外文题目: High-speed laser writing of arbitrary patterns in polar coordinate system
作者: Bai, Zhen; Wei, Jingsong; Liang, Xin; Zhang, Kui; Wei, Tao; Wang, Rui
刊名: Rev. Sci. Instrum.
年: 2016 卷: 87 期: 12 文章编号：125118
英文关键词:

INTERFERENCE LITHOGRAPHY; OPTICAL-ELEMENTS; THIN-FILMS; FABRICATION; NANOSTRUCTURES; GENERATOR; WRITTEN
英文摘要:
In order to realize high-speed laser writing arbitrary patterns, we establish a set of high-speed polar coordinate laser writing system. Although the polar coordinate laser writing system is generally suitable for fabricating circular symmetric patterns, there are challenges when dealing with arbitrary patterns. Here, we propose an effective method to solve this problem by converting the pattern data from Cartesian coordinates to polar coordinates for high-speed laser writing of arbitrary patterns. Several types of arbitrary patterns are written on chalcogenide thin films with a minimum pattern linewidth of 700 +/- 70 nm and a maximum writing speed of approximately 10 m/s,which corresponds to more than 600 mm(2)/min at 1.0 mu m linewidth. This writing speed is ten times faster than that of the conventional x-y type Cartesian coordinate laser writing system. Published by AIP Publishing.


文献类型: 期刊论文
正文语种: English
收录类别: SCIEI
DOI: 10.1063/1.4973397


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