外文题目: Super resolution nano-information recording in a new hydrazone metal complex material
作者: Zhang, Kui; Wei, Jingsong; Chen, Zhimin; Wei, Tao; Geng, Yongyou; Wang, Yang; Wu, Yiqun
刊名: Proc.SPIE
来源图书: 2016 International Workshop on Information Data Storage and Tenth International Symposium on Optical Storage
年: 2016 卷: 9818 文章编号：981810
会议名称: International Workshop on Information Data Storage / 10th International Symposium on Optical Storage
英文关键词:
Laser thermal lithography; super resolution; hydrazone metal complexe; reactive ion etching
LASER THERMAL LITHOGRAPHY; ELECTRON-BEAM LITHOGRAPHY; MICRO-OPTICAL ELEMENTS; FABRICATION
英文摘要:
Laser thermal lithography has been proposed for a few years, which has the advantages of breaking through the optical diffraction limit, operation in far-field and in air, and low production cost. In this paper, a new hydrazone metal complexe is used as the laser thermal lithography material due to its feature of the one-step fabrication of micro/nano structure without mask and wet-etching process. Based on the laser thermal lithography method, super resolution nano-information pits are directly written on the surface of hydrazone metal complexe thin films. Pits with a minimum feature size of about 79 nm are successfully obtained, which is only about 1/7 of the writing spot size. Moreover, the reactive ion etching method can be applied to transfer the pits onto a silica substrate. These results suggest the potential applications of the new material in high density optical data storage and semiconductor industries.


文献类型: 会议论文
正文语种: English
收录类别: ISTP
DOI: 10.1117/12.2248354


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