外文题目: Research of Absolute Testing based on N-position Rotations
作者: Liu, Huanhuan; Liu, Shijie; Gao, Wanrong; Fang, Qiaoran
刊名: Proc.SPIE
来源图书: SELECTED PAPERS OF THE PHOTOELECTRONIC TECHNOLOGY COMMITTEE CONFERENCES HELD NOVEMBER 2015
年: 2016 卷: 9796 文章编号：97960P
会议名称: Photoelectronic-Technology-Committee Conference
英文关键词:
full-aperture; full-frequency; absolute testing; N-position rotations; contrast experiments
英文摘要:
The full-aperture and full-frequency absolute surfaces of optical flats are of great significant for industrial applications but hard to achieve. To measure them simultaneously, Kuechel proposed an absolute testing based on N-position rotations by adding a set of measurement data of N-position rotations, in comparison to the traditional four measurements. Algorithm simulation and absolute detection experiments have been conducted before, however, the influence of rotation angle error has not been analyzed, and the full-aperture contrast experiments have not been conducted. In this paper, the influence of rotation angle error was analyzed, and the measurement result is within acceptable range even when the angle error reaches 1 degrees. Moreover, to verify the accuracy of this method, full-aperture contrast experiments were proposed innovatively besides the two linear profiles contrast experiments. The contrast experiments prove the accuracy of the full-aperture absolute measured results, other than the accuracy of the two linear profiles results.


文献类型: 会议论文
正文语种: English
收录类别: ISTP
DOI: 10.1117/12.2228305


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