姓　名 胡小唐
职　称 教授
所在系别 精密仪器工程系
行政职务 精密测试技术及仪器国家重点实验室主任
所属课题组 天津大学微纳制造与测试研究所，所长
联系电话
电子邮件 xthu@tju.edu.cn
通讯地址 天津大学精密测试技术及仪器国家重点实验室
邮政编码 300072
主讲课程 《微纳检测技术》
导师类型 仪器科学与技术——博导
个人经历或学术经历

1973. 9-1977. 2 上海机械学院仪器仪表系毕业；
1978. 9-1981. 9 太原理工大学机械系精密仪器专业毕业，获硕士学位；
1983. 9-1986. 9 天津大学精密仪器系测试计量技术及仪器专业毕业，获博士学位，为我国测试计量技术及仪器专业培养的第一位博士，师从我国精密仪器专业的创始人之一蔡其恕教授；
1988.3-1990.11 美国国家标准技术研究院和北卡州立大学夏洛特分校从事博士后及访问****研究；
1990.12至今 天津大学精密仪器与光电子工程学院副教授（1990-1993），教授（1993至今），博士生导师（1994至今），并先后任副院长（1995-1997），院长（1997）；
1997.11-2011.9 天津大学副校长。
1990年回国后组建了我国第一个专门从事纳米测试计量技术研究的小组，同时在国内首先开设了纳米测试技术课程，目前主要事微纳测试与加工技术、精密测控技术等方面的研究工作，主持完成或在研国家自然基金项目3项、国家973计划课题1项，国家863计划项目3项，教育部重大项目1项，其他省部级项目10余项，获教育部科技进步一等奖1项、国家科技进步二等奖1项、国家教委科技进步奖三等奖1项、天津市科技进步三等奖1项、霍英东青年教师奖和教育部宝钢教育基金会优秀教师奖等。在多次国际会议上任学术委员会主席和组委会主席。在国内外知名期刊上发表论文260余篇，SCI和EI 收录150余篇，授权发明专利20余项。

研究方向
微纳测试与加工技术（扫描探针测试与加工技术、MEMS测试技术、微纳光学测试技术）
精密测控技术

科研项目、成果和专利
国家973计划课题：光学自由曲面制造完整性的测量系统与评价方法，2011-2015，负责人
国家自然科学基金优秀国家重点实验室研究项目：极端条件精密测量技术和溯源方法的基础研究，2008-2011，负责人
国家科技计划项目－国际科技合作与交流专项：微纳米结构加工与表征技术的研究，2009-2011，负责人
国家863计划项目：微结构的多尺度光学测试技术与系统，2006-2008，负责人
教育部重大科技项目：光通讯系统中飞秒激光加工微光电器件的研究，2004-2006，负责人
国家863计划项目：基于计算机视觉和显微干涉技术的微结构测试方法与设备，2004-2005，负责人
国家863计划项目：基于计算机视觉和显微干涉技术的MEMS动态测试系统，2002-2004，负责人


主持和参与组织的有关国际会议
2st International Conference on nanoManufacturing (nanoMan2010)，国际学术委员会主席
1st International Conference on nanoManufacturing (nanoMan2008)，国际学术委员会主席
2004年国际SPM, Sensor and Nanostructure暨全国第八届扫描隧道显微学学术会议，任组委会主席
1998年香港“精密工程中的纳米测量技术研讨会”，任程序工作委员会主任委员
1997年47届国际生产工程学会（CIRP）年会，任组织委员会副主任
1991年国际生产工程学会（CIRP）精密工程分会年会，任组委会委员


论文、专著
Zhou Chong, Pang Wei, Li Qiang, Yu Hongyu, Hu Xiaotang, Zhang Hao, Extracting the Electromechanical Coupling Constant of Piezoelectric Thin Film by the High-Tone Bulk Acoustic Resonator Technique, IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control, Vol.59, No.5, 958-962, 2012.
Chen Y.H., Fang F.Z., Xu Z.W., Zhang X.D., Hu X.T., Surface modification for brittle monocrystalline materials by MeV ions, Nuclear Instruments & Methods in Physics Research Section B-Beam Interactions with Materials and Atoms, Vol.272, 433-436, 2012
Gong Hu, Fang F.Z., Hu X.T., Accurate spiral tool path generation of ultraprecision three-axis turning for non-zero rake angle using symbolic computation, International Journal of Advanced Manufacturing Technology, Vol.58, No.9-12, 841-847, 2012
Pang Wei, Zhao Hongyuan, Kim Eun Sok, Zhang, Hao, Yu Hongyu, Hu Xiaotang, Piezoelectric microelectromechanical resonant sensors for chemical and biological detection, Lab on a Chip, Vol.12, No.1, 29-44, 2012
Guo Tong, Wang Siming, Dorantes-Gonzalez Dante J., Chen, Jinping, Fu Xing, Hu Xiaotang, Development of a Hybrid Atomic Force Microscopic Measurement System Combined with White Light Scanning Interferometry, Sensors, Vol.12, No.1, 175-188, 2012
Gong Hu, Fang F. Z., Hu, X. T., Accurate spiral tool path generation of ultraprecision three-axis turning for non-zero rake angle using symbolic computation, International Journal of Advanced Manufacturing Technology, Vol.58, No.9-12, 841-847, 2012
Wu Sen, Feng Jianmin, Fu Xing, Hu Xiaodong, Dorantes Dante, Li Yali, Hu Xiaotang, Manipulation of individual double-walled carbon nanotubes packed in a casing shell, Nanotechnology, Vol.22, No.28, 285308(6pp), 2011
Guo Tong, Ma Long, Zhao Jian, Dorantes-Gonzalez, Dante J., Fu Xing, Hu Xiaotang, A nanomeasuring machine based white light tilt scanning interferometer for large scale optical array structure measurement, Optics and Lasers in Engineering, Vol.49, No.9-10, 1124-1130, 2011
Zhao Jian, Guo Tong, Ma Long, Fu Xing, Hu Xiaotang, Metrological atomic force microscope with self-sensing measuring head, Sensors and Actuators A-Physical, Vol.167, No.2, 267-272, 2011
Liu Yu, Fu Yongqi, Zhou Xiuli, Xu Zongwei, Fang Fengzhou, Hu Xiaotang, Experimental Study of Indirect Phase Tuning-Based Plasmonic Structures for Finely Focusing, Plasmonics, Vol.6, No.2, 227-233, 2011
Guo Tong, Ma Long, Chen Jinping, Fu Xing, Hu Xiaotang, Microelectromechanical systems surface characterization based on white light phase shifting interferometry, Optical Engineering, Vol.50, No.5, 053606, 2011
Fang FZ, Xu ZW, Hu XT, Wang CT, Luo XG, Fu YQ, Nano-photomask fabrication using focused ion beam direct writing, CIRP Annals-Manufacturing Technology, Vol.59, No.1, 543-546, 2010
Gong H, Fang FZ, Hu XT, Cao LX, Liu JA, Optimization of tool positions locally based on the BCELTP for 5-axis machining of free-form surfaces, Computer-Aided Design, Vol.42, No.6, 558-570, 2010
Hu CG, Sun LD, Flores-Camacho JM, Hohage M, Liu CY, Hu XT, Zeppenfeld P, A rotating-compensator based reflectance difference spectrometer for fast spectroscopic measurements, Review of Scientific Instruments, Vol.81, No.4, 043108, 2010
Xu ZW, Fang FZ, Zhang SJ, Zhang XD, Hu XT, Fu YQ, Li L, Fabrication of micro DOE using micro tools shaped with focused ion beam, Optics Express, Vol.18, No.8, 8025-8032, 2010
Sen Wu,Xing Fu, Hu Xiaodong, Hu Xiaotang, Manipulation and behavior modeling of one-dimensional nanomaterials on a structured surface, Applied Surface Science, Vol.256, No.14, 4738-4744, 2010
Gong H, Fang FZ, Hu XT, Kinematic view of toot life in rotary ultrasonic side milling of hard and brittle materials, International Journal of Machine Tools & Manufacture, Vol.50, No.3, 303-307, 2010
Yanning Li, Wen Li, Tong Guo, Zhidan Yan, Xing Fu, and Xiaotang Hu, Study on structure optimization of a piezoelectric cantilever with a proof mass for vibration-powered energy harvesting system, Journal of Vacuum Science & Technology B, Vol.27, No.3, 1288-1290, 2009
Chunyang Liu, Xing Fu, Yong Wu, Yi Li, Fengming Sun, and Xiaotang Hu, Realization of nanosecond pulse laser micromachining system, Journal of Vacuum Science & Technology B, Vol.27, No.3, 1319-1322, 2009
Xiaodong Hu, Shujuan Deng, Wenan Wang, and Xiaotang Hu, Long-working-distance Linnik microscopic interferometry for measuring the surface profile of microstructures, Journal of Vacuum Science & Technology B, Vol.27, No.3, 1403-1407, 2009
Jinping Chen, Tong Guo, Xiaodong Hu, and Xiaotang Hu, Analysis on vibration rejection ratio of scanning probe microscope, Journal of Vacuum Science & Technology B, Vol.27, No.3, 1413-1417, 2009
Q. Y. Wang, F. Z. Fang, and X. T. Hu, Development of three-axis desktop milling machine, Vol.27, No.3, Journal of Vacuum Science & Technology B, 1278-1284, 2009
T. F. Dai, F. Z. Fang, and X. T. Hu, Tool wear study in diamond turning of steels, Journal of Vacuum Science & Technology B, Vol.27, No.3, 1335-1339, 2009
Z. G. Zhang, F. Z. Fang, X. T. Hu, and C. K. Sun, Three-dimensional molecular dynamics modeling of nanocutting, Journal of Vacuum Science & Technology B, Vol.27, No.3, 1340-1344, 2009
Z. G. Zhang, F. Z. Fang, X. T. Hu, and C. K. Sun, Molecular dynamics study on various nanometric cutting boundary conditions, Journal of Vacuum Science & Technology B, Vol.27, No.3, 1355-1360, 2009
S. J. Zhang, F. Z. Fang, Z. W. Xu, and X. T. Hu, Controlled morphology of microtools shaped using focused ion beam milling technique, Journal of Vacuum Science & Technology B, Vol.27, No.3, 1304-1309, 2009
Zhang XD, Fang FZ, Wang HB, Wei GS, Hu XT, Ultra-precision machining of sinusoidal surfaces using the cylindrical coordinate method, Journal of Micromechanics and Microengineering, Vol.19, No.5, 2009
Fang FZ, Xu ZW, Hu XT, Fabrication and configuration of carbon nanotube probes in atomic force microscopy, CIRP Annals-Manufacturing Technology, Vol.58, No.1, 455-458, 2009
Guo Tong, Chang Hong, Chen Jinping, Fu Xing, Hu Xiaotang, Micro-motion analyzer used for dynamic MEMS characterization, Optics and Lasers in Engineering , Vol.47, No.3-4, 512-517, 2009
Hu CG, Sun LD, Li YN, Hohage M, Flores-Camacho JM, Hu XT, Zeppenfeld P. Retardation correction for photoelastic modulator-based multichannel reflectance difference spectroscopy, Journal of The Optical Society Of America A, Vol.25, No. 6, 1240-1245, 2008
Fang FZ, Zhang XD, Hu XT, Cylindrical coordinate machining of optical freeform surfaces, Optics Express, Vol.16, No.10, 7323-7329, 2008
Hu Xiaodong, Hu Chunguang, Chen Zhi, Guo Tong, Hu, Xiaotang, Measuring in-plane and out-of-plane coupled motions of microstructures by stroboscopic microscopic interferometry, Optics and Laser Technology, 39(6), 1176-1182, 2007
Fang FZ, Wu H, Zhou W, Hu XT, A study on mechanism of nano-cutting single crystal silicon, Journal of Materials Processing Technology, 184 (1-3), 407-410, 2007
Hu Xiaodong, Liu Gang, Hu Chunguang, Guo Tong, Hu Xiaotang, Characterization of static and dynamic microstructures by microscopic interferometry based on a Fourier transform method, Measurement Science & Technology, 17 (6), 1312-1318, 2006
Fang FZ, Xiong Z, Hu XT, An experimental study of micromachining step-mirrors for laser-diode beam shaping, Journal of Micromechanics and Microengineering, 16(2), 214-218, 2006
Hu Xiaodong, Hu Xiaotang, Analysis of the process of anodization with AFM, Ultramicroscopy, 105(1-4), 57-61, 2005
Kuang Dengfeng, Liu Qinggang, Guo Werilian, Zhang Shilin, Hu Xiaotang. Method to detect the property of complex oxide structure formed by AFM anodic oxidation completely, Ultramicroscopy, 105(1-4), 111-114, 2005
Liu Qinggang, Li Min, Li Dechun, Li Zhigang，Hu, Xiaotang. Micro angle measurement for a scanning stage, Key Engineering Materials, 295-296, 119-124, 2005
Zhang Zonghua, Zhang David, Peng Xiang , Hu Xiaotang. Color texture extraction from fringe image based on full-field projection, Optical Engineering, 42(7), 1935-1939, 2003
Hu Xiaodong, Guo Tong, Fu Xing, Hu Xiaotang. Nanoscale oxide structures induced by dynamic electric field on Si with AFM, Applied Surface Science, 217(1-4), 34-38, 2003
Hu Xiaodong, Yu jing, Chen Jinping, Hu Xiaotang. Analysis of electric field-induced fabrication on Au and Ti with an STM in air, Applied Surface Science, 187(3-4), 173-178, 2002.
编写教材
《微纳检测技术》：普通高等教育“十一五”国家级规划教材，天津大学出版社，2009.

奖励、荣誉和学术兼职
奖励与荣誉：
国家教委“跨世纪优秀人才计划”首批入选者（1993）
国家“百千****才工程”入选者（1996）
2003年度教育部提名国家科学技术奖（一等奖）：井下采油工具动态检测技术及系统，第一完成人
2005年度国家科学技术进步奖（二等奖）：井下工具检测技术及试验平台的研究与开发，第一完成人
2009年当代仪器仪表与测量控制中青年优秀科技创新人才（中国仪器仪表学会）
霍英东青年教师奖（1988）
教育部宝钢教育基金会优秀教师奖（1995）
天津市授衔专家：测试计量技术专家
天津市“育才工程”入选专家
天津市优秀教师
学术兼职：
教育部高等学校仪器仪表学科专业教学指导委员会主任委员
国务院学位委员会工程硕士专业学位教育指导委员会副主任委员
中国仪器仪表学会副理事长
中国计量测试学会副理事长
中国微米纳米技术学会常务理事