Oriented Growth of PZT thick film embedded with PZT nanoparticles

DUAN Zhong-xia¹, YUAN Jie², ZHAO Quan-liang¹,LU Ran¹, CAO Mao-sheng¹



Author NameAffiliation

DUAN Zhong-xia School of Materials Science and Engineering, Beijing Institute of Technology, Beijing 100081, China,caomaosheng@bit.edu.cn 

YUAN Jie School of Information Engineering, Centre University for Nationality, Beijing 100081, China 

ZHAO Quan-liang School of Materials Science and Engineering, Beijing Institute of Technology, Beijing 100081, China,caomaosheng@bit.edu.cn 

LU Ran School of Materials Science and Engineering, Beijing Institute of Technology, Beijing 100081, China,caomaosheng@bit.edu.cn 

CAO Mao-sheng School of Materials Science and Engineering, Beijing Institute of Technology, Beijing 100081, China,caomaosheng@bit.edu.cn 



Abstract:

This paper reports that dense and crack-free (100) oriented lead zirconate titanate (Pb(Zrª­0.52Tiª­0.48)O₃, PZT) thick film embedded with PZT nanoparticles has been successfully fabricated on Pt/Cr/SiO₂/Si substrate by using PT transition layer and PVP additive. The thick film possesses single-phase perovskite structure and perfectly (100) oriented. The (100) orientation degree of the PZT films strongly depended on annealing time and for the 4 ¦Ìm-thick PZT film which was annealed at 700 ¡æ for 5 min is the largest. The (100) orientation degree of the PZT thick film gradually strengthen along with the thickness of film decreasing. The 3 ¦Ìm-thick PZT thick film which was annealed at 700 ¡æ for 5 min has the strongest (100) orientation degree, which is 82.3£¥.

Key words:  PZT  sol-gel  thick film  oriented growth

DOI£º10.11916/j.issn.1005-9113.2009.02.017

Clc Number:TP273

Fund: