外文题目: Rapidly patterning micro/nano devices by directly assembling ions and nanomaterials
作者: Liu, Na; Wang, Feifei; Liu, Lianqing; Yu, Haibo; Xie, Shaorong; Wang, Jun; Wang, Yuechao; Lee, Gwo-Bin; Li, Wen J.
刊名: Sci Rep
年: 2016 卷: 6 文章编号：32106
英文关键词:

ZINC-OXIDE; LITHOGRAPHY; FABRICATION; TRANSISTORS; FILM; DIELECTROPHORESIS; ELECTRODEPOSITION; MICROSTRUCTURES; MICROPARTICLES; MANIPULATION
英文摘要:
The synthesis and assembly of components are key steps in micro/nano device manufacturing. In this article, we report an optically controlled assembly method that can rapidly pattern micro/nano devices by directly assembling ions and nanomaterials without expensive physical masks and complex etching processes. Utilizing this controllable process, different types of device components (e.g., metallic and semiconductor) can be fabricated and assembled in 10-30 seconds, which is far more rapid and cost-effective than any other micro/nano fabrication method.


文献类型: 期刊论文
正文语种: English
收录类别: SCI
DOI: 10.1038/srep32106


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