微系统设计系微电子学与固体电子学的专业选修课。通过本课程介绍微系统的基本概念；典型微系统的工作原理；典型基本单元微传感器和微执行器；微系统设计中的工程科学与工程力学，微系统的测量技术和控制原理，微系统的封装技术。

Microsystem design measure and control is a specialized core course. The control theory used in some microsystem is introduced. The scaling law in miniaturization is discussed. Some typical microsystem is presented. The working priniciple of the microsyatem are explained. The concept of microsystem should be mastered. The working mechanism of micromachined sensors and micromachined actuators also introduced.