外文题目: Image lithography in telluride suboxide thin film through controlling "virtual" bandgap
作者: Wei, Tao; Wei, Jingsong; Zhang, Kui; Zhang, Long
刊名: Photonics Res.
年: 2017 卷: 5 期: 1 页： 22--26
英文关键词:

PHASE-CHANGE; TEOX FILMS; MEMORY
英文摘要:
In this work, TeO0.7 thin films were prepared by the reactive magnetron-controlling sputtering method. Complex gray-scale patterns were successfully fabricated on TeO0.7 thin films through the laser direct writing method. The structural origin of TeO0.7 thin film was investigated for gray-scale pattern formation. It is found that multiple gray-scale levels are dependent on the "virtual" bandgap energy of TeO0.7 thin films. The bandgap energy changes lead to refractive index and reflectivity difference. Thus, gray-scale tones can be formed. By accurately controlling laser energy, various "virtual" bandgaps can be generated in TeO0.7 thin films, and colorful gray-scale levels can be formed. Experimental results indicate that TeO0.7 thin film can be used as micro/nano image writing material. (C) 2016 Chinese Laser Press


文献类型: 期刊论文
正文语种: English
收录类别: SCI
DOI: 10.1364/PRJ.5.000022


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