外文题目: Pitch evaluation of gratings based on a digital image correlation technique
作者: Lu, Yancong; Jia, Wei; Wei, Chunlong; Yu, Junjie; Li, Shubin; Li, Yanyang; Li, Minkang; Qiu, Jucheng; Wang, Shaoqing; Zhou, Changhe
刊名: Opt. Commun.
年: 2016 卷: 365 页： 68--75
英文关键词:
Pitch evaluation; Grating; Digital image correlation; Uniformity
ACCURATE
英文摘要:
The digital image correlation (DIC) technique used for metrological grating evaluation is presented in this paper. A CCD camera is used to acquire the grating image, and the DIC technique together with the peak position detection method is used to evaluate the grating pitches. The theoretical analysis and simulations are performed to confirm that the performance of our technique is as accurate as the Fourier transform (Fr) technique, and is capable of noise resistance. As an example, the uniformity of the grating fabricated in our laboratory is measured using this method. The experimental results show that this grating has a peak-to-valley uniformity of 48 nm during a long range of 35 mm, and our technique has a higher repeatability than the FT technique in our measurement strategy. This work should be of great significance for the evaluation of metrological grating for optical encoders. (C) 2015 Elsevier B.V. All rights reserved.


文献类型: 期刊论文
正文语种: English
收录类别: SCIEI
DOI: 10.1016/j.optcom.2015.11.069


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