艺等

招生信息
招收博士、硕士研究生。


论文期刊

论文标题Figuring of an Ultrasmooth Surface in Nanoparticle Colloid Jet Machining

作者Feihu Zhang, Xiaozong Song

期刊名称Journal of Micromechanics and Microengineering



论文标题Gyroscopic Torque Analysis and Dynamic Balance Test of the Vertical Aerostatic Spindle

作者F.H. Zhang, P.Q. Fu, C.H. An, J.W. Sun and S.F. Wang

期刊名称 Materials Science Forum

简单介绍Ultra-precision flying cutting machining with a vertical milling style is an important means of ultra-precision machining. It has a close relationship between the machining accuracy and the dynamic characteristics of the aerostatic spindle. The film force acting on the spindle rotor is related to the manufacture, installation and static unbalance or dynamic imbalance or other factors. Therefore, it is necessary to analyze the dynamic pressure force caused by these factors in order to study on the rotor posture and quantitative movement of the spindle. This article derived the solution formula for the dynamic pressure reaction force of the ultra-precision machine tool spindle with vertical static film based on the basic theory of the rigid body dynamics. The gyroscopic torque of the spindle has been analyzed under different conditions with the spindle dynamic balancing tests, which provide a reference to the further analysis of the spindle dynamic characteristics


论文标题Analysis of Error Influence in Ultrasonic- magnetorheological combined finishing

作者Zhang Feihu， Yu Xingbin

期刊名称Proceeding of the 4th ASPEN

期卷2011,11,IS



论文标题An experimental study of the nanoparticle colloid hydrodynamic cavitation jet polishing performance under different nozzle desig

作者Wang, Xing ; Zhang, Feihu; Zhang, Yong

期刊名称Advanced Materials Research

期卷2011,Volum

简单介绍Nanoparticle colloid hydrodynamic cavitation jet polishing (HCJP) is a super-smooth machining technology. This technology utilizes the interface reaction to remove material from the workpiece and uses cavitation effect to improve the processing efficiency. In this paper, the prototype equipment of HCJP is researched. Based on the prototype equipment, the processing experiments of pulsed jet nozzle, swirling jet nozzle and common cone-shaped nozzle have been done and the results of the experiments are compared with each other. The experiment results indicate that the roughness of the surfaces polished by three nozzles has remarkably decreased. The material removal rate of pulsed jet nozzle is the highest among the three types of nozzles. The material removal rate of the swirling jet nozzle is not improved obviously compared with the common cone-shaped nozzle. The processing experiment of monocrystalline silicon by the pulsed jet nozzle has been done and the roughness of processed surface is Ra 0.475 nm.


论文标题Research on the ultra-precision ductile cutting mechanism of KDP crystal. International Journal of Nanomanufacturing

作者Fu, P.Q., Zhang, F.H.

期刊名称Journal International Journal of Nanomanufacturing

期卷2011,Volum

简单介绍To achieve ductile processing of brittle materials is a key factor to obtain high quality finished surface. A new strategy was carried to clarify the brittle-to-ductile transition mechanism. The KDP crystal was processed by a mono diamond tool with arc-nose, and the plastic deformation can be found in the inside chip by optical microscope, also apparent transitional zone of brittle fracture to plastic deformation along the width direction of chips. It can be inferred that the width of plastically deforming area is sensitive to the cutting parameter feedrate. The critical cutting thickness was calculated by the parameters measured from the chips. At last a new model for calculating the critical cutting thickness of KDP crystal was given.


论文标题The Control Algorithm of Ultrasonic- magnetorheological combined finishing for rotary symmetrical aspheric surface

作者F. H. Zhang, X. B. Yu, Y. Zhang

期刊名称Advanced Materials Research

期卷2010,Volum

简单介绍Concave aspheric surface with small curvature radius is difficult to fabricate by most of existing technologies. Ultrasonic- magnetorheological combined finishing (UMC) is a new technique for the ultraprecision machining of aspheric surfaces, especially for the ultrasmooth surfaces machining of small-radiuses concave surfaces and freeform surfaces. According to the characteristics of rotary symmetrical aspheric surface, path algorithms for UMC finishing have been developed. Propose and compare two kinds of polishing dwell time algorithms, and the derivation process and computer simulation result of the algorithms was also presented. The experiments using the control algorithm have been conducted, and the efficiency of algorithm is proved by experimental results.


论文标题Polyline dwell time algorithm for every type of tool path for Ultrasonic- magnetorheological combined finishing

作者F. H. Zhang, X. B. Yu, Y. Zhang

期刊名称Advanced Materials Research

期卷2010,Volum

简单介绍Ultrasonic- magnetorheological combined finishing (UMC) is a new technique for the ultraprecision machining of aspheric surfaces, especially for high quality workpieces with small curvature radius concave surfaces. According to the characteristics of UMC finishing, material removal model has been developed. Several types of tool path planning algorithm have been discussed. Two kinds of polyline dwell time algorithm are presented. Polyline Dwell time algorithm based on two-dimensional discrete convolution is a new dwell time algorithm, and the dwell time on the endpoints which compose the tool path can be solved by the algorithm directly. Every polyline dwell time is the mean value of dwell time of two endpoints, therefore, the polyline dwell time of every type of tool path can be solved efficiently by the algorithm. The simulation of two dwell time algorithms has been conducted with same removal function and original error distribution, and the pv convergence rate is improved from 0.939 to 0.973 by using new algorithm. Figure error PV values reduced to 29.4 nm from 1.67μm after UMC finishing. The efficiency of the polyline dwell algorithm is proved by computer simulation and experimental results.


论文标题Post processing algorithm of ultrasonic- magnetorheological combined finishing for aspheric aurfaces

作者Fei Hu Zhang, Xing Bin Yu, Yong Zhang

期刊名称Advanced Materials Research

期卷2010,Volum

简单介绍Ultrasonic-magnetorheological combined (UMC) finishing is a new technique for the ultra precision machining of aspheric surfaces, especially for high quality workpieces with small-radius concave surfaces or freeform surfaces. The characteristic of UMC finishing is discussed, and an experimental equipment for UMC finishing with 5 axes is developed. According to requirements of deterministic removal in UMC finishing and the experimental equipment, post processing algorithm for aspheric surfaces is researched. The derivation process and computer simulation result of the algorithm is presented. The error analysis is conducted and the error control method is also proposed. A series of experiments have been conducted, and experimental results show that high quality surfaces can be achieved by the post processing algorithm.


论文标题Planning and Implementation of tool path computer controlled polishing optical surfaces

作者X. B. Yu, F. H. Zhang, Y. Zhang

期刊名称Proc. of SPIE

期卷2010, Vol.

简单介绍The application of @#%small tool@#% based on computer controlled is a breakthrough in modern optical machining. Dwell time distribution calculated by the iterative convolution algorithm is normally expressed by the points of intersection on the grid; however, the polishing tool path is composed of multi-segment polylines in fact. Therefore, it is required to calculate the time required when the polishing tool moved along the polylines on the workpiece surface before polishing. The algorithm to calculate the dwell time on each polyline of the tool path has been developed, thereby the deterministic material removal on workpiece surface by polishing tool can be achieved. A tool path algorithm based on fractal geometry has been developed, and the points of intersection on the grid are used as the endpoints of polylines directly. Each polyline dwell time is presented by the mean value of dwell time of two endpoints. A group of surface error data is simulated with actual parameters by spiral path and fractal path with the same number nodes. The contrasted results show that most of error results of the fractal path are better than spiral path. The intersection algorithm has been developed to optimize fractal path, thereby the fractal path can be used in polishing workpiece surface with various border efficiently.


论文标题空气静压导轨气膜波动的辨识

作者陈东菊，张飞虎，付鹏强

期刊名称机械工程学报

期卷2010,21

简单介绍空气静压导轨的气膜波动已成为超精密加工工件波纹度的主要影响因素。为分析空气静压导轨性能,利用雷诺方程推导出双排节流孔结构形式的空气静压导轨气膜刚度计算公式,并对相应空气静压导轨进行静态刚度检测试验以验证建立的导轨气膜刚度模型的正确性与可行性。结合静压导轨的模态分析结果,建立空气静压导轨的动力学模型。根据气浮导轨系统的动力学方程,给出气浮溜板刚度及其在加工过程中随气膜厚度变化的波动频率的仿真步骤和结果,根据引起的振动幅值分析气膜波动对加工结果的影响。利用小波变换把加工工件面形检测结果分解为各尺度下低频信号和高频信号,并把各尺度下高频信号做功率谱密度分析,从导轨气膜波动频率出发辨识出导轨气膜波动信号所在的尺度,根据相应的功率谱密度幅值推导出对加工结果的影响程度。


论文标题 Research on NC Interpolation Algorithm for Rotary Symmetric Aspheric Ultrasonic-Magnetorheological Compound Finishing

作者 Yong Zhang, Feihu Zhang, Guangyu Zhang

期刊名称Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures

期卷2009, Vol.

简单介绍Ultrasonic-magnetorheological compound finishing (UMC finishing) is a new technique for the ultraprecision machining of aspheric surfaces, especially for the ultraprecision machining of small-radiused concave surfaces and freeform surfaces. In this article, an UMC finishing equipment with five axes, four of which perform linkage movement, was developed. According to characteristic of UMC finishing, NC interpolation algorithm for rotary symmetric aspheric based on this equipment was researched. The derivation process and computer simulation result of the algorithm were also presented. The interpolation error of this algorithm was analyzed and the calculation formula was also proposed. According to the result of analysis, the precision of the interpolation algorithm is high and the algorithm is very useful. A great number of polishing experiments prove that high quality aspheric surface can be machined using this numerical interpolation algorithm. The profile accuracy of 58.32 nm and surface roughness Ra of 0.746 nm can be obtained stably.


论文标题Research on Deliquescent Polishing Fluid for KDP Crystals

作者S.L. Guo, F.H. Zhang, Y. Zhang

期刊名称Materials Science Forum

期卷2009，Volum

简单介绍The characteristics and principle of deliquescent polishing technology for potassium dihydrogen phosphate (KDP) crystals are introduced, and the performance requirements of deliquescent polishing fluid for KDP crystals are proposed. The main components of the deliquescent polishing fluid for KDP crystals were selected according to these performance requirements. Through uniformity experiment, stability experiment and fluidity experiment, uniformity, stability and fluidity of deliquescent polishing fluid for KDP crystals prepared using the selected components were tested. Through deliquescent polishing experiment of KDP crystal, polishing performance of deliquescent polishing fluid compounded using the selected components was tested. The material removal rate of the KDP crystal in the deliquescent polishing experiment was 6.03μm/min, and the surface roughness of the KDP crystal after deliquescent polishing was 4.857nm. The experimental results show that the compounded deliquescent polishing fluid for KDP crystals has good polishing performance and can reach the requirements.


论文标题Research on the Material Removsl Mechanism in Deliquescent Polishing of KDP Crystals

作者F.H. Zhang, S.L. Guo, Y. Zhang

期刊名称Key Engineering Materials

期卷2009，Volum

简单介绍A new ultraprecision machining technology for KDP crystals, deliquescent polishing technology for KDP crystals, is presented. On the basis of analyzing the definitions of deliquescence, the dissolution experiment of KDP crystal’s surface was conducted. Through the experiment, the material removal mechanism in deliquescent polishing of KDP crystals is proposed, and the deliquescent polishing device for KDP crystals is described. Based on the material removal mechanism in deliquescent polishing of KDP crystals, the deliquescent polishing experiment of KDP crystal was carried out, the experimental result has verified the validity, feasibility and effectiveness of the material removal mechanism.


论文标题Effect of Several Processing Parameters on Material Removal Ratio in the Deliquescent Polishing of KDP Crystals

作者F.H. Zhang, S.L. Guo, Y. Zhang

期刊名称Proc. of SPIE

期卷2009,Vol

简单介绍A new ultraprecision machining technology for potassium dihydrogen phosphate (KDP) crystals, deliquescent polishing technology for KDP crystals, which utilizes deliquescent effect for ultraprecision machining KDP crystals, is proposed. The principle and the advantages of technology are introduced. The deliquescent polishing procedure of KDP crystals is given. The deliquescent polishing experiments of KDP crystals are conducted, and the material removal ratios are calculated. Through the experiments, the effect of four processing parameters (velocity of polishing plate, velocity of drip, volume percentage of water in the deliquescent polishing fluid, polishing pressure) on material removal ratio in the deliquescent polishing of KDP crystals is researched. The plot of material removal ratio versus every processing parameter in the deliquescent polishing of KDP crystals is obtained, and the rules of material removal ratio in the deliquescent polishing of KDP crystals are reached.


论文标题Experimental Study on polishing Characteristics of ultrasonic- magnetorheological compound finishing

作者Feihu Zhang , Xingbin Yu , Yong Zhang

期刊名称Advanced Materials Research

期卷2009，Volum

简单介绍Concave aspheric surface with small radius is difficult to be fabricated by most of existing technologies for optical manufacture. Ultrasonic- magnetorheological compound finishing (UMC finishing) is a new technology for the ultra-precision machining of concave aspheric surface with small radius and freeform surface. The principle and experimental deviece used in UMC finishing are introduced. Main technological parameters in UMC finishing include the magnetic flux density, the gap between the polishing tool head and the workpiece, the rotational speed of polishing tool head and so on. The technology experiment of UMC finishing for optical glass K9 is conducted, and the influence of main technological parameters on the material removal rate has been studied by analysis of experimental results. The analysis of removal profile curve of UMC finishing spots prove that the material removal function of UMC finishing meet the surface error convergence requiement in computer control precise optical surface machining. The part surfaces after UMC finishing are measured by an Atomic Force Microscopy (AFM), and the surface roughness Ra is 1.591 nm after polishing for 10 min. It is demonstrated that the polishing capability of the technology is excellent.


论文标题Identification and analysis for the guideway error based on the cross-correlation analysis in machine tools

作者D.J.Chen, F.H.Zhang, S. Dong

期刊名称Proceeding of the euspen Internaltioinal Conference



论文标题Identification the motion error of machine tool based on the correlation analysis

作者Zhang Feihu, Chen Dongju, Zhang Yong

期刊名称 Journal of Wuhan University of Technology

期卷2009S1

简单介绍Machine tool has been widely used in the production of the military and civilian.The machining precision of the workpiece is the direct reflection for the machining performance of machine tool.With the improvement for requirement of the machining precision,improving the accuracy of machining is becoming important.Guideway and spindle are the key motion components that decided the shape,the relative position and the surface roughness of the workpiece.In order to adapt to the requirements of the workpiece machining,this paper analyzes the errors of guideway and spindle that affect the accuracy of the processing,establishes the motion relations for every errors of guideway in machining process,identifies the regular for the straightness,bending of the guideway and rotating error of spindle that influences the workpiece surface.Finally,according to the correlation analysis of the measured and the simulation results,the motion error of machine tool is identified,which lays the foundation for improving the accuracy of machine tool in next step.


论文标题Polishing of ultra smooth surface with nanoparticle colloid jet

作者Zhang, F.H.; Song, X.Z. ; Zhang, Y.

期刊名称Key Engineering Materials

期卷2009，Volum

简单介绍A nanoparticle colloid jet machining system has been developed for polishing ultra smooth surface of brittle materials. Interaction between nanoparticles and work surface in nanoparticle colloid jet machining has been given, and the theoretical dependence of the material removal rate with various important process parameters of the nanoparticle colloid jet machining have been investigated through material removal experiments. Some material removal results of nanoparticle colloid jet machining show that it is possible to obtain removal rates of one nanometer level per minute for glass surfaces with appropriate machining process parameters. A K9 glass surface was polished for obtaining ultra smooth surface. The surface roughness value of atomic force microscopy (AFM) observations is under 1nm Rms.


论文标题Luan Dianrong, Figuring of an Ultrasmooth Surface in Nanoparticle Colloid Jet Machining

作者Zhang Feihu, Song Xiaozong, Zhang Yong

期刊名称 Journal of Micromechanics and Microengineering

期卷2009，Vol.

简单介绍The surface impact interactions of hydroxy radicals and nanoparticles in a colloid system, involving chemisorption reactions which break structural bonds and alter the surface chemistry and structure, offer promising applications for producing an ultra-smooth surface. A nanoparticle colloid jet machining system has been developed in which the reversible polymerization and decomposition reaction is utilized to remove surface atoms. The nanoparticles before and after polishing were measured by using diffuse reflectance Fourier-transform infrared spectroscopy, and the infrared bands were analyzed. The study revealed the mechanism and essence of the interface reaction between the SiO2 nanoparticle colloid and K9 glass on the molecular level, and could provide the theoretical basis for the usage of nanoparticle colloid jet machining for figuring of an ultra-smooth surface in modern optical machining. We employed the system to polish a K9 substrate; some recent experiments prove that it is possible to obtain removal rates of the 1 nm level per minute for glass surfaces with appropriate process parameters. The microroughness of the work surface processed by nanoparticle colloid jet machining is under 1 nm rms.


论文标题Deformation and removal characteristics in nanoscratching of 6H-SiC with Berkovich indenter[J]

作者Meng B, Zhang F, Li Z

期刊名称Materials Science in Semiconductor Processing

期卷31



论文标题Single diamond grit scratch tests of Silicon Carbide ceramics [J]

作者LIFEI　LIU，FEIHU　ZHANG，MINHUI　LIU

期刊名称OPTOELECTRONICS AND ADVANCED MATERIALS-RAPID COMMUNICATIONS

期卷9



论文标题碳化硅陶瓷的超声振动辅助磨削[J]

作者刘立飞, 张飞虎, 刘民慧

期刊名称光学精密工程

期卷23



论文标题Simulation analysis of grinding wheel motion trajectory on SiC ceramics aspheric surface grinding[C]

作者Zhang F, Liu L, Li C

期刊名称SPIE，7th International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT 2014)

期卷 92811N-92811N-6



论文标题Mechanism Underlying the Formation of Subsurface Cracks in Optical Glass Due to the Dynamic Impact of Single-abrasive Grinding[J]

作者CHEN Jiang, ZHAO Hang,ZHANG Fei-hu*，ZHANG Yuan-jing，ZHANG Yong

期刊名称Journal of Central South University

期卷22



论文标题新型后混合式磨料水射流系统的研制

作者张成光，张勇，张飞虎，栾殿荣

期刊名称机械工程学报

期卷51



论文标题基于纳米划痕实验和有限元仿真的KDP晶体断裂性能研究

作者汪圣飞，安晨辉，张飞虎，王健，雷向阳，张剑锋

期刊名称人工晶体学报

期卷49



论文标题 Mechanism of ultrasonic-pulse electrochemical compound machining based on particles

作者 Zhang Chengguang, Zhang Yong, Zhang Feihu

期刊名称Journal of Central South University

期卷21



论文标题An experimental and theoretical investigation on the brittle ductile transition and cutting force anisotropy in cutting KDP crystal

作者Wang S F, An C H, Zhang F H*, Wang J, Lei X Y, Zhang J F

期刊名称International Journal of Machine Tool & Manufacture

期卷106



论著成果


先后负责和参加了三十多项国家和省部级等科研项目的研究工作，在国内外学术刊物上发表研究论文二百多篇，获部级科技进步奖五项，获得国家发明专利十多项。先后承担和完成国家自然科学基金重点项目两项，面上项目六项，973课题一项，国家科技重大专项课题一项。

1.“非球光学曲面精密磨削应用技术研究”，该项研究2003年获国防科工委科技进步三等奖。

2.“在线电解修整(ELID)磨削技术研究”，该项研究得到多项课题支持，研究成果目前已在航天、航空、兵器等行业的多家单位应用，本人为课题负责人。

3. 作为项目负责人已完成国家自然科学基金面上项目五项，在研项目一项。2009年作为项目负责人完成了国家自然科学基金重点项目“各向异性软脆功能晶体高效精密和超精密加工技术基础”的研究。

4. 作为主要完成者之一的“微纳米切削加工基础及相关技术”2007年获教育部自然科学奖一等奖。

5. 863项目“KDP晶体加工专用超精密机床研制”等项目负责人，研制了国内首台大口径KDP晶体加工专用超精密机床，已应用于激光核聚变KDP晶体器件的加工，填补了国内大口径KDP晶体超精密加工设备的空白，2014年获黑龙江省技术发明一等奖。