外文题目: Fast inspection of bulk and surface defects of large aperture optics in high power lasers
作者: Zhao, Yuan'an; Hu, Guohang; Liu, Shijie; Yi, Kui; Shao, Jianda
刊名: Proc.SPIE
来源图书: OPTICAL MEASUREMENT SYSTEMS FOR INDUSTRIAL INSPECTION IX
年: 2015 卷: 9525 文章编号：952534
会议名称: Conference on Optical Measurement Systems for Industrial Inspection IX
英文关键词:
defects; fast inspection; bulk; surface; large aperture optics
DAMAGE
英文摘要:
Laser induced damage for nanosecond pulse duration is attributed to the existence of defects. The growth and polishing, as well as coating deposition, may induce versatile kinds of defects, including dig, scratch and inclusion. It is special important to get the information of the defects, such as size and location, which is the basis to know the origin of the defects and figures out effective techniques to eliminate it. It is quite easy to get the information of the defects with micron-level resolution, but it is time-consuming and is not suitable for fast inspection of the large aperture (hundreds of millimeters). In this work, on-the-fly image capture technique was employed to realize fast inspection of large aperture optics. A continuous green laser was employed as illumination source to enhance and enlarge the image of bulk defects. So it could detect the submicron-scale defects. A transmission microscopy with white light illumination was employed to detect the surface defect. Its field of view was about 2.8mm x 1.6mm The sample was raster scanned driving by a stepper motor through the stationary illumination laser and digital camera, and the speed to scan the sample was about 10 mm/s. The results of large aperture optics proved the functions of this fast inspection technique.


文献类型: 会议论文
正文语种: English
收录类别: ISTP
DOI: 10.1117/12.2184582


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