张为¹，王佳琪¹，童炜²
AuthorsHTML:张为¹，王佳琪¹，童炜²
AuthorsListE:Zhang Wei¹，Wang Jiaqi¹，Tong Wei²
AuthorsHTMLE:Zhang Wei¹，Wang Jiaqi¹，Tong Wei²
Unit:1. 天津大学微电子学院，天津 300072；
2. 长江存储科技有限公司，上海 201210
Unit_EngLish:1. School of Microelectronics，Tianjin University，Tianjin 300072，China；
2. Yangtze Memory Technologies Co.，Ltd.，Shanghai 201210，China
Abstract_Chinese:随着集成电路产业的快速发展，芯片的集成度越来越高，芯片测试成本占整个生产成本的比例越来越大．高精度、低成本的直流参数自动测试系统已然成为现今集成电路测试的必然要求．为满足我国当代集成电路产业发展的需要，快速且有效地检验芯片性能，对集成电路直流参数测试原理和测试技术展开研究．提出了一种基于现场可编程门阵列的集成电路直流参数的测试方法，在模块化的设计原则基础上，以低成本高精度为方向，搭建了测试系统的软硬件框架结构．设计了具有宽测试范围、高测量精度的精密测量电路，具有16个独立可编程电压输出通道和一路测量电路，可以施加并测量最大±30V的电压和最大±500mA的电流．系统采用现场可编程门阵列作为控制中心，通过硬件语言Verilog HDL编程实施对系统的逻辑控制，进一步降低成本并提高系统的可移植性；通过线性拟合得出每一条测试回路的校准系数，改变DAC实际偏移量，使得施加在被测器件上的激励值接近理想值来提高系统测试精度．实验采用高精度电阻作为负载对不同测量模式下的系统性能进行了验证并计算出测试精度，测试结果显示：基于现场可编程门阵列的直流参数测试系统取得了较高的测试精度和较广的测试范围，经校准后的测试系统相对误差都在±0.03%之内，能够满足三维闪存芯片直流参数测试的需要，并且具有一定的通用性．
Abstract_English:As the integrated circuit industry develops rapidly，the chip testing costs for advanced integrated circuit account for a large proportion of the overall cost of chip production. Thus，designing reliable DC parameter automatic test systems with high precision and low cost is necessary. Accordingly，numerous studies have been conducted on integrated circuit DC parameter testing，and a test system has been proposed based on the field-programmable gate array(FPGA)that has been widely used in the embedded system. The designed system consists of several parts and follows the modular design principle. A precision measurement circuit was designed with 16 independently program-mable voltage output channels and one measurement circuit，which can provide and measure voltage up to ±30V and current up to ±500mA. To reduce the test cost and broaden the application range of the system，the FPGA that was programed using Verilog HDL，was employed to control the system. Additionally，the calibration coefficient of each test loop，which was obtained by linear fitting，was introduced to perfect the system and improve the test accu-racy. Therefore，the error caused by the device and analog circuit was calibrated，so that the excitation value applied to the device under the test is closest to the ideal value. During the test process，precise resistors were used as loads to verify the system performance under different measurement modes. The test results show that the FPGA-based DC parameter test system has a higher test accuracy and wider test range. The relative errors of the calibrated test systems are estimated within ±0.03%，indicating that the system can perform a DC parameter test of 3D NAND flash memory chips.
Keyword_Chinese:集成电路测试；直流参数测试；精密测量单元；系统误差校准；现场可编程门阵列
Keywords_English:integrated circuit test；DC parameters test；precision measurement unit；system error calibration；field-programmable gate array

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