有限元模拟和仿真技术能对微系统进行高效、准确的设计、仿真，是从事微纳科技研究的基本技能。本课程正是为了顺应这一要求而开设的，将全面向学生介绍微系统计有限元模拟仿真技术的基础知识和最新发展动态；阐述微系统建模、分析、仿真等。本课程的特色是：基础理论与上机实践相融合，讲解与研讨相结合，引领学生掌握微系统有限元分析的基本理论、方法，掌握微系统中结构分析、热学分析、动力学分析、电磁场分析等的基本原理和技能，为今后从事微纳科学技术研究打下良好的基础。

FEM simulation technology can simulate micro system effectively, accurately. So it is the basic tool for people do the micro and nano science and technology research. This course will teach students allround request knowledge and lately development in FEM, especially in the field of micro system that include micro system model, analysis and simulation etc. The feature of this course is that we adopt the combination form of theory and practice, teach and discuss which can lead students master the fundamentals of FEM analysis for micro system very well. After learned this course, students can master the theory and skill in structure analysis, thermal analysis, dynamics analysis, electromagnetic analysis in the micro system. It will construct strong base for graduates who do micro and nano science and technology research in the future.