外文题目: Optical surfacing via linear ion source
作者: Wu, Lixiang; Wei, Chaoyang; Shao, Jianda
刊名: Nucl. Instrum. Methods Phys. Res. Sect. B
年: 2017 卷: 397 页： 82--85
英文关键词:
Optical fabrication; Linear ion source; Polishing; Double Fourier series; Mid-spatial frequency errors
英文摘要:
We present a concept of surface decomposition extended from double Fourier series to nonnegative sinusoidal wave surfaces, on the basis of which linear ion sources apply to the ultra-precision fabrication of complex surfaces and diffractive optics. The modified Fourier series, or sinusoidal wave surfaces, build a relationship between the fabrication process of optical surfaces and the surface characterization based on power spectral density (PSD) analysis. Also, we demonstrate that the one-dimensional scanning of linear ion source is applicable to the removal of mid-spatial frequency (MSF) errors caused by small-tool polishing in raster scan mode as well as the fabrication of beam sampling grating of high diffractive uniformity without a post-processing procedure. The simulation results show that optical fabrication with linear ion source is feasible and even of higher output efficiency compared with the conventional approach. (C) 2017 Elsevier B.V. All rights reserved.


文献类型: 期刊论文
正文语种: English
收录类别: SCI
DOI: 10.1016/j.nimb.2017.03.005


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