外文题目: INSTRUMENTAL NOISE EFFECT IN AN OPTICAL HETERODYNE PROFILER
作者: LIN, Y; SCHILL, J; WANG, RW
刊名: Appl. Optics
年: 1994 卷: 33 期: 22 页： 5005--5010
英文关键词:
STATISTICAL PROPERTIES; SURFACES
HETERODYNE; PROFILER; SURFACE ROUGHNESS; PHASE MEASUREMENT; COMMON-PATH INTERFEROMETER
英文摘要:
An optical heterodyne profiler has been developed for measuring surface roughness at Brookhaven National Laboratory. The height measurement sensitivity and lateral resolution are 1.1 angstrom and 4 mum, respectively, when a 40x objective is used. A Zeeman-split He-Ne laser is the light source. A noncontact measurement system is designed as an optical common-path interferometer. Optical and electronic common-mode rejection techniques are employed to minimize the effects of environmental conditions. The effect of the system noise is analyzed in detail. The effect of varying the number of samples at each sampling point is shown. The comparisons of the system noises with different objectives, 5x, 10x, 20x, and 40x, are presented.


文献类型: 期刊论文
正文语种: English
收录类别: SCI
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