外文题目: Monolithic integration of a lithium niobate microresonator with a free-standing waveguide using femtosecond laser assisted ion beam writing
作者: Fang, Zhiwei; Xu, Yingxin; Wang, Min; Qiao, Lingling; Lin, Jintian; Fang, Wei; Cheng, Ya
刊名: Sci Rep
年: 2017 卷: 7 文章编号：45610
英文关键词:

HIGH-QUALITY-FACTOR; MICRODISK RESONATORS; MICRORING RESONATORS; FABRICATION; CHIP; CRYSTAL
英文摘要:
We demonstrated integrating a high quality factor lithium niobate microdisk resonator with a free-standing membrane waveguide. Our technique is based on femtosecond laser direct writing which produces the pre-structure, followed by focused ion beam milling which reduces the surface roughness of sidewall of the fabricated structure to nanometer scale. Efficient light coupling between the integrated waveguide and microdisk was achieved, and the quality factor of the microresonator was measured as high as 1.67 x 10(5).


文献类型: 期刊论文
正文语种: English
收录类别: SCI
DOI: 10.1038/srep45610


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