外文题目: High-density grating pair for displacement measurement
作者: Xiang, Changcheng; Zhou, Changhe; Li, Shubin; Sun, Zhumei
刊名: Proc.SPIE
来源图书: HOLOGRAPHY, DIFFRACTIVE OPTICS, AND APPLICATIONS VII
年: 2017 卷: 10022 文章编号：1002211
会议名称: Conference on Holography, Diffractive Optics, and Applications VII
英文关键词:
displacement measurement; grating; simplified modal method
POLARIZING BEAM SPLITTER; TRANSMISSION GRATINGS; DIFFRACTION
英文摘要:
A novel method of displacement measurement based on a high density grating pair is proposed. When a laser beam is incident normal to a closely placed high density grating pair, efficiencies of transmission diffraction orders will change periodically along with the relative displacement of the two gratings in the grating period direction. The period of efficiency changing is equal to the grating period, thus measurement of displacement in the grating period direction can be achieved by detecting the power of diffraction orders.


文献类型: 会议论文
正文语种: English
收录类别: ISTP
DOI: 10.1117/12.2245658


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