外文题目: High resolution patterning on AgInSbTe thin films by laser thermal lithography
作者: Zhou, Qijun; Zhang, Kui; Wei, Tao; Wei, Jingsong
刊名: Proc.SPIE
来源图书: 2016 International Workshop on Information Data Storage and Tenth International Symposium on Optical Storage
年: 2016 卷: 9818 文章编号：98180Y
会议名称: International Workshop on Information Data Storage / 10th International Symposium on Optical Storage
英文关键词:
micro-structures; laser thermal lithography; phase-change material
PHASE-CHANGE MATERIALS; LOCAL-STRUCTURE; FABRICATION
英文摘要:
Fabrication of high-resolution micro-structures is essential for DOEs and MEMS and has attracted increasing attention. In this study, several high-resolution micro-structures have been fabricated on AgInSbTe phase-change films by laser thermal lithography, and the minimum linewidth of these structures is about 200 nm, which is smaller than the size of the focused spot. The results indicate that laser thermal lithography is a simple and effective technique for the fabrication of micro-structures on AgInSbTe phase-change thin films.


文献类型: 会议论文
正文语种: English
收录类别: ISTP
DOI: 10.1117/12.2248173


全文传递服务