外文题目: Research on a grating interferometer with high optical subdivision based on quasi-Littrow configuration
作者: Deng, Jili; Zhou, Changhe; Yan, Xiaona; Wei, Chunlong; Lu, Yancong
刊名: Proc.SPIE
来源图书: HOLOGRAPHY, DIFFRACTIVE OPTICS, AND APPLICATIONS VII
年: 2017 卷: 10022 文章编号：1002213
会议名称: Conference on Holography, Diffractive Optics, and Applications VII
英文关键词:
heterodyne grating interferometer; high optical subdivision; Doppler effect
英文摘要:
A grating interferometer is presented based on the quasi-Littrow configuration. We mainly use a plane mirror to make the measuring light reflect and diffract between the mirror and grating scale for several times. According to the grating Doppler shift, the more times that measuring light diffracted, the higher optical subdivision can be obtained. As an example, a grating interferometer with an optical subdivision factor of 1/12 is designed. This work provides a technique to increase the resolution of the grating interferometer, which should be interesting for high precision measurement.


文献类型: 会议论文
正文语种: English
收录类别: ISTP
DOI: 10.1117/12.2245943


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