| 扫描干涉光刻机光束位姿自动准直系统设计 |
| 朱煜1,2, 王磊杰1, 张鸣1, 祁利山2 |
| 1. 清华大学 机械工程系, 摩擦学国家重点实验室, 北京 100084; 2. 电子科技大学 机械电子工程学院, 成都 611731 |
| Design of beam pose automatic alignment system for an interference lithography scanner |
| ZHU Yu1,2, WANG Leijie1, ZHANG Ming1, QI Lishan2 |
| 1. State Key Laboratory of Tribology, Department of Mechanical Engineering, Tsinghua University, Beijing 100084, China; 2. School of Mechatronics Engineering, University of Electronic Science and Technology of China, Chengdu 611731, China |
摘要:
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| 摘要针对扫描干涉光刻机对干涉光束的高精度位姿准直需求, 设计了高精度光束自动准直系统; 基于该系统提出了利用每步迭代调节后的位姿实测值作为下一步迭代的起始值进行迭代准直和正交平面内位姿交替准直的光束位姿迭代准直策略, 解决了迭代过程误差积累问题和正交平面内电机耦合问题。实验结果显示: 该光束自动准直系统能够实现两个位置准直精度均优于5 μm和两个角度准直精度均优于3 μrad, 满足扫描干涉光刻机光束位姿准直精度需求。 | |||
| 关键词 ：光束自动准直,迭代准直策略,扫描干涉光刻机 | |||
| Abstract：An accurate automatic beam alignment system is designed for beam alignment in an interference lithography scanner. The iterative alignment system uses the previously measured value in the next iteration step for the iterative alignment procedure that iterates the beam alignment in two orthogonal planes. The alignment procedure then compensates for the error accumulation and pico-motor coupling in the two orthogonal plane. Tests demonstrate that the position and angle accuracy of this automatic beam alignment system with four degrees of freedom are better than 5 μm and 3 μrad, which satisfies the alignment requirements for an interference lithography scanner. | |||
| Key words：beam automatic alignmentiteration alignment strategyinterference lithography scanner | |||
| 收稿日期: 2014-12-17 出版日期: 2015-09-18 | |||
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| 引用本文: |
| 朱煜, 王磊杰, 张鸣, 祁利山. 扫描干涉光刻机光束位姿自动准直系统设计[J]. 清华大学学报（自然科学版）, 2015, 55(7): 716-721,733. ZHU Yu, WANG Leijie, ZHANG Ming, QI Lishan. Design of beam pose automatic alignment system for an interference lithography scanner. Journal of Tsinghua University(Science and Technology), 2015, 55(7): 716-721,733. |
| 链接本文: |
| http://jst.tsinghuajournals.com/CN/或 http://jst.tsinghuajournals.com/CN/Y2015/V55/I7/716 |
图表:
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| 图1 干涉光束射入基底平面示意图 |
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| 图2 光束自动准直系统结构 |
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| 图3 本文光束自动迭代准直策略 |
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| 表1 系统光路设计参数 |
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| 图4 光束自动准直系统实验装置 |
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| 图5 自动准直系统控制架构 |
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| 图6 测量系统分辨率测试和精度标定装置 |
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| 图7 微动台连续步进1μm 的PSD 测量结果 |
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| 图8 PSD 精度标定结果 |
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| 图9 位置自动准直结果 |
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| 图10 角度自动准直结果 |
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| 表2 50组准直数据的均值和标准差 |
参考文献:
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