删除或更新信息,请邮件至freekaoyan#163.com(#换成@)

回转对称微结构光学模具的超精密切削B轴旋转加工工艺

清华大学 辅仁网/2017-07-07

回转对称微结构光学模具的超精密切削B轴旋转加工工艺
高兴, 李勇, 钟昊, 岳全, 李朝将
清华大学 机械工程系, 精密超精密制造装备及控制北京市重点实验室, 摩擦学国家重点实验室, 北京 100084
B axis rotating machining of microstructured optical molds with rotational symmetry based on ultra-precision cutting
GAO Xing, LI Yong, ZHONG Hao, YUE Quan, LI Chaojiang
State Key Laboratory of Tribology, Beijing Key Laboratory of Precision/Ultra-Precision Manufacturing Equipments of Control, Department of Mechanical Engineering, Tsinghua University, Beijing 100084, China

摘要:

输出: BibTeX | EndNote (RIS)
摘要为避免回转对称微结构光学模具加工中产生的毛刺、尖角缺损及表面划痕,提出一种基于超精密切削的B轴旋转加工工艺。通过实验研究加工路径、切削速度、B轴旋转速度及切深等影响微模具面形精度和表面质量的主要因素,优化切削轨迹规划与加工参数,开展了2种微结构模具的加工实验,得到尺寸精度小于1.4 μm、表面粗糙度小于14 nm的结构完整性较好、表面无划痕的模具。实验结果验证了回转对称微结构光学模具B轴旋转加工工艺的可行性。
关键词 超精密切削,B轴旋转加工工艺,回转对称微结构,光学模具,结构完整性
Abstract:A B axis rotating machining process based on ultra-precision cutting was developed to prevent burrs, sharp corner defects and surface scratches when machining microstructured optical molds with rotational symmetry. The form accuracy and surface quality of the molds were mainly influenced by the machining path, cutting speed, B axis rotating speed and cutting depth. Tests of these factors were used to optimize the cutting trajectory planning and machining parameters. Two microstructured molds were constructed with no sharp corner defects and no surface scratches, dimensional accuracies of 1.4 μm and surface roughnesses better than 14 nm. The results show the feasibility of the B axis rotating machining process for cutting microstructured optical molds with rotational symmetry.
Key wordsultra-precision cuttingB axis rotating machiningrotationally symmetric microstructureoptical moldstructure integrity
收稿日期: 2016-06-07 出版日期: 2017-02-21
ZTFLH:TG519.3
通讯作者:李勇,研究员,E-mail:liyong@mail.tsinghua.edu.cnE-mail: liyong@mail.tsinghua.edu.cn
引用本文:
高兴, 李勇, 钟昊, 岳全, 李朝将. 回转对称微结构光学模具的超精密切削B轴旋转加工工艺[J]. 清华大学学报(自然科学版), 2017, 57(2): 120-127.
GAO Xing, LI Yong, ZHONG Hao, YUE Quan, LI Chaojiang. B axis rotating machining of microstructured optical molds with rotational symmetry based on ultra-precision cutting. Journal of Tsinghua University(Science and Technology), 2017, 57(2): 120-127.
链接本文:
http://jst.tsinghuajournals.com/CN/10.16511/j.cnki.qhdxxb.2017.22.002 http://jst.tsinghuajournals.com/CN/Y2017/V57/I2/120


图表:
图1 常规数控插补加工方法
图2 B轴旋转加工方法示意图
图3 B轴旋转对刀方法示意图
图4 半圆弧刀与球面特征模具
图5 等半径球面特征模具切削轨迹规划
图6 尖刀与锥面特征模具
图7 锥面特征模具加工路径规划
图8 超精密切削加工实验系统
图9 球面特征模具示意图与常规数控方法加工实验结果
图10 球面特征模具加工实验结果
图11 锥面特征模具第1次加工实验结果
图12 锥面特征模具优化后加工实验结果


参考文献:
[1] Brinksmeier E, Riemer O, Stem R. Machining of precision parts and microstructures[C]//Proceedings of the 1st International Conference and General Meeting of the European Society for Precision Engineering and Nanotechnology. Yokohama, 1999:3-11.
[2] Xie W T, Dai Y J, Wang R Z, et al. Concentrated solar energy applications using Fresnel lenses:A review[J]. Renewable and Sustainable Energy Reviews, 2011, 15:2588-2606.
[3] 赵清亮, 郭兵. 微结构光学功能元件模具的超精密磨削加工技术[J]. 机械工程学报, 2011, 47(21):177-185.ZHAO Qingliang, GUO Bing. Ultraprecision grinding technology of microstructured optical functional molds[J]. Journal of Mechanical Engineering, 2011, 47(21):177-185. (in Chinese)
[4] Brenner K H, Kufner M, Kufner S, et al. Application of three-dimensional micro-optical components formed by lithography, electroforming, and plastic molding[J]. Applied Optics, 1993, 32(32):6464-6469.
[5] 王贵林, 朱登超, 戴一帆. 复杂光学表面的快刀伺服加工特性与路径规划[J]. 机械工程学报, 2011, 47(15):175-180.WANG Guilin, ZHU Dengchao, DAI Yifan. Machining characteristics and route planning of complex optical surface by using fast tool servo[J]. Journal of Mechanical Engineering, 2011, 47(15):175-180. (in Chinese)
[6] 李荣彬, 孔令豹, 张志辉, 等. 微结构自由曲面的超精密单点金刚石切削技术概述[J]. 机械工程学报, 2013, 49(19):144-155. LI Rongbin, KONG Lingbao, ZHANG Zhihui, et al. An overview of ultra-precision diamond machining of microstructured freeform surfaces[J]. Journal of Mechanical Engineering, 2013, 49(19):144-155. (in Chinese)
[7] Brinksmeier E, Ralf G, Lars S. Review on diamond-machining processes for the generation of functional surface structures[J]. CIRP Journal of Manufacturing Science and Technology, 2012, 5:1-7.
[8] Sotgiu G, Schirone L. Microstructured silicon surfaces for field emission devices[J]. Applied Surface Science, 2005, 240(1-4):424-431.
[9] Jiang W. Diamond turning microstructure optical components[C]//Proceeding of SPIE 4th International Symposium on Advanced Optical Manufacturing and Testing Technologies. Bellingham, 2009, 7284:1-6.
[10] 郭兵. 微结构表面的金刚石飞切加工研究[D]. 哈尔滨:哈尔滨工业大学, 2008.GUO Bing. Diamond Fly-Cutting of Microstructured Surface[D]. Harbin:Harbin Institute of Technology, 2008. (in Chinese)
[11] To S, Kwok T C, Cheung C F, et al. Study of ultra-precision diamond turning of a microlens array with a fast tool servo system[C]//Proceedings of SPIE. Xi'an, 2006, 6149, S1490.
[12] Kim H S, Lee K I, Lee K M, et al. Fabrication of free-form surfaces using a long-stroke fast tool servo and corrective figuring with on-machine measurement[J]. International Journal of Machine Tools & Manufacture, 2009, 49:991-997.
[13] Zhang H J, Chen S J, Zhou M, et al. Fast tool servo control for diamond-cutting microstructured optical components[J]. Journal of Vacuum Science & Technology B:Microelectronics and Nanometer Structures, 2009, 27(3):1226-1229.
[14] Yan J W, Maekawa K, Tamaki J, et al. Micro grooving on single-crystal germanium for infrared Fresnel lenses[J]. J Micromech Microeng, 2005, 15:1925-1931.
[15] Allsop J L, Mateboer A, Shore P. Optimising efficiency in diamond turned Fresnel mould s[C]//Proceedings of SPIE. Strasbourg, 2011, 8065:806509-1-806509-11.
[16] Wang Y L, Zhao Q L, Shang Y J, et al. Ultra-precision machining of Fresnel microstructure on die steel using single crystal diamond tool[J]. Journal of Materials Processing Technology, 2011, 211:2152-2159.
[17] Duong Cam Vinh, 李朝将, 李勇, 等. 超精密数控机床B旋转轴的可量化对刀方法[J]. 清华大学学报:自然科学版, 2014, 54(11):1466-1470.Duong Cam Vinh, LI Chaojiang, LI Yong, et al. Tool alignment on the B axis rotary table of an ultra-precision lathe machine[J]. J Tsinghua Univ:Sci & Technol, 2014, 54(11):1466-1470. (in Chinese)
[18] Li C J, Li Y, Gao X, et al. Ultra precision machining of Fresnel lens mould by single point diamond turning based on axis B rotation[J]. Int J Adv Manuf Technol, 2015, 77:907-913.


相关文章:
No related articles found!

相关话题/光学 实验 规划 机械工程 结构