关键词: 透射电子显微学/
原位/
纳米材料/
微电子器件
English Abstract
In situ transmission electron microscopy studies on nanomaterials and HfO2-based storage nanodevices
Li Chao1,2,Yao Yuan1,
Yang Yang1,
Shen Xi1,
Gao Bin3,
Huo Zong-Liang4,
Kang Jin-Feng3,
Liu Ming4,
Yu Ri-Cheng1,2
1.Laboratory of Advanced Materials and Electron Microscopy, Beijing National Laboratory of Condensed Matter Physics, Institute of Physics, Chinese Academy of Sciences, Beijing 100190, China;
2.School of Physical Sciences, University of Chinese Academy of Sciences, Beijing 100049, China;
3.School of Electronics Engineering and Computer Science, Peking University, Beijing 100871, China;
4.Key Laboratory of Microelectronics Device and Integrated Technology, Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, China
Fund Project:Project supported by the National Key RD Program of China (Grant No. 2016YFA0300701), the National Basic Research Program of China (Grant Nos. 2013CB932904, 2012CB932302, 2010CB934202), and the National Natural Science Foundation of China (Grant Nos. 11374343, 61421005, 11574376, 11174336, 61334007, 10974235, 11274365).Received Date:18 April 2018
Accepted Date:10 May 2018
Published Online:20 June 2019
Abstract:Advanced transmission electron microscopy combined with in situ techniques provides powerful ability to characterize the dynamic behaviors of phase transitions, composition changes and potential variations in the nanomaterials and devices under external electric field. In this paper, we review some important progress, in this field, of the explanation of structural transition path caused by the Joule heating in C60 nanowhikers, the clarification of electron storage position in charge trapping memory and the direct evidences of the oxygen vacancy channel and the conductive filament formation in resistive random access memory. These studies could improve an understanding of the basic mechanism of nanomaterial and device performance, and also demonstrate the diversity of the functions of transmission electron microscopy in microelectronic field.
Keywords: transmission electron microscopy/
in situ/
nanomaterials/
microelectronic device
