外文题目: Study on measurement accuracy of active optics null test systems based on liquid crystal spatial light modulator and laser interferometer
作者: Liu, Shijie; Xu, Longbo; Ma, Xiao; Zhang, Zhigang; Zhou, You; Lu, Qi; Bai, Yunbo; Shao, Jianda
刊名: Proc.SPIE
来源图书: OPTICAL MEASUREMENT SYSTEMS FOR INDUSTRIAL INSPECTION X
年: 2017 卷: 10329
会议名称: Conference on Optical Measurement Systems for Industrial Inspection X part of the SPIE Optical Metrology Symposium
英文关键词:
aspherical optics; active null corrector; liquid crystal spatial light modulator; measurement accuracy
SUBAPERTURE STITCHING INTERFEROMETRY; ASPHERIC SURFACES; CALIBRATION; ALGORITHM
英文摘要:
A common way to test high-quality aspherical lenses is to use a measurement system based on a set of null corrector and a laser interferometer. The null corrector can either be a combination of spherical lenses or be a computer generated hologram (CGH), which compensates the aspheric wave-front being tested. However, the null optics can't be repeatedly used once the shape of tested optics changes. Alternative active null correctors have been proposed based on dynamic phase modulator devices. A typical dynamic phase modulator is liquid crystal spatial light modulator (LCSLM), which can spatially change the refractive index of the liquid crystal and thus modify the phase of the input wave-front. Even though the measurement method based on LCSLM and laser interferometer has been proposed and demonstrated for optical testing several years ago, it still can't be used in the high quality measurement process due to its limited accuracy. In this paper, we systematically study the factors such as LCSLM structure parameters, encoding error and laser interferometer performance, which significantly affect the measurement accuracy. Some solutions will be proposed in order to improve the measurement accuracy based on LCSLM and laser interferometer.


文献类型: 会议论文
正文语种: English
收录类别: ISTP
DOI: 10.1117/12.2269435


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