外文题目: Internal Laser Writing of High-Aspect-Ratio Microfluidic Structures in Silicate Glasses for Lab-on-a-Chip Applications
作者: Cheng, Ya
刊名: Micromachines
年: 2017 卷: 8 期: 2 文章编号：59
英文关键词:
internal processing; femtosecond laser; silicate glass; microfluidics; nanofluidics; lab-on-a-chip
FEMTOSECOND LASER; FABRICATION; SURFACE; CHANNEL; SENSOR
英文摘要:
Femtosecond laser direct writing is unique in allowing for fabrication of 3D micro- and nanofluidic structures, thereby enabling rapid and efficient manipulation of fluidic dynamics in 3D space to realize innovative functionalities. Here, I discuss the challenges in producing fully functional and highly integrated 3D micro- and nanofluidic systems with potential applications ranging from chemical and biological analyses to investigations of nanofluidic behaviors. In particular, I review the achievements we have made in the past decade, which have led to 3D microchannels with controllable cross-sectional profiles and large aspect ratios, 3D nanofluidic channels with widths of several tens of nanometers, and smooth inner walls with roughness on the order of similar to 1 nm. Integration of the microfluidics with other functional microcomponents including microoptics and microelectrodes will also be discussed, followed by conclusions and the future perspective.


文献类型: 期刊论文
正文语种: English
收录类别: SCI
DOI: 10.3390/mi8020059


全文传递服务