伍晓明博士，副研究员，博士生导师，分别于1994年和1997年在北京理工大学自动控制系获工学学士和硕士学位，于2002年在清华大学精密仪器与机械学系获工学博士学位。随后加入清华大学微电子学研究所工作。2009年至2010年，在美国加州大学伯克利分校传感器与执行器中心（BSAC）作访问。
伍晓明长期从事微纳加工工艺与微纳器件领域的研究与开发工作，已发表科研论文90余篇，获得国家发明专利18项。伍晓明是美国电气与电子工程师协会（IEEE）会员。
研究方向：集成智能传感器、微机电（MEMS）器件、能量收集器、碳基纳米器件、二维材料电子器件等。
电话：**
Email: imewuxm@tsinghua.edu.cn

发表论文：
[1]Heather Chiamori, Xiaoming Wu, Xishan Guo, Bao Quoc Ta, Liwei Lin, Annealing Nano-to-Micro Contacts for Improved Contact Resistance, 5th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS), Xiamen, 20~23 Jan., 2010
[2] J. Lin, B. Yan, X. Wu, T. Ren, L. Liu，Stretchable Interconnections for flexible electronic systems, IEEE Proceedings of the Engineering in Medicine and Biology (EMBC), pp4124~4127,(2009)
[3] Lin, JH; Wu, XM; Chen, H, et al.,Analyses of vibration-based piezoelectric power generator in discontinuous operation mode ,Sensors and Actuators A-Physical,152(1) : 48-52,2009
[4]Chen, H; Ren, TL; Wu, XM, et al.，Giant electrocaloric effect in lead-free thin film of strontium bismuth tantalite, Applied Physics Letters, 94(18) 182902, 2009
[5]Lin J H, Wu X M, Huang P S, Feng L, Ren T L, Liu L T，Development of silicon-based microelectrode array，Science in China Series E: Technological Sciences，52(8)2391-2395,2009
[6]. Jianhui Lin, Xiaoming Wu, Hao Chen, Xi Liu, Tianling Ren, Litian Liu, Characterization of Capacitor Charging by Vibration-based Piezoelectric Power Generator，ICSICT 2008, Beijing
[7]. Xiaoming WU, Jianhui Lin, Tianling Ren, and Litian LIU ， Frequency Adjustable Vibration Energy Harvester ， The Eighth International Workshop on Micro and Nanotechnology for Power Generation and Energy Conversion Applications （ PowerMEMS+μEMS 2008 ） , Japan
[8]. Wang, C.; Wang, Z.; Ren, T.-L.; Zhu, Y.; Yang, Y.; Wu, X.; Wang, H.; Fang, H.; Liu, L. ， A Micromachined Piezoelectric Ultrasonic Transducer Operating in d33 Mode Using Square Interdigital Electrodes ，IEEE Sensors Journal ， 7 （ 7 ）， pp:967-976,2007
[9]. WU X., Yu J.,Ren T., Liu L., Micro-Raman measurement of thickness in micro-electro-mechanical silicon structures, Journal of Micromechanics and Microengineering , 17 1114–1120, 2007
[10]. WU X., Yu J., Ren T., Liu L., Micro-Raman Spectroscopy Measurement of Stress in Silicon, Microelectronics Journal , 38: pp87–90, 2007
[11]. Lin, J. H., Wu, X. M., Ren, T. L., Liu, L. T. Modeling and simulation of piezoelectric MEMS energy harvesting device, Integrated Ferroelectrics 95(1):128-141 2007
[12]. WU X., Ren T., Liu L., Yu J., Spatially resolved thickness analysis of microscale structures using micro-Raman spectroscopy ， Applied Physics Letters , 89, 211903, 2006
[13]. WU X., Ren T, Liu L, Micromachined Piezoelectric Acoustic Transducers, International Symposium on Integrated Ferroelectrics (ISIF) Proceedings , 2006
[14]. WU X., Ren T, et al., An Equivalent Circuit Model of Piezoelectric Micromachined Microphones, The 3rd Asia-Pacific Conference of Transducers and Micro-Nano Technology (APCOT ) , June 2006
[15]. WU X., Y. Yang, J. Cai, T. Ren, L. Liu, Measurements of Ferroelectric MEMS Microphones, Integrated Ferroelectrics , 2005,69: pp417~429
[16]. WU X., Ren T., Liu L., Active Damping of a Piezoelectric MEMS Acoustic Sensor, Integrated Ferroelectrics , 2005
[17]. WU X., N. Zhang, T. Ren, L. Liu, Nondestructive Evaluation of MEMS Devices by Laser Confocal Measurements, The International Conference on MEMS, NANO, and Smart Systems , 2005
[18]. J Lin, WU X, P Huang, T Ren, L Liu, Impedance Spectroscopy Analysis of Cell-Electrode Interface, IEEE Proceedings of the Engineering in Medicine and Biology (EMBC) , pp1162~1165,2005
[19]. Lin J, WU X, Huang P, Ren T, Liu L, A 16-Site Neural Recording Probe Array and Its Circuit Model Simulation, Proceeding of International Conference on Neural Interface and Control , pp68~71,2005
[20]. Zhang N., Yang Y., WU X., Ren T., Liu L., Influence of stress on the performance of PZT thin films for microphone application ， Integrated Ferroelectrics , 69,2005 pp315~322,
[21]. Fang H., Liu L., WU X., Zhang N., Ren T., Design and optimization of micro scanner driven by folded piezoelectric unimorph actuators using PZT films, Integrated Ferroelectrics, 76,2005: pp23~30
[22]. Cai J , Wang HN , Wang SD , Wu XM , Ren TL , Jia SL , A study on packaging of PZT MEMS microphone, 55TH Electronic Components &Technology Conference , Vol 1-2, 1077-1080, 2005
[23]. Y. Zhu, T. Ren, Y. Yang, WU X., N. Zhang, L. Liu, Z. Tan, H. Wang, J. Cai, S. Wang, Z. Li Novel Ferroelectrics-Based Micro-Acoustic Devices and Their Ultrasonic Applications, IEEE International Electron Devices Meeting (IEDM) , 2004
[24]. WU X. ， T. Ren, L. Liu, Sound Source Localization Based on Directivity of MEMS Microphones ， International Conference on Solid-State and Integrated-Circuit Technology (ICSICT) , 2004