1. 上海交通大学 微纳电子学系， 上海 200240； 2. 上海卫星装备研究所， 上海 200240
作者简介:张亚非(1955-)，男，山东省淄博市人，教授，博士生导师，主要从事纳米电子材料与器件研究.电话(Tel.): 021-34205665；E-mail: yfzhang@sjtu.edu.cn.基金资助:国家自然科学基金资助项目（61574091）Fabrication Technologies Research on Solidly Mounted Bulk Acoustic Resonator
ZHANG Yafei,LIU Yijian,LI Zhongli,ZHANG Yaozhong,SU Yanjie,LIU Gang1. Department of Micro/Nano Electronics, Shanghai Jiao Tong University, Shanghai 200240, China;2. Shanghai Institute of Spacecraft Equipment, Shanghai 200240, China
摘要/Abstract
摘要： 随着通信行业和微电子技术的快速发展，以及第5代移动通信技术(5G)的发展趋势越来越明晰，对高频段的微型化射频滤波器的性能提出了更高的要求.生产基于体声波谐振器的滤波器成为最具有应用前景的技术.基于大量研究，总结了固体装配型的体声波谐振器(Solidly Mounted Bulk Acoustic Resonator，SMR)的制备优化技术，在压电薄膜粗糙度优化的技术基础上，提出了AlN-ZnO协同共振型SMR器件，解决了氧化锌薄膜压电性能不佳、c轴择优取向较弱的问题，制备了相应的AlN-ZnO协同共振型SMR，取得了较好的器件性能参数.串联谐振点品质因数Qs为 616.2, 并联谐振点品质因数Qp为 429.4，机电耦合系数k2eff为 2.27%.为SMR的制备和量产提供了一个创新的方案.
关键词: 固体装配型薄膜体声波谐振器(SMR), 氧化锌薄膜, AlN-ZnO协同共振层, 掺杂技术
Abstract: With the rapid development of the telecommunications industry and microelectronics technologies, and with the increasingly clear development trend of fifth-generation (5G) communications, higher requirements have been placed on the performance of high-frequency miniaturized RF filters. The manufacture of BAW resonator filter is the most promising technology. Based on a large number of studies, this paper summarizes the preparation and optimization technologies of solidly mounted bulk acoustic resonator (SMR). Based on the technology of thin film roughness optimization, an AlN-ZnO co-resonating SMR was proposed to optimize the piezoelectric property and 〈0002〉 texture of ZnO film. The corresponding SMR is prepared and has achieved good device performance parameters. The series resonating Qs value is 616.2, the parallel resonating Qp value is 429.4, and the effect electromechanical coupling factor k2eff is 2.27%. This paper provides an innovative solution for the mass production of SMR.
Key words: solidly mounted bulk acoustic resonator (SMR), ZnO doped piezoelectric film, AlN-ZnO co-resonating layer, buffer layer
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