| 基于Legendre正交矩的亚像素线宽测量方法 |
| 王伯雄, 杨春毓, 李伟, 秦垚 |
| 清华大学 精密仪器与机械学系, 精密测试技术及仪器国家重点实验室, 北京 100084 |
| Algorithm for sub-pixel line width measurement based on the orthogonal Legendre moment |
| WANG Boxiong, YANG Chunyu, LI Wei, QIN Yao |
| State Key Laboratory of Precision Measurement Technology and Instruments, Department of Precision Instruments and Mechanology, Tsinghua University, Beijing 100084, China |
摘要:
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| 摘要线宽测量对弱小目标检测有重要意义。该文提出了一种基于Legendre正交矩的亚像素线宽检测方法。该方法将一般线宽分解为两个对称线宽之和, 通过推导0、2、4阶Legendre正交矩, 得到对称线宽的计算公式, 最后加和得到实际线宽。针对离散数字图像, 推导并给出了正交矩的模板系数, 并分析了离散带来的测量误差及其修正方法。采用该测量方法对安瓿内标准颗粒异物进行粒径测量, 实验结果表明该方法具有较高的测量精度和效率。 | |||
| 关键词 ：线宽测量,Legendre,亚像素 | |||
| Abstract：Line width measurements are of great importance for detecting small objects. An algorithm is developed for sub-pixel line width measurements based on the orthogonal Legendre moment. The line width is converted into the sum of two different symmetrical line widths. The 0th, 2nd and 4th order orthogonal Legendre moments are used to develop expressions for the symmetrical line widths. Template coefficients of the moments are derived for analyzing digital images and the principle error is analyzed and corrected. Tests of the algorithm for measuring the line widths of standard particles in ampoules show that the algorithm is accurate and efficient. | |||
| Key words：line width measurementLegendresub-pixel | |||
| 收稿日期: 2012-11-12 出版日期: 2016-02-17 | |||
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| 基金资助:清华大学精密测试技术及仪器国家重点实验室自主研究项目 | |||
| 作者简介: 王伯雄(1947—), 男(汉), 江苏, 教授。E-mail: wangbx@tsinghua.edu.cn | |||
| 引用本文: |
| 王伯雄, 杨春毓, 李伟, 秦垚. 基于Legendre正交矩的亚像素线宽测量方法[J]. 清华大学学报（自然科学版）, 2016, 56(2): 218-222. WANG Boxiong, YANG Chunyu, LI Wei, QIN Yao. Algorithm for sub-pixel line width measurement based on the orthogonal Legendre moment. Journal of Tsinghua University(Science and Technology), 2016, 56(2): 218-222. |
| 链接本文: |
| http://jst.tsinghuajournals.com/CN/10.16511/j.cnki.qhdxxb.2016.22.012或 http://jst.tsinghuajournals.com/CN/Y2016/V56/I2/218 |
图表:
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| 图1 Legendre正交矩阶跃线宽模型 |
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| 图2 由普通线宽构造的对称线宽 |
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| 图3 Legendre正交矩5×5像素模板 |
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| 图4 线宽计算值与原理误差 |
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| 图5 100μm 标准颗粒局部成像图(放大图) |
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| 表1 100μm 标准颗粒的10次粒径测量值 |
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