关键词: 异质结/
霍尔效应器件/
量子霍尔效应/
标准与校准
English Abstract
A 1 k standardresistor device based on quantum Hall array
Zhong Qing1,Wang Xue-Shen1,
Li Jin-Jin1,
Lu Yun-Feng1,
Li Zheng-Kun1,
Wang Wen-Xin2,
Sun Qing-Ling2
1.National Institute of Metrology, Beijing 100029, China;
2.Institute of Physics, Chinese Academy of Science, Beijing 100190, China
Fund Project:Project supported by the National Key Technology Research and Development Program of the Ministry of Science and Technology of China (Grant No. 2011BAK15B08).Received Date:02 August 2016
Accepted Date:23 August 2016
Published Online:05 November 2016
Abstract:Quantum metrological standards based on the fundamental physical constants are the trend of modern metrology because of their attributes such as high accuracy, high stability, and good reproducibility. The quantum Hall effect (QHE), which refers to the electronic charge e and the Planck constant h, is used to define the quantum resistance standard. The quantum Hall resistance (RH) of h/2e2 at the filling factori=2 is used as the standard. It is obvious that the RH is non-integral. However the resistors that need to be calibrated each have a decimal value, such as 1 k, 10 k, 100 k, etc. The calibration chain from the non-integral RH to the real resistor is long. The quantum Hall array resistance standards (QHARSs) are invented to solve this problem. The QHARS which are based on the decimal resistance values can shorten the calibration chain, improve the resistance transfer accuracy, and finally realize the quantization of the whole resistance calibration chain. The QHARS can also replace the traditional physical transfer standard resistor and realize the quantization of the transfer standard resistor. The decimal QHARS devices can be realized by connecting single QHE devices in series or parallel with the multiple link technology.In this paper we report the design, fabrication and characterization of a 1 k QHARS device based on the GaAs/AlxGa1-xAs heterostructures. In our design, the 1 k array device consists of only 29 Hall bars. The nominal value of the device is 999.9999658 with a relative deviation of -3.4210-8 from 1 k. The ratio between the maximum and minimum current flowing through the Hall bars is as small as 14.5.The 1 k QHARS devices are measured in the national resistance standard system at a temperature of 1.5 K. The measurement is taken at the central magnetic field of the 2nd quantum Hall plateau. We compare our 1 k QHARS resistor with a 1 k transfer standard resistor using the direct current comparator. The 1 k transfer standard resistor has already been calibrated in advance with our single QHR standard by cryogenic current comparator. Therefore the resistance of our 1 k QHARS resistor can be obtained. The relative deviation between the measured resistance value and the designed value is -1.9610-7with a standard uncertainty of 2.0710-7. The results show that we have realized the 1 k quantum Hall resistance standard device which can be used for the resistance calibration.
Keywords: heterojunctions/
Hall effect devices/
quantum Hall effect/
standards and calibration
