外文题目: Two-degree-freedom displacement measurement based on a short period grating in symmetric Littrow configuration
作者: Lu, Yancong; Wei, Chunlong; Jia, Wei; Li, Shubin; Yu, Junjie; Li, Minkang; Xiang, Changcheng; Xiang, Xiansong; Wang, Jin; Ma, Jianyong; Zhou, Changhe
刊名: Opt. Commun.
年: 2016 卷: 380 页： 382--386
英文关键词:
Optical encoder; Littrow configuration; Displacement measurement; Short period grating; High resolution
LASER ENCODER; HETERODYNE; INTERFEROMETER; STRAIGHTNESS
英文摘要:
An optical encoder based on symmetric Littrow configuration is presented. Although the grating is one dimensional, both horizontal and vertical displacement can be measured simultaneously. The angle between grating vector and horizontal movement is taken into account in the measurement results, which not only decreases the requirement of installation but also decreases the cosine error. Thanks to the short grating period of 561.8 nm, a high resolution of 0.137 nm is obtained. The measurement results of optical encoder are compared with that of commercial laser interferometer. The coincident results demonstrate that the encoder should be a useful optical measurement device for detecting two-dimensional movement. (C) 2016 Published by Elsevier B.V.


文献类型: 期刊论文
正文语种: English
收录类别: SCIEI
DOI: 10.1016/j.optcom.2016.06.016


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