外文题目: Study of a grating interferometer with high optical subdivision technique
作者: Lu, Yancong; Zhou, Changhe; Li, Shubin; Wei, Chunlong; Li, Minkang; Xiang, Xiansong; Deng, Jili; Xiang, Changcheng; Jia, Wei; Yu, Junjie; Wang, Jin; Li, Chao
刊名: Proc.SPIE
来源图书: HOLOGRAPHY, DIFFRACTIVE OPTICS, AND APPLICATIONS VII
年: 2017 卷: 10022 文章编号：1002214
会议名称: Conference on Holography, Diffractive Optics, and Applications VII
英文关键词:
grating interferometer; optical subdivision; right angle prism; measuring light; high resolution
DISPLACEMENT MEASUREMENT; LASER INTERFEROMETERS; STRAIGHTNESS; CALIBRATION; ENCODER
英文摘要:
Displacement laser interferometers and grating interferometers are two main apparatus for the micron-nanometer displacement measurement over a long range. However, the laser interferometers, whose measuring scale is based on the wavelength, are very sensitive to the environment. On the contrast, the grating interferometers change the measuring scale from wavelength to grating period, which is much stable for the measurement results. But the resolution of grating interferometer is usually lower than that of laser interferometer. Therefore, further investigation is needed to improve the performance of grating interferometer. As we known, the optical subdivision is a main factor that affects the measurement resolution. In this paper, a grating interferometer with high optical subdivision is presented based on the Littrow configuration. We mainly use right angle prisms accompanied with plane mirrors to make the measuring lights diffracted by the grating scale for many times. An optical subdivision factor of 1/24 can be obtained by this technique. A main difficulty of this technique is that the grating scale should be with high diffraction efficiency. Fortunately, the measuring light is incident on the grating scale at the Littrow angle, the grating scale can be designed with very high efficiency easily in this condition. Compared with traditional grating interferometers, this kind of grating interferometer can greatly increase the measuring resolution and accuracy, which could be widely used in nanometer-scale fabrications and measurements.


文献类型: 会议论文
正文语种: English
收录类别: ISTP
DOI: 10.1117/12.2246091


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