职称：副教授
研究方向：超精密长度测量、微纳米计量测试
办公室：电院 2-343
办公电话：
电子邮箱：xchen.ie@sjtu.edu.cn
个人主页：
招生情况：硕士生导师
个人介绍

---

1998年本科毕业于上海交通大学仪器工程系，1999年赴日本工作和学习，2007年在日本东京大学获得工学博士学位，2010年起任上海交通大学仪器科学与工程系副教授。参加工作以来一直从事精密测量学方向的研究和产品开发工作。在东京大学攻读硕博期间，参与了来自日本文部科学省、学术振兴会、新能源产业技术开发机构的多个课题的研究。在日期间供职于测量业界知名公司，主持及参与多项精密测量领域的先端课题。
主要成就

---

2007年3月： 2006年度日本精密工学会优秀论文奖（JSPE Best Paper Award 2006）
2007年11月：Award certification of Merit for the paper, ISMQC 2007, IMEKO
代表论文

---

X.Chen, K.Takamasu，M.Nikaidou: Evaluation of Thrust Force and Positioning Accuracy of a New Linear Motor, Measurement Technology and Intelligent Instruments VI, Vols.295-296, pp 613-618, 2005.
X.Chen, K.Takamasu, K.Kotani, T.Ishida：Study on Calibration of Planar Linear Motor (1st Report) - Profile Measurement of Plane Mirrors -，J JSPE，72(12), 1542-1546, 2006.
X.Chen, K.Kotani，K.Takamasu：Study on Spatial Frequency Domain 2-point Method (1st Report)- Calibration of Systematic Error in Case of Combining Two Sets of 2-point Method -，J JSPE，73(6),563-568,2007.
X.Chen, K.Takamasu: Study on Scanning Squareness Measurement Method and Uncertainty Estimation, Measurement Technology and Intelligent Instruments VIII, Vols.381-382, pp 569-572, 2008.
S.Liu, K.Watanabe, X.Chen, S.Takahashi, K.Takamasu: Profile measurement of a wide-area resist surface using a multi-ball cantilever system, Precision Engineering, 33(1)，50-55,2009.
X.Chen, K.Kotani, S.Takahashi, K.Takamasu: Development of Multiple Small Linear Planar Motor System, 4th International Conference of the European Society for Precision Engineering and Nanotechnology, 252-255, 2004.
X.Chen, K.Kotani, K.Takamasu: Study on algorithm of reconstructing topography based on topography difference, 7th International Conference of the European Society for Precision Engineering and Nanotechnology, 365-368, 2007.
K.Takamasu, K.Yoshida, T.Senoo, X.Chen: Calibration of 6 DOF Parallel Mechanism Driven by Planar Motors, ISMQC, IMEKO, 178-183, 2007.
X.Chen, K.Kotani, K.Takamasu: Study on Spatial Frequency Domain Two-point Method - Analysis of Systematic Error -，Proceedings of JSPE Semestrial Meeting, Vol.2006A, 195-196, 2006.
X.Chen, K.Kotani, K.Takamasu: Straightness Measurement Using Simultaneous Equation Method (1st Report) - Two Sets of 2-point Method -，Proceedings of JSPE Semestrial Meeting, Vol.2007S, 347-348, 2007.