| 扫描干涉光刻机相位锁定系统设计 |
| 王磊杰, 张鸣, 朱煜, 鲁森, 杨开明 |
| 清华大学 机械工程系, 摩擦学国家重点实验室, 北京 100084 |
| Design of phase locking system for an interference lithography scanner |
| WANG Leijie, ZHANG Ming, ZHU Yu, LU Sen, YANG Kaiming |
| State Key Laboratory of Tribology, Department of Mechanical Engineering, Tsinghua University, Beijing 100084, China |
摘要:
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| 摘要针对扫描干涉光刻机干涉图形相位锁定需求, 提出并设计了干涉图形相位锁定系统。该系统采用零差相位干涉仪实现干涉图形相位漂移的高速高精测量, 采用声光调制器以高速高精移频的方式进行干涉图形相位调制, 并通过闭环反馈控制实现相位锁定。实验结果显示: 系统闭环控制可实现±1/25个干涉图形周期的锁定精度, 系统具有良好的相位锁定性能。该系统具有光路短、易于装调、激光利用率高等优点, 未来用于扫描干涉光刻机更具优势。 | ||||||
| 关键词 ：扫描干涉光刻机,相位锁定,零差相位干涉仪,声光调制器 | ||||||
| Abstract：An interference image phase locking system is built for an interference lithography scanner. This system has a feedback control system and uses the homodyne interference method for fast, accurate phase drift measurement and an acousto-optic modulator to accurately shift the phase of the interference image. Tests show that the system has ±1/25 interference image period accuracy when the system uses closed-loop control, which illustrates that this phase locking system has good locking performance. In addition, the system has a short optical path, is easy to assemble and adjust, and has a high laser utilization ratio, so the system is suitable for high-speed interference lithography scanners. | ||||||
| Key words：interference lithography scannerphase lockinghomodyne phase interferometeracousto-optic modulator | ||||||
| 收稿日期: 2015-01-07 出版日期: 2015-09-18 | ||||||
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| 通讯作者:张鸣,副研究员,E-mail:zm01@mails.tsinghua.edu.cnE-mail: zm01@mails.tsinghua.edu.cn | ||||||
| 引用本文: |
| 王磊杰, 张鸣, 朱煜, 鲁森, 杨开明. 扫描干涉光刻机相位锁定系统设计[J]. 清华大学学报（自然科学版）, 2015, 55(7): 722-727. WANG Leijie, ZHANG Ming, ZHU Yu, LU Sen, YANG Kaiming. Design of phase locking system for an interference lithography scanner. Journal of Tsinghua University(Science and Technology), 2015, 55(7): 722-727. |
| 链接本文: |
| http://jst.tsinghuajournals.com/CN/或 http://jst.tsinghuajournals.com/CN/Y2015/V55/I7/722 |
图表:
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| 图1 扫描干涉光刻机干涉曝光及相位锁定系统原理 |
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| 图2 相位锁定系统实验装置 |
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| 图3 开环和闭环情况的干涉仪电压值 |
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| 图4 开环情况下干涉仪电压幅值谱密度函数 |
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| 图5 闭环情况下干涉仪电压幅值谱密度函数 |
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| 图6 闭环情况下干涉仪电压累积幅值谱函数 |
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