外文题目: Investigation on measurement of mid-frequency wavefront error for large optics in high-power laser system
作者: Liu, Shijie; Jin, Chunxiang; Zhou, You; Bai, Yunbo; Zhao, Yuanan; Yi, Kui; Shao, Jianda
刊名: Proc.SPIE
来源图书: OPTICAL MEASUREMENT SYSTEMS FOR INDUSTRIAL INSPECTION IX
年: 2015 卷: 9525 文章编号：952536
会议名称: Conference on Optical Measurement Systems for Industrial Inspection IX
英文关键词:
mid-frequency wavefront error; large optics; high-power laser system; Fourier transform filtering technique
英文摘要:
In this paper, we extended the measurement method of mid-frequency wavefront error to spherical and aspherical components. Some influence factors like the system error of interferometer, environment variation, surface parallelism of optics, polarizations of interferometer illumination, and the wavefront distribution of optics are analyzed in detail. Some optimized measurement strategies for different kinds of optics are suggested Finally, experimental measurements on flat optics, spherical and aspherical optics are performed to testify the suggested measurement methods, respectively.


文献类型: 会议论文
正文语种: English
收录类别: ISTP
DOI: 10.1117/12.2184586


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