首页>师资队伍>副教授
文莉
文莉，女，博士，副教授，硕士生导师。中国科学技术大学精密机械与精密仪器系邮编：230027办公室：科大西区力学三楼302室电话：**传真：**E-mail：lilywen@ustc.edu.cn研究方向：微纳机电系统微纳米加工技术微等离子体及其应用科研项目：国家自然科学基金：基于DBD微放电器针尖阵列的高效可逆纳米加工方法的研究，2014.1-2017.12，总经费：80万，主持国家自然科学基金：基于并行探针驱动的无掩模扫描等离子体加工技术的研究，2007.01-2009.12、总经费：24万，主持中央高校基本科研业务费青年创新基金：基于并行探针的微等离子体纳米加工新方法的研究，2010.01-2011.12，总经费：10万，主持国家自然科学基金：铁电微等离子体推进器的机理及实验研究，2013.**，总经费：80万，参与发表论文：在国外期刊、国内核心期刊及重要的国际会议上发表论文50篇，其中被SCI检索7篇，被EI检索30余篇。近五年发表的主要论文（*为通讯作者）：1.LiWen,ZhenYuan,LeiliCheng,LiewenHe,HaiWang,andJiaruChu,CharacterizationofInvertedPyramidalHollowCathodeMicroplasmaDevicesOperatinginReactiveGasesforMasklessScanningplasmaEtching,SensorsandActuatorsA:Physical,179,2012,pp.125-131（SCI，EI）2.LiWen,ZhenYuan,LeiliCheng,Hongjiangzeng,andJiaruChu,“StudyofResidualStress-InducedDeformationofMultilayerCantileverforMasklessMicroplasmaEtching”,MicrosystemTechnologies,18(1),2012,pp.113-118（SCI，EI）3.　Li.Wen,Hai.Wang,Liwen,He,QingpingZhang,Weiwei.Xiang,Jiaru.Chu,DesignandFabricationofMicrocantileverProbeIntegratedwithMicroplasmaReactorforMasklessScanningPlasmaEtching,SensorsandActuatorsA:Physical,169(2),2011,pp.362-366（SCI，EI）4.　LeiliCheng,LiWen*,ZhenYuan,DunNiu,LiwenHeandJiaruChu,DischargePropertiesandAFMImagingExperimentsofCantileverProbeIntegratedWithMicroplasmaReactor,Micro&NanoLetters,7(6),2012.06,pp.569-571.（SCI，EI）5.　WeiweiXiang,LiWen*,HaiWang,QiupingZhangandJiaruChu,Fabricationofcantileverarrayswithnano-aperturehollowtipsforparallelmicroplasmaetching,MicroelectronicEngineering,87(12),2010,pp.2475-2481（SCI，EI）6.　YongLiu,GangZhao,LiWen,XinzhongXuandJiaruChu,Massloadingeffectonqualityfactoroffloppysiliconmicrocantileverinfreeairspace,Micro&NanoLetters,6(2),2011,pp.62–65（SCI，EI）7.　YongLiu,GangZhao,BaoqingLi,LiWen,andJiaruChu,Patternburiedoxideinsilicon-on-insulator-basedfabricationoffloppysingle-crystal-siliconcantilevers,Micro&NanoLetters,6(4),2011,pp.240–243（SCI，EI）8.　WeiweiXiang,LiWen*,QiupingZhang,JiaruChu,FabricationofNano-apertureHollowTipArrayforMicroplasmaEtching,KeyEngineeringMaterials，Vol.483,2011,pp.89-94（EI）9.　HanXie,LiWen*,HaiWang,JiaruChu,FabricationandOperationofMicroplasmaReactorArrayforMasklessNanoscaleMaterialEtching,IEEEInternationalConferenceonNanotechnology(IEEENano2013),Beijing,China,2013,pp.180-1183(EI)10.LiWen,ZhenYuan,LeiliCheng,LiwenHeandJiaruChu,CharacteristicsofInvertedPyramidalMicrodischargeDevicesOperatinginCHF3andCHF3/ArforMasklessMicroplasmaEtching,16thInternationalSolid-StateSensors,ActuatorsandMicrosystemsConference,Transducers’11,Beijing,China,2011,pp.454-457（EI）11.LiWen,Hongjiangzeng,ZhengYuan,andJiaruChu，SimulationandExperimentofIntrinsicBendingofMultilayerMicrocantileverforMasklessScanningPlasmaEtching，The6thIEEEInternationalConferenceonNano/MicroEngineeredandMolecularSystems,IEEE-NEMS2011,Taiwan,2011,pp.634-637（EI）12.LiWen,QiupingZhang,WeiweiXiang,etc,FabricationofaNovelMicrocantileverProbewithInvertedPyramidalMicrodischargeforMasklessScanning,SymposiumonDesign,Test,Integration&PackagingofMEMS/MOEMS（DTIP2010）,Spain,2010,pp.387-390（EI）13.LiWen,WeiweiXiang,QiupingZhangetc,ANovelMicrocantileverProbewithInvertedPyramidalMicroplasmaReactorforMasklessScanningPlasmaEtching,5thAsia-PacificConferenceonTransducersandMicro-NanoTechnology,WesternAustralia,201014.LiWen,QiupingZhang,WeiweiXiang,etc,DesignandFabricationoftheMicroplasmaReactorforMasklessScanningPlasmaEtching,The4thIEEEInternationalConferenceonNano/MicroEngineeredandMolecularSystems,IEEE-NEMS2009,Shenzhen,China,2009,pp.577-580.（EI）15.WeiweiXiang，LiWen*,QiupingZhang,HaiWangandJiaruChu,ElectricalandOpticalTestingSystemforMicroplasmainScanningPlasmaEtching,The4thIEEEInternationalConferenceonNano/MicroEngineeredandMolecularSystems,IEEE-NEMS2009,Shenzhen,China,2009,pp.567-571(EI)16.QiupingZhang,LiWen*,WeiweiXiang,andJiaruChu,FabricationandPerformanceofMicroplasmaReactorforMasklessScanningPlasmaEtching，The5thIEEEInternationalConferenceonNano/MicroEngineeredandMolecularSystems,IEEENEMS-2010,2010,pp.211-214(EI)17.ZhenYuan,LiWen*,LeiliCheng,LiwenHeandJiaruChu,CalculationandSimulationoftheBendingDeformationofMultilayerThinFilmsMicrocantileverIntegratedwiththeMicroplasmaReactor,2011InternationalConferenceonElectronicsandOptoelectronics(ICEOE2011),2011,pp.V4.288-291(EI)18.ZhenYuan,LiWen*,LeiliCheng,JianqiangMaandJiaruChu,FabricationandOptimizationthePerformanceofMicroplasmaReactorwithCompositeDielectrics,The7thIEEEInternationalConferenceonNano/MicroEngineeredandMolecularSystems,IEEE-NEMS2012,Kyoto,Japan,2012(EI)19.LeiliCheng,LiWen*,ZhenYuan,DunNiu,LiwenHeandJiaruChu,AMethodofTip-sampleDistanceControlBasedonElectrostaticForceinMasklessMicroplasmaScanningEtching2011InternationalConferenceonElectronicsandOptoelectronics(ICEOE2011),2011,pp.V4.292-295(EI)20.LeiliCheng,LiWen*,ZhenYuan,DunNiu,LiwenHeandJiaruChu,AFMImagingExperimentUsingCantileverProbeIntegratedWithMicroplasmaReactor,The7thIEEEInternationalConferenceonNano/MicroEngineeredandMolecularSystems,IEEE-NEMS2012,Kyoto,Japan,201221.HaiWang,XuanZhou,HanLi,LiWen,SimultaneousdiagnosticsofelectrondensityandtemperatureinmicoplasmareactorforScanningPlasmaEtching,IEEEInternationalConferenceonNanotechnology(IEEENano2013),Beijing,China,2013,pp.648-651(EI)22.　HaiWang,YunhuaTong,andLiWen,Diagnosticofmicroplasmareactorforscanning　plasmaetching,16thInternationalSolid-StateSensors,ActuatorsandMicrosystemsConference,Transducers’11,2011,pp.1606-1609（EI）23.　X.Xu,P.Gu,R.Jiang,G.Zhao,L.WenandJ.Chu,CharacterizationofMechanicalpropertiesofPZTthinfilmsbynanoindentation,TheFirstAnnualIEEEInternationalConferenceonNano/MicroEngineeredandMolecularSystems(IEEENEMS2006),Zhuhai,China,2006,pp.56-61(EI)24.　文莉，向伟玮，张秋萍，王海，何利文，褚家如，用于扫描等离子体无掩膜刻蚀的微探针的设计和加工，纳米技术与精密工程，9(3),2011,pp.275-278（EI）25.向伟玮，文莉*，刘勇,张秋萍，何利文，禇家如，硅应力非均匀氧化影响因素及其在纳米孔制作中的应用，纳米技术与精密工程,9(4),2011,pp.316-321(EI)26.张秋萍，文莉*，向伟玮，曾洪江，何利文，褚家如,用于微放电器的聚酰亚胺绝缘层的工艺和性能。真空科学与技术学报,31(1),2011,pp.114-11827.　张秋萍，文莉*，向伟玮，褚家如，利用溅射反转剥离工艺实现微放电器Ni电极图形化，中国科学技术大学学报，40(4),2010,pp.400-40528.WeiweiXiang,LiWen*,YongLiu,QiupingZhang,JiaruChu,Influencefactorsofthestress-dependentnonuniformmonocrystallinesiliconoxidationundergeometricconstraint,JournalofHarbinInstituteofTechnology,43(Suppl.1),2011,pp.348-351.(EI）29.王海，童云华，文莉,微小等离子体反应器的导出机理研究，核聚变和等离子体物理，31(1)，201130.　文莉，向伟玮，张秋萍，王海，曾鸿江，褚家如，用于扫描等离子体无掩膜刻蚀的微悬臂梁的设计和制作，中国微纳米技术学会第11届年会，哈尔滨，2009年