外文题目: Imaging ellipsometer with large field of view
作者: Gu, Liyuan; Zeng, Aijun; Hu, Shiyu; Yuan, Qiao; Cheng, Weilin; Zhang, Shanhua; Hu, Guohang; He, Hongbo; Huang, Huijie
刊名: Proc.SPIE
来源图书: OPTICAL METROLOGY AND INSPECTION FOR INDUSTRIAL APPLICATIONS IV
年: 2016 卷: 10023 文章编号：1002315
会议名称: Conference on Optical Metrology and Inspection for Industrial Applications IV held as part of SPIE/COS Photonics Asia Conference
英文关键词:
imaging ellipsometer; large field of view; PCSA structure; Scheimpflug condition
英文摘要:
A polarizer-compensator- sample-analyzer (PCSA) imaging ellipsometer with large field of view is presented. The sample is imaged on a CCD sensor by a telecentric imaging system and its tilt is monitored by an optical autocollimator. The sample, the telecentric imaging system and the CCD sensor satisfy the Scheimpflug condition. In measurement, the light extinction measurement method and the four quadrants average method are used to improve the accuracy. In experiments, a chromium thin film sample is measured by the imaging ellipsometer and a spectroscopic ellipsometer. The measurement results by two ellipsometers are consistent. The usefulness of the imaging ellipsometer is verified.


文献类型: 会议论文
正文语种: English
收录类别: ISTP
DOI: 10.1117/12.2247848


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