外文题目: Method for improving measurement efficiency of lateral shearing interferometry
作者: Li, Jie; Tang, Feng; Wang, Xiangzhao; Dai, Fengzhao; Ding, Lei; Chen, Bo; Yang, Xiaoyu; Chai, Liqun
刊名: Opt. Eng.
年: 2017 卷: 56 期: 2 文章编号：24107
英文关键词:
interferometry; phase measurement; metrology
WAVE-FRONT RECONSTRUCTION; ZERNIKE POLYNOMIALS; INTERFEROGRAMS
英文摘要:
The computation time of wavefront reconstruction is decreased by sampling the difference fronts in the present study. The wavefront can be reconstructed with high accuracy up to 64 Zernike terms with only 32 x 32 sampled pixels. Furthermore, the computational efficiency can be improved by a factor of more than 1000, and the measurement efficiency of lateral shearing interferometry is improved. The influence of the terms used to reconstruct the wavefront, the grid size of the test wavefront, the shear ratio, and the random noise on the reconstruction accuracy is analyzed and compared, when the difference fronts are sampled with different grid sizes. Numerical simulations and experiments show that the relative reconstruction error is < 5% if the grid size of the sampled difference fronts is more than four times the radial order of difference Zernike polynomials with a reasonable noise level and shear ratio. (C) 2017 Society of Photo-Optical Instrumentation Engineers


文献类型: 期刊论文
正文语种: English
收录类别: SCI
DOI: 10.1117/1.OE.56.2.024107


全文传递服务