陶金¹, 姚琲², 孙崇玲¹, 庞慰¹
AuthorsHTML:陶金¹, 姚琲², 孙崇玲¹, 庞慰¹
AuthorsListE:Tao Jin¹, Yao Pei ², Sun Chongling¹, Pang Wei¹
AuthorsHTMLE:Tao Jin¹, Yao Pei ², Sun Chongling¹, Pang Wei¹
Unit:1. 天津大学精密仪器与光电子工程学院，天津 300072；2. 天津大学材料科学与工程学院，天津 300072
Unit_EngLish:1．School of Precision Instrument and Opto-Electronics Engineering, Tianjin University, Tianjin 300072, China
2．School of Materials Science and Engineering, Tianjin University, Tianjin 300072, China
Abstract_Chinese:利用基于原子力显微镜的悬臂梁弯曲法, 对二维黑磷晶体两个特殊晶轴方向的弹性模量进行测量．通过有限元仿真对悬臂梁结构建模计算, 分析了影响测量结果精度的因素：悬臂梁弯曲变形量-厚度比、悬臂梁的长宽比和黑磷晶体弹性模量各向异性．结果表明, 悬臂梁长宽比相对于变形量-厚度比、弹性模量各向异性, 对测量结果影响更大, 其最大相对误差达－40% ．通过有限元仿真分析, 可以修正悬臂梁弯曲法力学模型中误差, 从而得到更准确的测量结果．
Abstract_English:Young’s moduli of 2D black phosphorus(BP) crystal along two special crystalline axes were measured by cantilever bending method of atomic force microscopy. The mechanical model of the cantilever was built and analyzed by finite element method to study the influence factors in measuring accuracy，including deformation-thickness ratio，length-width ratio and Young’s modulus anisotropy of black phosphorus. The result shows that length-width ratio affects measuring accuracy more than deformation-thickness ratio and Young’s modulus anisotropy do. The maximum error was -40% . It is necessary to fix the error of cantilever bending method by finite element method to get more accurate measurement results.
Keyword_Chinese:二维黑磷晶体; 各向异性; 原子力显微镜; 悬臂梁弯曲法; 有限元法
Keywords_English:2D black phosphorus(BP) crystal; anisotropy; atomic force microscopy(AFM); cantilever bending method; finite element method

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