回转对称微结构光学模具的超精密切削B轴旋转加工工艺

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清华大学辅仁网/2017-07-07

高兴, 李勇, 钟昊, 岳全, 李朝将

清华大学机械工程系, 精密超精密制造装备及控制北京市重点实验室, 摩擦学国家重点实验室, 北京 100084

B axis rotating machining of microstructured optical molds with rotational symmetry based on ultra-precision cutting

GAO Xing, LI Yong, ZHONG Hao, YUE Quan, LI Chaojiang

State Key Laboratory of Tribology, Beijing Key Laboratory of Precision/Ultra-Precision Manufacturing Equipments of Control, Department of Mechanical Engineering, Tsinghua University, Beijing 100084, China

摘要:

输出: BibTeX | EndNote (RIS)

摘要为避免回转对称微结构光学模具加工中产生的毛刺、尖角缺损及表面划痕，提出一种基于超精密切削的B轴旋转加工工艺。通过实验研究加工路径、切削速度、B轴旋转速度及切深等影响微模具面形精度和表面质量的主要因素，优化切削轨迹规划与加工参数，开展了2种微结构模具的加工实验，得到尺寸精度小于1.4 μm、表面粗糙度小于14 nm的结构完整性较好、表面无划痕的模具。实验结果验证了回转对称微结构光学模具B轴旋转加工工艺的可行性。

关键词 ：超精密切削,B轴旋转加工工艺,回转对称微结构,光学模具,结构完整性

Abstract：A B axis rotating machining process based on ultra-precision cutting was developed to prevent burrs, sharp corner defects and surface scratches when machining microstructured optical molds with rotational symmetry. The form accuracy and surface quality of the molds were mainly influenced by the machining path, cutting speed, B axis rotating speed and cutting depth. Tests of these factors were used to optimize the cutting trajectory planning and machining parameters. Two microstructured molds were constructed with no sharp corner defects and no surface scratches, dimensional accuracies of 1.4 μm and surface roughnesses better than 14 nm. The results show the feasibility of the B axis rotating machining process for cutting microstructured optical molds with rotational symmetry.

Key words：ultra-precision cutting B axis rotating machining rotationally symmetric microstructure optical mold structure integrity

收稿日期: 2016-06-07 出版日期: 2017-02-21

ZTFLH:

TG519.3

通讯作者:李勇,研究员,E-mail:liyong@mail.tsinghua.edu.cnE-mail: liyong@mail.tsinghua.edu.cn

引用本文:

高兴, 李勇, 钟昊, 岳全, 李朝将. 回转对称微结构光学模具的超精密切削B轴旋转加工工艺[J]. 清华大学学报（自然科学版）, 2017, 57(2): 120-127.
GAO Xing, LI Yong, ZHONG Hao, YUE Quan, LI Chaojiang. B axis rotating machining of microstructured optical molds with rotational symmetry based on ultra-precision cutting. Journal of Tsinghua University(Science and Technology), 2017, 57(2): 120-127.

链接本文:

http://jst.tsinghuajournals.com/CN/10.16511/j.cnki.qhdxxb.2017.22.002或 http://jst.tsinghuajournals.com/CN/Y2017/V57/I2/120

图表:

图1 常规数控插补加工方法

图2 B轴旋转加工方法示意图

图3 B轴旋转对刀方法示意图

图4 半圆弧刀与球面特征模具

图5 等半径球面特征模具切削轨迹规划

图6 尖刀与锥面特征模具

图7 锥面特征模具加工路径规划

图8 超精密切削加工实验系统

图9 球面特征模具示意图与常规数控方法加工实验结果

图10 球面特征模具加工实验结果

图11 锥面特征模具第1次加工实验结果

图12 锥面特征模具优化后加工实验结果

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