熔石英元件抛光加工表面残余应力的计算方法

王洪祥¹, 侯晶^1,2, 严志龙 ¹, 朱本温 ¹, 陈贤华²

(1.哈尔滨工业大学 机电工程学院,150001 哈尔滨;2.中国工程物理研究院 激光聚变研究中心,621900 四川 绵阳)



摘要:

为解决传统检测方法无法直接定量检测非晶体熔石英玻璃表面残余应力的问题,基于脆性固体断裂力学理论,推导残余应力的理论计算公式,提出光学元件抛光加工表面残余应力计算新方法．采用尖锐压头进行纳米印压实验,提取压痕过程中对残余应力敏感的参数,并对实验数据进行线性拟合,确定拟合线的斜率,通过测量残余应力引起其他物理参数的变化计算残余应力．对比分析结果表明,计算得到残余应力值与应力双折射仪检测得到的数据基本吻合,验证了提出残余应力计算方法的正确性．

关键词:  熔石英元件  残余应力  纳米压痕  亚表面裂纹  抛光加工表面

DOI：10.11918/j.issn.0367-6234.2015.05.004

分类号:TG580.692

基金项目:国家自然科学基金委员会与中国工程物理研究院联合基金(U1230110)；国家自然科学基金(51475106)；中国工程物理研究院超精密加工技术重点实验室开放基金(KF14007).



Residual stress calculation method for fused silica polishing surface

WANG Hongxiang¹, HOU Jing^1,2, YAN Zhilong¹, ZHU Benwen¹, CHEN Xianhua²

(1.School of Mechanical Electrical Engineering, Harbin Institute of Technology, 150001 Harbin, China; 2. Research Center of Laser Fusion, China Academy of Engineering Physics, 621900 Mianyang, Sichuan, China)

Abstract:

Fused silica glass is non-crystalline material, the traditional detection methods have complicated steps and low measurement accuracy, residual stresses are often unable to direct quantitative detection. A new residual stress calculation method for fused silica polishing surface was proposed based on brittle solid fracture mechanics, in which a series of nano-indentation experiments were conducted by a sharp indenter, and the sensitive parameters were extracted during indentation process, the experimental data were linear fit and the line slopes were determined, so residual stress was often calculated indirectly by measuring the other physical parameters change caused by residual stress. Comparative analysis showed that the calculation results had in good consistency with the test results obtained by stress birefringence analyzer, so the correctness of the residual stress calculation method was verified.

Key words:  fused silica optics  residual stress  nano-indentation  subsurface cracks  polished surface