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High-throughput in-volume processing in glass with isotropic spatial resolutions in three dimensions

上海光学精密机械研究所 免费考研网/2018-05-06

外文题目: High-throughput in-volume processing in glass with isotropic spatial resolutions in three dimensions
作者: Tan, Yuanxin; Wang, Zhaohui; Chu, Wei; Liao, Yang; Qiao, Lingling; Cheng, Ya
刊名: Opt. Mater. Express
年: 2016 卷: 6 期: 12 页: 3787--3793
英文关键词:

FEMTOSECOND LASER-PULSES; PHOTOSENSITIVE GLASS
英文摘要:
We report on the fabrication of three dimensional (3D) microstructures in glass with isotropic spatial resolutions. To achieve high throughput fabrication, we expand the focal spot size with a low-numerical-aperture lens, which naturally results in a degraded axial resolution. We solve the problem with simultaneous spatial temporal focusing which leads to an isotropic laser-affected volume with a spatial resolution of similar to 100 mu m. (C) 2016 Optical Society of America


文献类型: 期刊论文
正文语种: English
收录类别: SCIEI
DOI: 10.1364/OME.6.003787


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