职称：教授
研究方向：MEMS传感器、微流控芯片
办公室：微纳院2-218
办公电话：
电子邮箱：dchen@sjtu.edu.cn
个人主页：
招生情况：硕士生导师、博士生导师
个人介绍

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陈迪，男
1978年考入中国科技大学，
1980年国家公派赴德国留学，
1986年和1990年分别获德国汉堡大学化学系硕士和博士学位，
1990－1992年在德国MicroParts公司从事MEMS微加工技术的博士后研究工作，
自1993年起在上海交通大学先后任副教授、教授和博士生导师，微纳科学技术研究院副院长。
目前任上海交通大学电子信息与电气工程学院仪器科学与工程系教授。
主讲的课程为《物联网技术与智慧城市》和《Micro/nano Fabrication and MEMS》
陈迪教授是中国仪器仪表学会微纳器件与系统技术分会常务理事，全国微机电技术标准化技术委员会委员，中国医药生物技术协会生物芯片专业委员会委员，《微纳电子技术》、《纳米技术与精密工程》、《微细加工技术》《功能材料与器件学报》编辑委员会委员。

研究方向

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先后主持和承担了国防科工委、国家自然科学基金委、国家科技部、教育部、上海市科委、教委、德国西门子公司和美国3M公司的四十余项科研项目。开发出了新型X光掩模板制备工艺和新的非硅三维微加工技术－DEM技术，用微电子机械系统（MEMS）技术开发出各种微流控芯片、植入式生物微电极阵列、MEMS集成探卡、微波定向天线和MEMS惯性开关等，应用于生物医学、信息产业和国防等领域。
目前其研究领域为非硅MEMS微加工技术、植入式生物微系统、微流控芯片和RF-MEMS等。
主要成就

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发表论文一百七十余篇，发明专利获授权27项，参与撰写专著7本，主持出版《微加工导论》译著1本。“非硅MEMS技术及其应用”获2007年上海市技术发明一等奖，2008年国家技术发明二等奖；“微流控生化芯片的结构、制造、改性及其应用”获2008年教育部自然科学二等奖，“微机械系统非线性动力学特性与振动控制”获2014年度教育部自然科学一等奖，“基于纳米技术的乙肝病毒及肝病全程的快速侦检技术及应用”获2016年上海市技术发明一等奖。
代表论文

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S.J. Lin, X. Zhi, D. Chen*, F.F. Xia, Y.H. Shen, J.Q. Niu, S.Y. Huang, J. Song, J.M. Miao, D.X. Cui, X.T. Ding; A flyover style microfluidic chip for highly purified magnetic cell separation; Biosensors and Bioelectronics, 2019, 129: 175–181 (A档)
X. Zhi, L. Chen, G. Shan, S.J. Lin, D. Chen, J.Q. Niu, Z.Y. Jin, B. Ji, L. Kang, X.T. Ding, W.W. Xin, J.L. Wang*, D.X. Cui*, H. Yang*; Temperature gap drives directed diffusion in microfluidic chip system; Microfluidics & Nanofluidics, 2019, 23(3): 40 (B档)
Y. Shen, D. Chen*, Q. Wei, S. Lin, L. Shi, L. Wu, and G. Guo; 183-GHz Frequency Selective Surface Using Aligned Eight-layer Microstructure; IEEE Electron Device Letters, 2018, 39(10): 1612-1615 (B档)
A. Kenaan, J. Cheng, DZ. Qi, D. Chen, DX. Cui, J. Song; Physicochemical Analysis of DPPC and Photopolymerizable Liposomal Binary Mixture for Spatiotemporal Drug Release; Analytical Chemistry; 2018, 90(15): 9487-9494 (A档)
S.J. Lin, J.K. Xu, X. Zhi, D. Chen*, J.M. Miao, P.B. Shull, D.X. Cui; Design and Fabrication of a Stretchable Circuit Board for Wireless Posture Measurement. IEEE Electron Device Letters, 2017, 38(3): 399-402 （B档）
Y. Xie, D. Chen*, S.J. Lin; “Microfluidic Electrochemical Detection Techniques of Cancer Biomarkers”; Nano Biomed. Eng., 2017, 9(1): 57-71
韦黔，陈迪*，林树靖，仇三铭，张同兴；基于迭代法卡尔曼滤波的传感器数据融合仿真；计算机技术与发展，2017, 27: 137-140
韦黔，陈迪*，刘米丰，袁涛，崔大祥；毫米波段多层介质型频率选择表面设计与仿真；上海航天，2017, 04(34): 164-169
K. Tao, J. Wu, A.G.P. Kottapalli, D. Chen, Z.Q. Yang, G.F. Ding, S.W. Lye, J.M. Miao; Micro-patterning of resin-bonded NdFeB magnet for a fully integrated electromagnetic actuator; SOLID-STATE ELECTRONICS; 2017,138: 66-72
J. Wu, K. Tao, Y.Y. Guo, Z. Li, X.T. Wang, Z.Z. Luo, SL. Feng, C.L. Du, D. Chen, J.M. Miao, L.K. Norford; A 3D Chemically Modified Graphene Hydrogel for Fast, Highly Sensitive, and Selective Gas Sensor, Advanced Science, 2017, 4(3): **
N.Q. Sheng, G.W. Tan, W.Q. You, H.Q. Chen, J.F. Gong, D. Chen, H.Z. Zhang, Z.G. Wang; "MiR-145 inhibits human colorectal cancer cell migration and invasion via PAK4-dependent pathway"; Cancer Medicine, 2017, 6(6): 1331-1340
Y. Xie, D. Chen*, S.J. Lin, Z.G. Wang and D.X. Cui; A robust and easy integration plasma separation chip by gravitational sedimentation of blood cells filling-in high-aspect-ratio weir structure. RSC Advances, 2016, 6: 30722 - 30727
Y. Xie, X. Zhi, H.C. Su, K. Wang, Z. Yan, N.Y. He, J.P. Zhang, D. Chen*, D.X. Cui*; A novel electrochemical microfluidic chip combined with multiple biomarkers for early diagnosis of gastric cancer, Nanoscale Research Letters, 2015, 10: 477
J.D. Chen, D. Chen*, Y. Xie, X. Chen, K. Wang, D.X. Cui, H.X. Du, and Z.G. Wang; “Bubble generation and mechanism in polydimethylsiloxane based polymerase chain reaction chip”; Applied Physics Letters, 2015, 106: 053507
S.J. Lin, D. Chen*, Y. Xie, B.B. Lin, Q. Wei, F. Pan, D.X. Cui; Single Cell Manipulation Technology, Nano Biomed. & Eng., 2015, 7(3): 75 - 91
林彬彬，陈迪*，林树靖，谢耀，袁涛，崔大祥，UV-LIGA技术制备频率选择表面研究，微纳电子技术，2015(9): 597 - 602
W.P. Wu, H. Yi, D. Chen, R.S. Lu, T. Yuan, J.D. Chen, Z.H. Ni; “The design and fabrication of a low-field NMR probe based on a multilayer planar microcoil”; Microsystem Technologies, 2014, 20(3): 419 - 425
X. Zhi, M. Deng, H. Yang, G. Gao, K. Wang, H.L. Fu, Y.X. Zhang, D. Chen, D.X. Cui; “A novel HBV genotypes detecting system combined with microfluidic chip, loop-mediated isothermal amplification and GMR sensors”; Biosensors and Bioelectronics 2014, 54: 372 - 377
J.D. Chen, D. Chen*, T. Yuan, X. Chen, Y. Xie, H.L. Fu, D.X. Cui, X.D. Fan and M.K. Khaing Oo; “Blood plasma separation microfluidic chip with gradual filtration”; Microelectronic Engineering, 2014, 128: 36 - 41
J.D. Chen, D. Chen*, T. Yuan, X. Chen, J. Zhu, A. Morschhauser, J. Nestler, T. Otto, T. Gessner; “Microfluidic chips for cells capture using 3D hydrodynamic structures array”; Microsystem Technologies, 2014, 20: 485 - 491
T. Yuan, D. Chen*, J.D. Chen, X. Chen, X.W. Wang and B.L. Lu; A novel MEMS elastic-based dry electrode for electroencephalography measurement; Microsyst Technol. [J]. 2014, 20(6): 1125 - 1129
W. Hu, H.T. Liu, C. Hu, S.G. Wang, D. Chen, J.Q. Mo, Q.H. Liang; Vision-based force measurement using pseudo-Zernike moment invariants; Measurement, 2013, 46(10): 4293-4305
J. Zhu, Q. Shen, Y. Cao, H. Wang, X. Chen, D. Chen; Characterization of out-of-plane cone metal microneedles and the function of transdermal delivery; Microsyst Technol, 2013, 19: 617 - 621
J. Zhu, Y. Cao. H. Wang, Y.G. Li, X. Chen, D. Chen; Fabricating Process of Hollow out-of-plane Ni Microneedle Array and Property of the Integrated Microfluidic Device; J. Micro/Nanolith. MEMS MOEMS, 2013, 12(3): 033019
C.Y. Hu, D.P. Yang, Z.H. Wang, P. Huang, X.S. Wang, D. Chen, D.X. Cui, M. Yang, N.Q. Jia; Bio-mimetically synthesized Ag@BSA microspheres as a novel electrochemical biosensing interface for sensitive detection of tumor cells; Biosensors & Bioelectronics 2013, 41: 656 - 662
J.D. Chen, D. Chen*, T. Yuan, X. Chen; A multi-frequency sandwich type electromagnetic vibration energy harvester; Applied Physics Letters, 2012, 100: 213509
X.S. Wang, D.P. Yang, P. Huang, M. Li, C. Li, D. Chen and D.X. Cui; Hierarchically assembled Au microspheres and sea urchin-like architectures: formation mechanism and SERS study; Nanoscale; 2012, 4, 7766-7772
W.M. Zhang, G. Meng, Z.K. Peng, D. Chen, Coupled nonlinear effects of random surface roughness and rarefaction on slip flow in ultra-thin film gas bearing lubrication; Journal of Tribology, 2012, 134(2): 024502
J. Zhu, Y. Cao, Y. Li, X. Chen, D. Chen; Integrating process and novel sacrificial layer fabricating technique based on diluted SU-8 resist; Microelectronic Engineering 2012, 93: 56 - 60
H.X. Du, Z.G. Wang, Z.L. Yang, D. Chen, J.D. Chen and R.J. Hu; Separation of circulating cancer cells by unique microfluidic chip in colorectal cancer; Oncology Research, 2012, 19 (10-11): 487 - 500
J.D. Chen, D. Chen*, T. Yuan, X. Chen; Microfluidic PCR Chips; Nano Biomedicine and Engineering, 2011, 3(4): 203 - 210
吴澄，陈迪*，胡锐军，陈景东，陈翔，王晓韡，吕宝粮；柔性衬底MEMS技术制备脑电图干电极阵列研究；上海交通大学学报，2011, 45(7): 1035-1040
胡锐军，陈迪*，陈翔，陈景东，吴澄，杜航向，杨治力，王志刚，夏骏；一种MEMS结肠癌细胞捕获芯片研究；功能材料与器件学报，2011, 17(2): 227-232
X.M. Jing, D. Chen*, X. Chen, J. Miao, J.Q. Liu and J. Zhu; Design and fabrication of a micromachined bi-layer cantilever probe card; Journal of Micro-Nanolithography, MEMS, and MOEMS (JM3), 2010, 9(4): 043005
X.M. Jing, D. Chen*, C. Huang, X. Chen, J.M. Miao, J.Q. Liu and J. Zhu; Elastic MEMS probe card based on PDMS; Journal of Micromechanics and Microengineering, 2010, 20(5): 055038 (7pp)
C. Huang, D. Chen*, S. Leidich, T. Gessner; Compact Meta-material Transmission Line Balun Based on Meander Lines Structure and MEMS Technology; Microelectronic Engineering, 2010, 87: 584 - 587
H.W. Sun, G.G. Liu, S.M. Lin, J.Q. Liu, and D. Chen; Focused ion beam–based nanoimprint stamp for replicating micro/nanostructures under low temperature; J. Micro/Nanolith. MEMS MOEMS 2010, 9: 033005
周然，陈迪*，徐旻，黄闯，陈翔，刘景全，朱军；基于柔性衬底的三维生物刺激微电极阵列研究；传感器与微系统，2010, 29(5):134-136.
徐旻，陈迪*，周然，陈翔，朱军，刘景全；新型聚酰亚胺图形化工艺制备视网膜电极；微纳电子技术，2010, 47(2): 105-109.
蒋宏民，朱军，曹莹，陈翔，陈迪；倾斜旋转紫外曝光在微针制备上的应用；上海交通大学学报，2010, 44(8): 1100-1102.
芦琦，陈翔，肖丽君，陈迪；一种以SU-8为流道材料的集成微流体流量传感器的设计及制作；上海交通大学学报，2010,44(11):1519-1523.
肖丽君，芦琦，陈翔，李以贵，陈迪；基于狄恩流的微混合器的研究；微纳电子技术，2010, 47(1): 38-44.