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快闪存储器阈值电压分布读取电路设计

清华大学 辅仁网/2017-07-07

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快闪存储器阈值电压分布读取电路设计
伍冬(),刘辉,谢南,高岑岑
Threshold voltage distribution readout circuit design for flash memory
Dong WU(),Hui LIU,Nan XIE,Cencen GAO
Institute of Microelectronics, Tsinghua University, Beijing 100084, China

摘要:
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摘要提出了一种浮栅型快闪存储器(flash memory)阈值电压分布读取方法。其读出电路结构主要包括电容反馈互导放大器(capacitor feedback trans-impedance amplifier, CTIA)和8 b循环型模数转换器(cyclic analog-to-digital converter), 以上电路将存储单元的阈值电压进行数字量化输出。此外芯片还集成了译码电路、高压电路、偏置电路和控制电路等辅助电路。上述设计采用0.13 μm 2P3M NOR 快闪存储器工艺,芯片面积为2.1 mm×2.8 mm, 其中存储阵列包含1 024×1 024个存储单元。测试结果表明该读取电路能够精确地读取快闪存储器的阈值电压分布,可以用来进行存储阵列器件和工艺的离散性等特性研究,也可以用于编程/擦除算法的优化设计。

关键词 快闪存储器,阈值电压分布,循环型模数转换器
Abstract:This paper describes a readout circuit for the flash memory threshold voltage distribution. This circuit includes a capacitor feedback trans-impedance amplifier (CTIA) and an 8 b cyclic analog-to-digital converter which converts the threshold voltages into digital outputs. The system also has horizontal and vertical decoders, a high voltage generator, a bias module and a timing control circuit. The chip was fabricated using 0.13 μm NOR flash memory process with 1 024×1 024 cells and a 2.1 mm×2.8 mm die size. Tests show that this readout circuit accurately depicts the threshold voltage distribution. The circuit can also be used to analysis the discreteness of memory cells and system processes and to improve program/erase algorithms.

Key wordsflash memorythreshold voltage distributioncyclic analog-to-digital converter
收稿日期: 2013-12-12 出版日期: 2015-04-17
基金资助:国家自然科学基金资助项目(61106102)
引用本文:
伍冬,刘辉,谢南,高岑岑. 快闪存储器阈值电压分布读取电路设计[J]. 清华大学学报(自然科学版), 2014, 54(4): 546-550.
Dong WU,Hui LIU,Nan XIE,Cencen GAO. Threshold voltage distribution readout circuit design for flash memory. Journal of Tsinghua University(Science and Technology), 2014, 54(4): 546-550.
链接本文:
http://jst.tsinghuajournals.com/CN/ http://jst.tsinghuajournals.com/CN/Y2014/V54/I4/546


图表:
对应不同阈值电压的存储单元个数分布
存储单元结构图
系统结构图
阈值电压读取电路与时序
1.5 b冗余位量化技术循环型ADC结构图
芯片的显微照片
快闪存储器编程/擦除后阈值电压分布统计结果
快闪存储器位线寄生电阻的影响
不同积分电容和积分时间读取结果


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