外文题目: Movement flatness error measurement based on an astigmatic method
作者: Liang, Xin; Bai, Zhen; Wei, Jingsong
刊名: Appl. Optics
年: 2017 卷: 56 期: 15 页： 4347--4352
英文关键词:

TECHNOLOGY; MICROSCOPY
英文摘要:
The movement flatness error is one of the critical parameters of motorized stage performance. In this work, the measurement of the movement flatness error based on an astigmatic method is proposed, in which the focus error signal is detected and used to analyze the movement flatness error. The theoretical derivation and analysis are presented, and the experimental system is established accordingly. The experimental results indicate that our measurement method and established system exhibit an accuracy of less than +/- 100 nm. The movement flatness error of an x-y stepping motorized stage is measured using the established system, and the movement flatness error profile is mapped; it is determined that the maximum movement flatness error is within 1.3 mu m in our experiment. The proposed method is hence proven to be an effective way of measuring the movement flatness error of motorized stages. (C) 2017 Optical Society of America


文献类型: 期刊论文
正文语种: English
收录类别: SCI
DOI: 10.1364/AO.56.004347


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