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个人简介Personal Profile 陈磊，特聘研究员（教授），博士生导师
2021.01—至今 西南交通大学 机械工程学院 机械设计及理论 特聘研究员（教授）；
2018.01—2020.12 西南交通大学 机械工程学院 机械设计及理论 副研究员（副教授）；
2016.11—2017.11 宾夕法尼亚州立大学 访问****
2013.12—2018.01 西南交通大学 机械工程学院 机械设计及理论 讲师；
2008.09—2013.12 西南交通大学 机械工程学院 机械设计及理论专业 博士学位；




教育经历Education Background
工作经历Work Experience
暂无内容 暂无内容
研究方向Research Focus
二维材料微纳结构制造
航空发动机叶片高温材料—镍基单晶合金各向异性疲劳磨损机理的跨尺度研究
超精密表面加工机理研究



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个人信息Personal Information 所在单位： 机械工程学院
学历： 博士研究生毕业
办公地点： 西南交通大学摩擦学研究所410-1
联系方式：
学位： 工学博士学位
电子邮箱： chenlei@swjtu.edu.cn

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论文成果
一、学术论文代表论文

[68] Jian Gong; Jian Gao; Chen Xiao*; Lei Chen*; Linmao Qian; Mechanochemical reactions of GaN-Al2O3 interface at nanoasperity contact: the roles of crystallographic polarity and ambient humidity, Friction, 2021.


[67] Lei Chen, Linmao Qian*; Role of interfacial water in adhesion, friction, and wear—A critical review, Friction 2021, 9(1):1-28.


[66] Yunhai Liu, Yilong Jiang, Junhui Sun, Lei Wang, Yangqin Liu, Lei Chen*, Bin Zhang*, Linmao Qian; Durable superlubricity of hydrogenated diamond-like carbon film against different friction pairs depending on their interfacial interaction, Applied Surface Science, 2021, 560: 150023.


[65] Yuanyuan Jiang, Chen Xiao*, Lei Chen*, Chenhui Zhang, Ningning Zhou, Linmao Qian, Jianbin Luo, Jinjin Li; Temporary or permanent liquid superlubricity failure depending on shear-induced evolution of surface topography, Tribology International, 2021, 161: 107076.


[64] Yuanyuan Jiang; Lei Chen*; Chen Xiao; Ningning Zhou; Tao Qing; Linmao Qian; Friction and Wear Behaviors of Steel Ball Against Polyimide-PTFE Composite Under Rolling-Sliding Motion, Tribology Letters, 2021, 69(3): 1-12.


[63] Yunhai Liu; Chen Lei*; Bangzheng Jiang; Yangqin Liu; Bin Zhang; Chen Xiao; Junyan Zhang; Linmao Qian*; Origin of low friction in hydrogenated diamond-like carbon films due to graphene nanoscroll formation depending on sliding mode: Unidirection and reciprocation, Carbon, 2020, 173: 696-704.


[62] Chen Xiao; Jie Li; Jian Guo; Peng Zhang; Bingjun Yu; Lei Chen *; Linmao Qian; Role of mechanically-driven distorted microstructure in mechanochemical removal of silicon, Applied Surface Science, 2020, 520: 146337.


[61]Jie Guo; Jian Gong; Pengfei Shi; Chen Xiao; Liang Jiang; Lei Chen *; Linmao Qian; Study on the polishing mechanism of pH-dependent tribochemical removal in CMP of CaF2 crystal, Tribology International, 2020, 150: 106370.


[60] Chen Xiao; Chao Chen; Yangyang Yao; Hongshen Liu; Lei Chen*; Linmao Qian*; Seong Han Kim; Nanoasperity Adhesion of the Silicon Surface in Humid Air: The Roles of Surface Chemistry and Oxidized Layer Structures, Langmuir, 2020, 36: 5483-5491.


[59] Pengfei Shi; Junhui Sun; Yunhai Liu; Bin Zhang; Junyan Zhang; Lei Chen*; Linmao Qian*; Running-in behavior of a H? DLC/Al2O3 pair at the nanoscale, Friction, 2020.


[58]Pengfei Shi; Huikang Liang; Wenmeng Yan; Junhui Sun; Lei Chen*; Linmao Qian; Development of a symmetrical micro- beam minimizing horizontal drift for indentation and scratch, Review of Scientific Instruments, 2020, 91(043702).


[57]Pengfei Shi; Junhui Sun; Wenmeng Yan; Ningning Zhou; Junyan Zhang; Jiyang Zhang; Lei Chen*; Linmao Qian*; Roles of phase transition and surface property evolution in nanotribological behaviors of H-DLC: Effects of thermal and UV irradiation treatments, Applied Surface Science, 2020, 514(145960).


[56] Andreas Rosenkranz*; Yangqin Liu; Lin Yang; Lei Chen; 2D nano?materials beyond graphene: from synthesis to tribological studies, Applied Nanoscience, 2020,10: 23353-3388.


[55] Jian Guo, Jian Gao, Chen Xiao*, Lei Chen*, Linmao Qian; Mechanochemical reactions of GaN-Al2O3 interface at the nanoasperity contact: Roles of crystallographic polarity and ambient humidity, Friction,2020, doi.org/10.1007/s40544-021- 0501-9


[54] Lei Chen; Ngo Dien; Jiawei Luo; Yunfei Gong; Chen Xiao; Xin He; Bingjun Yu; Linmao Qian; Seong H. Kim; Dependence of water adsorption on the surface structure of silicon wafers aged under different environmental conditions, Physical Chemistry Chemical Physics, 2019, 21(47): 26041-26048.


[53] Lei Chen; Zhe Chen; Xiaoyu Tang; Wenmeng Yan; Linmao Qian*; Seong H. Kim*; Friction at single-layer graphene step edges due to chemical and topographic interactions, Carbon, 2019, 154: 67-73.


[52]Chen Xiao; Jingjing Li; Lei Chen*; Linmao Qian; Water-based superlubricity in vacuum, Friction, 2019, 7(2) : 192-198.


[51]Lei Chen(#), Zhe Chen(#),Xiaoyu Tang, Wenmeng Yan, Linmao Qian*, Seong H. Kim*,Friction at single-layer graphene step edges due to chemical and topographic interactions.Carbon 2019, 154, 67-73(影响因子: 7.42).


[50] Chen Xiao, Pengfei Shi, Wenmeng Yan,Lei Chen(*), Linmao Qian, Seong H. Kim, Thickness and structure of adsorbed water layer and effects on adhesion and friction at nanoasperity contact. Colloids Interfaces 2019, 3(3), 55.(Invited review paper)


[49]Zhaohui Liu,Jian Gong,Chen Xiao,Pengfei Shi,Seong Han Kim,Lei Chen(*),Linmao Qian(*),Temperature-dependent mechanochemical wear of silicon in water: the role of Si-OH surfacial groups.Langmuir, 2019,35, 7735-7743(影响因子: 3.833).


[48] Yunhai Liu,Lei Chen(*),Bin Zhang(*), Zhongyue Cao, Pengfei Shi, Yong Peng, Ningning Zhou, Junyan Zhang, Linmao Qian. Key role of transfer layer inload dependence of friction on hydrogenated diamond-Like carbon films in humid air and vacuum. Materials 2019, 12, 1550 (影响因子：2.467)


[47] Menmeng Yan, Jian Guo, Binjun Yu,Lei Chen(*), Linmao Qian, Self-lubrication of Si/SiO2 interface achieved through running-in at lowsliding speed. Wear, 2019, 426–427, 828–834 (影响因子：2.531).


[46]Jian Gong, Chen Xiao, Jiaxin Yu, Jinfang Peng, Bingjun Yu,Lei Chen(*),Linmao Qian, Stress-enhanced dissolution and delamination wear of crystal CaF2 in water condition. Wear, 2019, 418-419, 86-93 (影响因子：2.531)


[45]Yunhai Liu, Bin Zhang,Lei Chen(*),Zhongyue Gao, Pengfei Shi, Jinwei Liu, Junyan Zhang, Linmao Qian, Perspectives of the friction mechanism of hydrogenated diamond-Like carbon film in air by varying sliding velocity. Coatings 2018, 8, 331(SCI收录).


[44]Lei Chen, Jialin Wen, Peng Zhang, Bingjun Yu, Tianbao MA, Xinchun Lu, Seong H. Kim, Linmao Qian, Nanomanufacturing of silicon surface with a single atomic layer precision via mechanochemical reactions. Nature Communications, 2018, 9, 1542 (影响因子: 12.353).


[43]Lei Chen, Xin He, Hongshen Liu, Linmao Qian, Seong H. Kim,Water adsorption on hydrophilic and hydrophobic surface of silicon. The Journal of Physical Chemistry C, 2018, 122, 11385-11391(影响因子：4.536)


[42]Lei Chen, Chen Xiao, Bingjun Yu, Seong H. Kim, Linmao Qian, What governs friction of silicon oxide in humid environment-contact area between solids, water meniscus around the contact, or water layer structure? Langmuir, 2017, 33 (38), 9673-9679(SCI收录,影响因子: 3.833).


[41]Lei Chen, Yaqiong Qi, Bingjun Yu, Linmao Qian, Slidingspeed-dependent tribochemical wear of oxide-free silicon. Nanoscale Research Letters, 2017, 12, 7(SCI收录,影响因子: 2.833).


[40]Lei Chen, Xiao Chen, Xin He, Bingjun Yu, Seong H. Kim, Linmao Qian, Friction and tribochemical wear behaviors of native oxide layer on silicon at nanoscale. Tribology Letters, 2017, 65, 139 (SCI收录).


[39]Lei Chen, Luocheng Hu, Chen Xiao, Yaqiong Qi, Bingjun Yu, Linmao Qian,Effect of crystallographic orientation on mechanical removal of CaF2, Wear, 2017, 376, 409-416(SCI收录,影响因子: 2.531).


[38]Yaqiong Qi,Lei Chen(*), Shu-lan Jiang, Jiaxin Yu, Bingjun Yu, Linmao Qian, Investigation of silicon wear against non-porous and micro-porous SiO₂spheres in water and in humid air, RSC advance, 2016, 6, 89627-89634 (SCI收录,影响因子: 3.289).


[37]Jing Xia, Jing Zheng, Diaodiao Huang, Z. Ryan Tian,Lei Chen, Zhongrong Zhou, Peter S. Unger, LinmaoQian*, A new model to explain tooth wear with implications for microwear formation and diet reconstruction, Proceedings of the National Academy of Sciences of the United States of America, 2015, 112(4), 10669-10672 (SCI收录，影响因子：9.674)


[36]Lei Chen, Hongtu He, Xiaodong Wang, Seong H. Kim*, Linmao Qian*, Tribology of Si/SiO2 in humid air: transition from severe chemical wear to wearless behavior atnanoscale, Langmuir, 2015, 31(1), 149-156, (SCI收录,影响因子: 3.833).


[35]Lei Chen, Yajun Yang, Hongtu He, Seong H. Kim, Linmao Qian*, Effect of coadsorption of water and alcohol vapor on the nanowear of silicon, Wear, 2015, 332-333, 879-884 (SCI收录,影响因子: 2.531).


[34]Lei Chen, Mingchu Yang, Chenfei Song, Bingjun Yu, Linmao Qian*, Is 2 nm DLC coating enough to resist the nanowear of silicon, Wear, 2013, 302(1-2): 909-917 (SCI收录,影响因子: 2.531).


[33]Lei Chen, Seong H. Kim, Xiaodong Wang, Linmao Qian(*), Running-in process of Si-SiOx /SiO2 pair at nanoscale-Sharp drops in friction and wear rate during initial cycles, Friction 1(1), 2013, 81-91 (SCI收录)


[32]Lei Chen, Mingchu Yang, Jiaxin Yu, Linmao Qian*, Zhongrong ZHOU, Nanofretting behaviours of ultrathin DLC coating on Si(100) substrate, Wear, 2011, 271, 1980-1986 (SCI收录,影响因子: 2.531)


其它论文


[31] Chen Xiao, Xiaojun Xin, Xin He, Hongbo Wang,Lei Chen, Seong H. Kim,Linmao, Surface Structure Dependence of Mechanochemical Etching:Scanning Probe-Based Nanolithography Study on Si(100), Si(110), and Si(111), ACS Appl. Mater. Interfaces 2019, accepted. (SCI收录，影响因子：8.097)


[30]Chen Xiao, Cheng Chen, Hongbo Wang,Lei Chen, Liang Jiang, Bingjun Yu, Linmao Qian,Effect of counter-surface chemistry on defect-free material removal ofmonocrystalline silicon.Wear 2019,426–427,1233–1239(SCI收录，影响因子：2.531).


[29] Peng Zhang, Chen Xiao, Cheng Chen,Lei Chen, Linmao Qian, Effect of abrasive particle degradation on tribochemical wear of mnocrystalline silicon. Wear 426–427 (2019) 1240–1245 (SCI收录,影响因子: 2.531).


[28]Xiaoxiao Liu, Bingjun Yu, Yijia Zou, Chao Zhou, Xiaoying Li, Jiang Wu, Huiyun Liu,Lei Chen, and Linmao Qian, Revealing silicon crystal defects by conductive atomic force microscope. Appl. Phys. Lett. 2018, 112, 101601 (SCI收录).


[27] Guangran Guo, Jiaming Li, Changbang Deng, Qipei He, Qingyuan Yu, Chao Zhou, Xiaoxiao Liu, Shulan Jiang,Lei Chen, Bingjun Yu*, and Linmao Qian, Nondestructive nanofabrication on monocrystalline silicon via site-controlled formation and removal of oxide mask. Applied Physics Express, 2018, 11, 116501 (SCI收录).


[26] Chen Xiao, Jinjin Li,Lei Chen, Chenhui Zhang, Ningning Zhou, Tao Qing, Linmao Qian, Jiyang Zhang, Jianbin Luo, Water-based superlubricity in vacuum. Friction,https://doi.org/10.1007/s40544-018-0212-z(SCI收录).


[25] Chen Xiao, Jinjin Li, Jian Gong,Lei Chen,Jiyang Zhang, Linmao Qiana, Jianbin Luo, Gradual degeneration of liquid superlubricity: Transition from superlubricity to ordinary lubrication, and lubrication failure. Tribology International , 2018, 130, 352–358 (SCI收录,影响因子: 2.903).


[24] Peng Zhang, Cheng Chen, Chen Xiao,Lei Chen, Liang Jiang, Linmao Qian, Effects of surface chemical groups and environmental media on tribochemical running-in behaviors of silicon surface. Tribology International, 2018,128, 174–180(SCI收录,影响因子: 2.903).


[23] Peng Zhang, Cheng Chen, Chen Xiao, Lei Chen, Linmao Qian, Comparison of wear methods at nanoscale: line scanning and area scanning, Wear, 2018,400–401, 137–143(SCI收录,影响因子: 2.531).



[22] Chen Xiao, Jinjin Li,Lei Chen, Chenhui Zhang, Ningning Zhou, Linmao Qian, Jianbin Luo, Speed dependence of liquid superlubricity stability with H3PO4 solution, RSC advance, 2017, 7, 49337(SCI收录,影响因子: 3.289).



[21] Chen Xiao, Cheng Chen, Jian Guo, Peng Zhang, Lei Chen, Linmao Qian,Threshold contact pressure for the material removal on monocrystalline silicon by SiO2 microsphere, Wear, 2017, 376, 188-193(SCI收录,影响因子: 2.531).


[20] Chen Xiao, Jian Guo, Peng Zhang, Cheng Chen,Lei Chen, Linmao Qian,Effect of crystal plane orientation on tribochemical removal of monocrystalline silicon, Scientific Reports, 2017, 7, 40750(SCI收录,影响因子: 4.259).


[19] Bingjun Yu, Hongtu He,Lei Chen, Linmao Qian, Tribology behavior of monocrystalline silicon from single-to multiple-asperity scratch, Wear, 2017, 274, 29-35(SCI收录,影响因子: 2.531).


[18] Peng Zhang, Hongtu He, Cheng Chen, Chen Xiao,Lei Chen, Linmao Qian,Effect of abrasive particle size on tribochemical wear of monocrystallinesilicon, Tribology International, 2017,109, 222-228(SCI收录,影响因子: 2.903).


[17] Cheng Chen, Chen Xiao, Xiaodong Wang, Peng Zhang,Lei Chen, Yaqiong Qi, Linmao Qian,Role of water in the tribochemical removal of bare silicon, Appl. Surf. Sci.2016, 390, 696-702(SCI收录,影响因子: 2.903).


[16] Jialiang Chen, Jiantao Liu, Bingjun Yu,Lei Chen, Chenning Jin, Linmao Qian, Preparation of multi-tip arrays on flexible substrates for large-scale microfabrication, Micro&Nano Letters, 2016, 12, 104-108(SCI收录).


[15]Bingjun Yu, Jian Gao, Chenning Jin, Chen Xiao, Jiang Wu, Huiyun Liu, Shulan Jiang,Lei Chen, Linmao Qian, Humidity effects on tribochemical removal of GaAs surfaces, Appl. Phys. Expres. 2016, 9(6), 066703 (SCI收录,影响因子: 2.265).


[14]Jialin Wen, Tianbao Ma, Weiwei Zhang, George Psofogiannakis, Adri C.T. van Duin,Lei Chen, Linmao Qian, Yuanzhong Hu, Xinchun Lu, Atomic insight into tribochemical wear mechanism of silicon at the Si/SiO₂interface in aqueous environment: Molecular dynamics simulations using ReaxFF reactive force field, Appl. Surf. Sci. 2016, 390, 30, 216-223 (SCI收录,影响因子: 3.15)


[13]Chenning Jin, Bingjun Yu, Chen Xiao,Lei Chen, Linmao Qian, Temperature-dependent nanofabrication on silicon by friction-induced selective etching, Nanoscale Res. Lett. 2016, 11, 229 (SCI收录,影响因子: 2.584).


[12]Xiaodong Wang, Jian Guo, Cheng Chen,Lei Chen, Linmao Qian*, A simple method to control nanotribology behaviors of monocrystalline silicon, J. Appl. Phys. 2016, 119, 044304 (SCI收录,影响因子: 2.183).


[11] Jian Guo, Bingjun Yu,Lei Chen, Linmao Qian, Nondestructive nanofabrication on Si(100) surface by tribochemistryinduced selective etching. Scientific Reports, 2015, 5, 16472 (SCI收录，影响因子：5.578).


[10] Xiaodong Wang, Seong H. Kim, Cheng Chen,Lei Chen, Hongtu He, Linmao Qian*, Humidity dependence of tribochemical wear of monocrystalline silicon, ACS Appl. Mater. Interfaces, 2015, 7 (27), 14785–14792 (SCI收录，影响因子：6.723)


[9] Bingjun Yu, Jian Gao,Lei Chen, Linmao Qian*, Effect of sliding velocity on tribochemical removal of gallium arsenide surface, Wear, 2015, 330-331, 59-63 (SCI收录)


[8] Chen Xiao,Lei Chen, Jian Guo, Bingjun Yu, Linmao Qian*, Effect of Scratching Load on the Friction-induced Selective Etching of Si3N4 Film on Si(100) Surface, The 14th IFToMM World Congress, 2015 (The Best Research Paper).


[7] David J. Marchand,Lei Chen, Yonggang Meng, Linmao Qian*, Seong H. Kim*, Effects of vapor environment and counter-surface chemistry on tribochemical wear of silicon wafers, Tribology Letters, 2014, 53(1), 365-372, (SCI收录)


[6] 姚洋洋,陈磊, 郭剑, 钱林茂*, 基于Si3N4探针的单晶硅表面小线宽结构的摩擦诱导纳米加工, 上海大学学报，20(6), 669-680, 2014. (核心期刊)


[5] 杨亚军,陈磊, 钱林茂*, 原子力显微镜外接气氛控制系统的设计与应用, 机械, 41, 2014 (第七届四川省博士专家论坛三等奖)


[4] Jiaxin Yu*,Lei Chen, Linmao Qian, Danlu Song, Yong Cai, Investigation of humidity-dependent nanotribology behaviors of Si(100)/SiO2 pair moving from stick to slip, Applied Surface Science, 2013, 265, 192-200, (SCI收录，影响因子：2.711)


[3] Xiaodong Wang, Chenfei Song, Bingjun Yu,Lei Chen, Linmao Qian*, Nanowear behaviour of monocrystalline silicon against SiO2 tip in water, Wear, 2013, 298-299, 80-86 (SCI收录)


[2] 徐相杰, 余丙军,陈磊, 钱林茂*, 滑动速度对单晶硅在不同接触尺度下磨损的影响规律研究, 机械工程学报, 49(1), 108-115, 2013 (EI收录)


[1] Xiaodong Wang, Jiaxin Yu,Lei Chen, Linmao Qian*, Zhongrong Zhou, Effects of water and oxygen on the tribochemical wear of monocrystalline Si(100) against SiO2 sphere by simulating the contact conditions in MEMS, Wear, 2011, 271, 1681-1688 (SCI收录)


二、会议论文



[15] 陈磊; 水诱导摩擦化学磨损及调控, 第十四届全国摩擦学大会暨2019年全国青年摩擦学学术会议, 广州, 2019 （特邀报告）


[14] Lei Chen, Linmao Qian,Anisotropicnanowear of crystallinematerials,The International Conference on High-Performance Ceramics (CICC) series, Kunming, 2019（国际会议特邀报告）


[13]Lei Chen, et al.,Ultimate-precision nanomanufacturing via single atomic layer removal of silicon,The Second Sino-German Symposium “Material-oriented, Micro/Nano manufacturing: Modelling, Experinments and application,Bochum, Germany, 2018（国际会议特邀报告）


[12]Lei Chen, et al.,Nanomanufacturing of Si(100) surface at the atomic scale via mechanochemical reaction,International Workshop on Science of Wear, Bingjing, 2018（国际会议特邀报告）


[11]Lei Chen, et al.,Effects of adsorbed water structure on nano-friction,Sweden-China & 8th UK-China Symposium on Tribology, Lanzhou, 2018（国际会议特邀报告）


[10]陈磊, 钱林茂, 亲/疏水表面水膜吸附及对粘着、摩擦和磨损的影响, 2018年全国青年摩擦学学术会议论文集, 福州, 2018（国内会议特邀报告）


[9]Lei CHEN,Soeng Han Kim, LinmaoQian, Different roles of water in tribochemical wear of silicon, 2017STLEAnnual Meeting & Exhibition.


[8]Lei CHEN, Luocheng HU, Chen XIAO, Yaqiong QI, Bingjun YU, Linmao QIAN,Effect of crystallographic orientation on mechanical removal of CaF2, 2017 Wear of Materials.


[7]陈磊，陈诚，钱林茂: 单晶硅摩擦诱导化学磨损的研究进展, 第十二届全国摩擦学大会暨2015全国青年摩擦学学术会议论文集, 成都, 2015（国内会议特邀报告）


[6]陈磊，钱林茂: 湿度和速度对单晶硅摩擦化学去除的影响机制，2015年中国平坦化技术大会暨海峡两岸平坦化技术大会论文集


[5]Lei Chen, Seong H. Kim, Linmao Qian: Effect of sliding speed and humidity on the tribochemical wear of Si/SiO2 pair，7th China International Symposium on Tribology


[4]Lei Chen, Linmao Qian: Nano-tribology of ultrathin DLC coatings with thickness of 2nm and 5nm on Si(100) substrate, 6th China International Symposium on Tribology


[3]Lei Chen, Jiaxin Yu, Linmao Qian: Nanofretting behaviors of a-C and CNx coating on Si(100) substrate, 5th International Conference on Tribochemistry


[2]陈磊，宋晨飞，余丙军，钱林茂: SiO2/Si-SiOx摩擦副在纳米尺度下的磨合过程, 2013年全国青年摩擦学学术会议论文集


[1]陈磊，余家欣，钱林茂: 超薄类金刚石薄膜对单晶硅(100)纳动损伤的防护研究, 2010年全国青年摩擦学学术会议论文集





科研项目

[16]优秀青年科学基金项目（**）：面向IC制造的微观磨损机理及应用研究(2022.1 - 2024.12) 200万
[15]四川省科技计划项目（2021YFSY0017）航空发动机镍基单晶合金叶片材料的各向异性疲劳磨损机理及寿命预测（2021.4 -2023.4）10万
[14]国家自然科学基金(**)：纳米精度表面制造的材料去除机理（2020.1-2024.12）430万 负责经费100万
[13]国家自然科学基金面上项目（**）：面向硅通孔三维互连技术的多晶硅亚纳米级可控去除机理研究 (2019.1-2022.12）直接经费 60万
[12] 国防973计划课题子专题（XXX）：XX环境下长寿命、高可靠超滑体系的可控制备（2015.1-2019.12） 150万
[11] 国家自然科学基金青年基金项目（**）：EUV氟化钙物镜材料的各向异性去除机理研究（2016.1-2018.12） 27.8万
[10] 四川省国际科技创新合作重点项目：基于扫描探针技术的二维材料纳米加工机理及应用（2019.1-2021.12）20万
[9] 科技创新项目（**CX026）：面向紫外光刻物镜的氟化钙材料摩擦化学去除机理研究（2016.7-2018.6） 10万 （完成课题）
[8] 国家地方联合工程实验室开发基金（201703）：面向氟化钙物镜非球面超精密加工的微观磨损机理研究 (2017.1-2018.12) 10万
[7]青年教师****资助项目（**BR016）：超薄DLC薄膜对单晶硅的纳动防护研究（2014.6-2016.6）（完成课题）


主研项目
[6] 国家自然科学基金面上项目（**）：面向高精度、低损伤闪耀光栅的摩擦诱导纳米加工机理研究 (2018.1-2021.12）
[5] 国家自然科学基金面上项目（**）：单晶硅表面原子层状去除的行为与机理（2014.1-2017.12）（完成课题）
[4] 国家自然科学基金综合管理项目(**)：NSFC机械工程学科2014年度青年/地区科学基金项目启动会（2014.11-2015.1）（完成课题）


参与项目
[3] 国家****科学基金（**）：微/纳摩擦学（2007.1-2010.12）（完成课题）
[2] 国家纳米制造重大研究计划追加项目（**）： “亚纳米精度表面制造基础研究”子课题“单晶硅表面原子级材料迁移机制及其量化表征”（2014.1-2017.12）
[1] 国家自然科学基金面上项目（**）：单晶硅表面摩擦诱导化学磨损的行为、机理及控制研究（2012.1-2015.12）（完成课题）




研究领域
1、超精密表面加工机理研究
(1) 新一代硅通孔三维互连技术为半导体芯片工艺突破5纳米线宽物理极限的限制提供了全新的途径。多针对大规模集成电路中硅通孔三维互连技术对异质材料表面超精密表面的需求，开展多晶硅、单晶硅、非晶硅等异质材料的亚纳米级可控去除机理研究。

超精密表面抛光 抛光晶圆 集成电路多晶硅硅通孔及其表面一致抛光


(2) 氟化钙晶体基于其高透光率和高抗激光损伤阈值等优异的光学性能，已成为目前极紫外光刻物镜系统中不可替代的透镜材料。针对IC关键制造装备——极紫外光刻系统对核心零部件物镜系统对表面精度和质量的苛刻要求，开展氟化钙物镜材料的各向异性去除机理研究。

极紫外光刻系统核心物镜系统对超精密非球表面加工的需求




2、航空发动机叶片高温材料—镍基单晶合金各向异性疲劳磨损机理的跨尺度研究
作为航空发动机的核心零部件之一，涡轮叶片的服役损伤直接影响发动机的可靠性，其中疲劳磨损是叶片失效的主要原因之一。具有单晶结构的镍基高温合金叶片材料尽管排除了多晶材料晶间易断裂的问题，但却由于其复杂的多元素组合和晶相结构，使其细观组织和服役性能在原子尺度、微米量级乃至近毫米尺度呈现出显著的各向异性。因此，镍基单晶合金的跨尺度各向异性疲劳磨损机理是亟待解决的关键科学问题。

航空发动机 叶片工作温度 单晶叶片失效


3、二维材料微纳结构制造
半导体芯片的特征线宽以摩尔定律持续减小，现硅基 IC 技术已趋近其物理极限，因此寻找硅的替代材料并发展新的柔性纳米电子器件成为当前科学界和半导体产业界面临的当务之急。以石墨烯、二硫化钼等为代表的二维（2D）材料已在柔性屏幕、传感器和微纳电子等方面体现出巨大的应用前景。扫描探针加工技术由于精度高、成本低、加工过程无化学污染、可实时在线原位精准测量等特点受到学术界和产业界越来越多的关注。因此，针对扫描探针技术在纳米结构和纳米器件的制造中具有广阔的应用前景，开展基于扫描探针技术的二维材料纳米加工机理及应用研究。

2D材料应用 石墨烯1 nm晶体管 二硫化钼集成电路


专利 More>>
陈磊，石鹏飞，郭杰. 余丙军，钱林茂. "一种单晶硅表面纳米坑无损加工方法"
陈磊，梁慧康，石鹏飞，郭杰，钱林茂. "面向微加工的竖直稳定加载对称型微悬臂设计及应用方法"
陈磊，马韬，郭杰，石鹏飞，余丙军，钱林茂. “一种基于原子力显微镜的旋转样品台装置“
钱林茂, 汪红波, 蒋淑兰, 李斌, 余丙军, 陈磊. "基于微悬臂投影的光电式气敏传感器"
钱林茂, 汪红波, 蒋淑兰, 余丙军, 陈磊, 江亮. "一种基于紫外臭氧的单晶硅表面纳米加工方法"
钱林茂,汪红波, 蒋淑兰, 李斌, 余丙军, 陈磊. "基于微悬臂投影的光电式加速度传感器"

著作成果
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个人信息Personal Information 所在单位： 机械工程学院
学历： 博士研究生毕业
办公地点： 西南交通大学摩擦学研究所410-1
联系方式：
学位： 工学博士学位
电子邮箱： chenlei@swjtu.edu.cn

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论文成果 当前位置： 中文主页 >> 科学研究 >> 论文成果
一、学术论文代表论文

[68] Jian Gong; Jian Gao; Chen Xiao*; Lei Chen*; Linmao Qian; Mechanochemical reactions of GaN-Al2O3 interface at nanoasperity contact: the roles of crystallographic polarity and ambient humidity, Friction, 2021.


[67] Lei Chen, Linmao Qian*; Role of interfacial water in adhesion, friction, and wear—A critical review, Friction 2021, 9(1):1-28.


[66] Yunhai Liu, Yilong Jiang, Junhui Sun, Lei Wang, Yangqin Liu, Lei Chen*, Bin Zhang*, Linmao Qian; Durable superlubricity of hydrogenated diamond-like carbon film against different friction pairs depending on their interfacial interaction, Applied Surface Science, 2021, 560: 150023.


[65] Yuanyuan Jiang, Chen Xiao*, Lei Chen*, Chenhui Zhang, Ningning Zhou, Linmao Qian, Jianbin Luo, Jinjin Li; Temporary or permanent liquid superlubricity failure depending on shear-induced evolution of surface topography, Tribology International, 2021, 161: 107076.


[64] Yuanyuan Jiang; Lei Chen*; Chen Xiao; Ningning Zhou; Tao Qing; Linmao Qian; Friction and Wear Behaviors of Steel Ball Against Polyimide-PTFE Composite Under Rolling-Sliding Motion, Tribology Letters, 2021, 69(3): 1-12.


[63] Yunhai Liu; Chen Lei*; Bangzheng Jiang; Yangqin Liu; Bin Zhang; Chen Xiao; Junyan Zhang; Linmao Qian*; Origin of low friction in hydrogenated diamond-like carbon films due to graphene nanoscroll formation depending on sliding mode: Unidirection and reciprocation, Carbon, 2020, 173: 696-704.


[62] Chen Xiao; Jie Li; Jian Guo; Peng Zhang; Bingjun Yu; Lei Chen *; Linmao Qian; Role of mechanically-driven distorted microstructure in mechanochemical removal of silicon, Applied Surface Science, 2020, 520: 146337.


[61]Jie Guo; Jian Gong; Pengfei Shi; Chen Xiao; Liang Jiang; Lei Chen *; Linmao Qian; Study on the polishing mechanism of pH-dependent tribochemical removal in CMP of CaF2 crystal, Tribology International, 2020, 150: 106370.


[60] Chen Xiao; Chao Chen; Yangyang Yao; Hongshen Liu; Lei Chen*; Linmao Qian*; Seong Han Kim; Nanoasperity Adhesion of the Silicon Surface in Humid Air: The Roles of Surface Chemistry and Oxidized Layer Structures, Langmuir, 2020, 36: 5483-5491.


[59] Pengfei Shi; Junhui Sun; Yunhai Liu; Bin Zhang; Junyan Zhang; Lei Chen*; Linmao Qian*; Running-in behavior of a H? DLC/Al2O3 pair at the nanoscale, Friction, 2020.


[58]Pengfei Shi; Huikang Liang; Wenmeng Yan; Junhui Sun; Lei Chen*; Linmao Qian; Development of a symmetrical micro- beam minimizing horizontal drift for indentation and scratch, Review of Scientific Instruments, 2020, 91(043702).


[57]Pengfei Shi; Junhui Sun; Wenmeng Yan; Ningning Zhou; Junyan Zhang; Jiyang Zhang; Lei Chen*; Linmao Qian*; Roles of phase transition and surface property evolution in nanotribological behaviors of H-DLC: Effects of thermal and UV irradiation treatments, Applied Surface Science, 2020, 514(145960).


[56] Andreas Rosenkranz*; Yangqin Liu; Lin Yang; Lei Chen; 2D nano?materials beyond graphene: from synthesis to tribological studies, Applied Nanoscience, 2020,10: 23353-3388.


[55] Jian Guo, Jian Gao, Chen Xiao*, Lei Chen*, Linmao Qian; Mechanochemical reactions of GaN-Al2O3 interface at the nanoasperity contact: Roles of crystallographic polarity and ambient humidity, Friction,2020, doi.org/10.1007/s40544-021- 0501-9


[54] Lei Chen; Ngo Dien; Jiawei Luo; Yunfei Gong; Chen Xiao; Xin He; Bingjun Yu; Linmao Qian; Seong H. Kim; Dependence of water adsorption on the surface structure of silicon wafers aged under different environmental conditions, Physical Chemistry Chemical Physics, 2019, 21(47): 26041-26048.


[53] Lei Chen; Zhe Chen; Xiaoyu Tang; Wenmeng Yan; Linmao Qian*; Seong H. Kim*; Friction at single-layer graphene step edges due to chemical and topographic interactions, Carbon, 2019, 154: 67-73.


[52]Chen Xiao; Jingjing Li; Lei Chen*; Linmao Qian; Water-based superlubricity in vacuum, Friction, 2019, 7(2) : 192-198.


[51]Lei Chen(#), Zhe Chen(#),Xiaoyu Tang, Wenmeng Yan, Linmao Qian*, Seong H. Kim*,Friction at single-layer graphene step edges due to chemical and topographic interactions.Carbon 2019, 154, 67-73(影响因子: 7.42).


[50] Chen Xiao, Pengfei Shi, Wenmeng Yan,Lei Chen(*), Linmao Qian, Seong H. Kim, Thickness and structure of adsorbed water layer and effects on adhesion and friction at nanoasperity contact. Colloids Interfaces 2019, 3(3), 55.(Invited review paper)


[49]Zhaohui Liu,Jian Gong,Chen Xiao,Pengfei Shi,Seong Han Kim,Lei Chen(*),Linmao Qian(*),Temperature-dependent mechanochemical wear of silicon in water: the role of Si-OH surfacial groups.Langmuir, 2019,35, 7735-7743(影响因子: 3.833).


[48] Yunhai Liu,Lei Chen(*),Bin Zhang(*), Zhongyue Cao, Pengfei Shi, Yong Peng, Ningning Zhou, Junyan Zhang, Linmao Qian. Key role of transfer layer inload dependence of friction on hydrogenated diamond-Like carbon films in humid air and vacuum. Materials 2019, 12, 1550 (影响因子：2.467)


[47] Menmeng Yan, Jian Guo, Binjun Yu,Lei Chen(*), Linmao Qian, Self-lubrication of Si/SiO2 interface achieved through running-in at lowsliding speed. Wear, 2019, 426–427, 828–834 (影响因子：2.531).


[46]Jian Gong, Chen Xiao, Jiaxin Yu, Jinfang Peng, Bingjun Yu,Lei Chen(*),Linmao Qian, Stress-enhanced dissolution and delamination wear of crystal CaF2 in water condition. Wear, 2019, 418-419, 86-93 (影响因子：2.531)


[45]Yunhai Liu, Bin Zhang,Lei Chen(*),Zhongyue Gao, Pengfei Shi, Jinwei Liu, Junyan Zhang, Linmao Qian, Perspectives of the friction mechanism of hydrogenated diamond-Like carbon film in air by varying sliding velocity. Coatings 2018, 8, 331(SCI收录).


[44]Lei Chen, Jialin Wen, Peng Zhang, Bingjun Yu, Tianbao MA, Xinchun Lu, Seong H. Kim, Linmao Qian, Nanomanufacturing of silicon surface with a single atomic layer precision via mechanochemical reactions. Nature Communications, 2018, 9, 1542 (影响因子: 12.353).


[43]Lei Chen, Xin He, Hongshen Liu, Linmao Qian, Seong H. Kim,Water adsorption on hydrophilic and hydrophobic surface of silicon. The Journal of Physical Chemistry C, 2018, 122, 11385-11391(影响因子：4.536)


[42]Lei Chen, Chen Xiao, Bingjun Yu, Seong H. Kim, Linmao Qian, What governs friction of silicon oxide in humid environment-contact area between solids, water meniscus around the contact, or water layer structure? Langmuir, 2017, 33 (38), 9673-9679(SCI收录,影响因子: 3.833).


[41]Lei Chen, Yaqiong Qi, Bingjun Yu, Linmao Qian, Slidingspeed-dependent tribochemical wear of oxide-free silicon. Nanoscale Research Letters, 2017, 12, 7(SCI收录,影响因子: 2.833).


[40]Lei Chen, Xiao Chen, Xin He, Bingjun Yu, Seong H. Kim, Linmao Qian, Friction and tribochemical wear behaviors of native oxide layer on silicon at nanoscale. Tribology Letters, 2017, 65, 139 (SCI收录).


[39]Lei Chen, Luocheng Hu, Chen Xiao, Yaqiong Qi, Bingjun Yu, Linmao Qian,Effect of crystallographic orientation on mechanical removal of CaF2, Wear, 2017, 376, 409-416(SCI收录,影响因子: 2.531).


[38]Yaqiong Qi,Lei Chen(*), Shu-lan Jiang, Jiaxin Yu, Bingjun Yu, Linmao Qian, Investigation of silicon wear against non-porous and micro-porous SiO₂spheres in water and in humid air, RSC advance, 2016, 6, 89627-89634 (SCI收录,影响因子: 3.289).


[37]Jing Xia, Jing Zheng, Diaodiao Huang, Z. Ryan Tian,Lei Chen, Zhongrong Zhou, Peter S. Unger, LinmaoQian*, A new model to explain tooth wear with implications for microwear formation and diet reconstruction, Proceedings of the National Academy of Sciences of the United States of America, 2015, 112(4), 10669-10672 (SCI收录，影响因子：9.674)


[36]Lei Chen, Hongtu He, Xiaodong Wang, Seong H. Kim*, Linmao Qian*, Tribology of Si/SiO2 in humid air: transition from severe chemical wear to wearless behavior atnanoscale, Langmuir, 2015, 31(1), 149-156, (SCI收录,影响因子: 3.833).


[35]Lei Chen, Yajun Yang, Hongtu He, Seong H. Kim, Linmao Qian*, Effect of coadsorption of water and alcohol vapor on the nanowear of silicon, Wear, 2015, 332-333, 879-884 (SCI收录,影响因子: 2.531).


[34]Lei Chen, Mingchu Yang, Chenfei Song, Bingjun Yu, Linmao Qian*, Is 2 nm DLC coating enough to resist the nanowear of silicon, Wear, 2013, 302(1-2): 909-917 (SCI收录,影响因子: 2.531).


[33]Lei Chen, Seong H. Kim, Xiaodong Wang, Linmao Qian(*), Running-in process of Si-SiOx /SiO2 pair at nanoscale-Sharp drops in friction and wear rate during initial cycles, Friction 1(1), 2013, 81-91 (SCI收录)


[32]Lei Chen, Mingchu Yang, Jiaxin Yu, Linmao Qian*, Zhongrong ZHOU, Nanofretting behaviours of ultrathin DLC coating on Si(100) substrate, Wear, 2011, 271, 1980-1986 (SCI收录,影响因子: 2.531)


其它论文


[31] Chen Xiao, Xiaojun Xin, Xin He, Hongbo Wang,Lei Chen, Seong H. Kim,Linmao, Surface Structure Dependence of Mechanochemical Etching:Scanning Probe-Based Nanolithography Study on Si(100), Si(110), and Si(111), ACS Appl. Mater. Interfaces 2019, accepted. (SCI收录，影响因子：8.097)


[30]Chen Xiao, Cheng Chen, Hongbo Wang,Lei Chen, Liang Jiang, Bingjun Yu, Linmao Qian,Effect of counter-surface chemistry on defect-free material removal ofmonocrystalline silicon.Wear 2019,426–427,1233–1239(SCI收录，影响因子：2.531).


[29] Peng Zhang, Chen Xiao, Cheng Chen,Lei Chen, Linmao Qian, Effect of abrasive particle degradation on tribochemical wear of mnocrystalline silicon. Wear 426–427 (2019) 1240–1245 (SCI收录,影响因子: 2.531).


[28]Xiaoxiao Liu, Bingjun Yu, Yijia Zou, Chao Zhou, Xiaoying Li, Jiang Wu, Huiyun Liu,Lei Chen, and Linmao Qian, Revealing silicon crystal defects by conductive atomic force microscope. Appl. Phys. Lett. 2018, 112, 101601 (SCI收录).


[27] Guangran Guo, Jiaming Li, Changbang Deng, Qipei He, Qingyuan Yu, Chao Zhou, Xiaoxiao Liu, Shulan Jiang,Lei Chen, Bingjun Yu*, and Linmao Qian, Nondestructive nanofabrication on monocrystalline silicon via site-controlled formation and removal of oxide mask. Applied Physics Express, 2018, 11, 116501 (SCI收录).


[26] Chen Xiao, Jinjin Li,Lei Chen, Chenhui Zhang, Ningning Zhou, Tao Qing, Linmao Qian, Jiyang Zhang, Jianbin Luo, Water-based superlubricity in vacuum. Friction,https://doi.org/10.1007/s40544-018-0212-z(SCI收录).


[25] Chen Xiao, Jinjin Li, Jian Gong,Lei Chen,Jiyang Zhang, Linmao Qiana, Jianbin Luo, Gradual degeneration of liquid superlubricity: Transition from superlubricity to ordinary lubrication, and lubrication failure. Tribology International , 2018, 130, 352–358 (SCI收录,影响因子: 2.903).


[24] Peng Zhang, Cheng Chen, Chen Xiao,Lei Chen, Liang Jiang, Linmao Qian, Effects of surface chemical groups and environmental media on tribochemical running-in behaviors of silicon surface. Tribology International, 2018,128, 174–180(SCI收录,影响因子: 2.903).


[23] Peng Zhang, Cheng Chen, Chen Xiao, Lei Chen, Linmao Qian, Comparison of wear methods at nanoscale: line scanning and area scanning, Wear, 2018,400–401, 137–143(SCI收录,影响因子: 2.531).



[22] Chen Xiao, Jinjin Li,Lei Chen, Chenhui Zhang, Ningning Zhou, Linmao Qian, Jianbin Luo, Speed dependence of liquid superlubricity stability with H3PO4 solution, RSC advance, 2017, 7, 49337(SCI收录,影响因子: 3.289).



[21] Chen Xiao, Cheng Chen, Jian Guo, Peng Zhang, Lei Chen, Linmao Qian,Threshold contact pressure for the material removal on monocrystalline silicon by SiO2 microsphere, Wear, 2017, 376, 188-193(SCI收录,影响因子: 2.531).


[20] Chen Xiao, Jian Guo, Peng Zhang, Cheng Chen,Lei Chen, Linmao Qian,Effect of crystal plane orientation on tribochemical removal of monocrystalline silicon, Scientific Reports, 2017, 7, 40750(SCI收录,影响因子: 4.259).


[19] Bingjun Yu, Hongtu He,Lei Chen, Linmao Qian, Tribology behavior of monocrystalline silicon from single-to multiple-asperity scratch, Wear, 2017, 274, 29-35(SCI收录,影响因子: 2.531).


[18] Peng Zhang, Hongtu He, Cheng Chen, Chen Xiao,Lei Chen, Linmao Qian,Effect of abrasive particle size on tribochemical wear of monocrystallinesilicon, Tribology International, 2017,109, 222-228(SCI收录,影响因子: 2.903).


[17] Cheng Chen, Chen Xiao, Xiaodong Wang, Peng Zhang,Lei Chen, Yaqiong Qi, Linmao Qian,Role of water in the tribochemical removal of bare silicon, Appl. Surf. Sci.2016, 390, 696-702(SCI收录,影响因子: 2.903).


[16] Jialiang Chen, Jiantao Liu, Bingjun Yu,Lei Chen, Chenning Jin, Linmao Qian, Preparation of multi-tip arrays on flexible substrates for large-scale microfabrication, Micro&Nano Letters, 2016, 12, 104-108(SCI收录).


[15]Bingjun Yu, Jian Gao, Chenning Jin, Chen Xiao, Jiang Wu, Huiyun Liu, Shulan Jiang,Lei Chen, Linmao Qian, Humidity effects on tribochemical removal of GaAs surfaces, Appl. Phys. Expres. 2016, 9(6), 066703 (SCI收录,影响因子: 2.265).


[14]Jialin Wen, Tianbao Ma, Weiwei Zhang, George Psofogiannakis, Adri C.T. van Duin,Lei Chen, Linmao Qian, Yuanzhong Hu, Xinchun Lu, Atomic insight into tribochemical wear mechanism of silicon at the Si/SiO₂interface in aqueous environment: Molecular dynamics simulations using ReaxFF reactive force field, Appl. Surf. Sci. 2016, 390, 30, 216-223 (SCI收录,影响因子: 3.15)


[13]Chenning Jin, Bingjun Yu, Chen Xiao,Lei Chen, Linmao Qian, Temperature-dependent nanofabrication on silicon by friction-induced selective etching, Nanoscale Res. Lett. 2016, 11, 229 (SCI收录,影响因子: 2.584).


[12]Xiaodong Wang, Jian Guo, Cheng Chen,Lei Chen, Linmao Qian*, A simple method to control nanotribology behaviors of monocrystalline silicon, J. Appl. Phys. 2016, 119, 044304 (SCI收录,影响因子: 2.183).


[11] Jian Guo, Bingjun Yu,Lei Chen, Linmao Qian, Nondestructive nanofabrication on Si(100) surface by tribochemistryinduced selective etching. Scientific Reports, 2015, 5, 16472 (SCI收录，影响因子：5.578).


[10] Xiaodong Wang, Seong H. Kim, Cheng Chen,Lei Chen, Hongtu He, Linmao Qian*, Humidity dependence of tribochemical wear of monocrystalline silicon, ACS Appl. Mater. Interfaces, 2015, 7 (27), 14785–14792 (SCI收录，影响因子：6.723)


[9] Bingjun Yu, Jian Gao,Lei Chen, Linmao Qian*, Effect of sliding velocity on tribochemical removal of gallium arsenide surface, Wear, 2015, 330-331, 59-63 (SCI收录)


[8] Chen Xiao,Lei Chen, Jian Guo, Bingjun Yu, Linmao Qian*, Effect of Scratching Load on the Friction-induced Selective Etching of Si3N4 Film on Si(100) Surface, The 14th IFToMM World Congress, 2015 (The Best Research Paper).


[7] David J. Marchand,Lei Chen, Yonggang Meng, Linmao Qian*, Seong H. Kim*, Effects of vapor environment and counter-surface chemistry on tribochemical wear of silicon wafers, Tribology Letters, 2014, 53(1), 365-372, (SCI收录)


[6] 姚洋洋,陈磊, 郭剑, 钱林茂*, 基于Si3N4探针的单晶硅表面小线宽结构的摩擦诱导纳米加工, 上海大学学报，20(6), 669-680, 2014. (核心期刊)


[5] 杨亚军,陈磊, 钱林茂*, 原子力显微镜外接气氛控制系统的设计与应用, 机械, 41, 2014 (第七届四川省博士专家论坛三等奖)


[4] Jiaxin Yu*,Lei Chen, Linmao Qian, Danlu Song, Yong Cai, Investigation of humidity-dependent nanotribology behaviors of Si(100)/SiO2 pair moving from stick to slip, Applied Surface Science, 2013, 265, 192-200, (SCI收录，影响因子：2.711)


[3] Xiaodong Wang, Chenfei Song, Bingjun Yu,Lei Chen, Linmao Qian*, Nanowear behaviour of monocrystalline silicon against SiO2 tip in water, Wear, 2013, 298-299, 80-86 (SCI收录)


[2] 徐相杰, 余丙军,陈磊, 钱林茂*, 滑动速度对单晶硅在不同接触尺度下磨损的影响规律研究, 机械工程学报, 49(1), 108-115, 2013 (EI收录)


[1] Xiaodong Wang, Jiaxin Yu,Lei Chen, Linmao Qian*, Zhongrong Zhou, Effects of water and oxygen on the tribochemical wear of monocrystalline Si(100) against SiO2 sphere by simulating the contact conditions in MEMS, Wear, 2011, 271, 1681-1688 (SCI收录)


二、会议论文



[15] 陈磊; 水诱导摩擦化学磨损及调控, 第十四届全国摩擦学大会暨2019年全国青年摩擦学学术会议, 广州, 2019 （特邀报告）


[14] Lei Chen, Linmao Qian,Anisotropicnanowear of crystallinematerials,The International Conference on High-Performance Ceramics (CICC) series, Kunming, 2019（国际会议特邀报告）


[13]Lei Chen, et al.,Ultimate-precision nanomanufacturing via single atomic layer removal of silicon,The Second Sino-German Symposium “Material-oriented, Micro/Nano manufacturing: Modelling, Experinments and application,Bochum, Germany, 2018（国际会议特邀报告）


[12]Lei Chen, et al.,Nanomanufacturing of Si(100) surface at the atomic scale via mechanochemical reaction,International Workshop on Science of Wear, Bingjing, 2018（国际会议特邀报告）


[11]Lei Chen, et al.,Effects of adsorbed water structure on nano-friction,Sweden-China & 8th UK-China Symposium on Tribology, Lanzhou, 2018（国际会议特邀报告）


[10]陈磊, 钱林茂, 亲/疏水表面水膜吸附及对粘着、摩擦和磨损的影响, 2018年全国青年摩擦学学术会议论文集, 福州, 2018（国内会议特邀报告）


[9]Lei CHEN,Soeng Han Kim, LinmaoQian, Different roles of water in tribochemical wear of silicon, 2017STLEAnnual Meeting & Exhibition.


[8]Lei CHEN, Luocheng HU, Chen XIAO, Yaqiong QI, Bingjun YU, Linmao QIAN,Effect of crystallographic orientation on mechanical removal of CaF2, 2017 Wear of Materials.


[7]陈磊，陈诚，钱林茂: 单晶硅摩擦诱导化学磨损的研究进展, 第十二届全国摩擦学大会暨2015全国青年摩擦学学术会议论文集, 成都, 2015（国内会议特邀报告）


[6]陈磊，钱林茂: 湿度和速度对单晶硅摩擦化学去除的影响机制，2015年中国平坦化技术大会暨海峡两岸平坦化技术大会论文集


[5]Lei Chen, Seong H. Kim, Linmao Qian: Effect of sliding speed and humidity on the tribochemical wear of Si/SiO2 pair，7th China International Symposium on Tribology


[4]Lei Chen, Linmao Qian: Nano-tribology of ultrathin DLC coatings with thickness of 2nm and 5nm on Si(100) substrate, 6th China International Symposium on Tribology


[3]Lei Chen, Jiaxin Yu, Linmao Qian: Nanofretting behaviors of a-C and CNx coating on Si(100) substrate, 5th International Conference on Tribochemistry


[2]陈磊，宋晨飞，余丙军，钱林茂: SiO2/Si-SiOx摩擦副在纳米尺度下的磨合过程, 2013年全国青年摩擦学学术会议论文集


[1]陈磊，余家欣，钱林茂: 超薄类金刚石薄膜对单晶硅(100)纳动损伤的防护研究, 2010年全国青年摩擦学学术会议论文集









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学历： 博士研究生毕业
办公地点： 西南交通大学摩擦学研究所410-1
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科研项目 当前位置： 中文主页 >> 科学研究 >> 科研项目

[16]优秀青年科学基金项目（**）：面向IC制造的微观磨损机理及应用研究(2022.1 - 2024.12) 200万
[15]四川省科技计划项目（2021YFSY0017）航空发动机镍基单晶合金叶片材料的各向异性疲劳磨损机理及寿命预测（2021.4 -2023.4）10万
[14]国家自然科学基金(**)：纳米精度表面制造的材料去除机理（2020.1-2024.12）430万 负责经费100万
[13]国家自然科学基金面上项目（**）：面向硅通孔三维互连技术的多晶硅亚纳米级可控去除机理研究 (2019.1-2022.12）直接经费 60万
[12] 国防973计划课题子专题（XXX）：XX环境下长寿命、高可靠超滑体系的可控制备（2015.1-2019.12） 150万
[11] 国家自然科学基金青年基金项目（**）：EUV氟化钙物镜材料的各向异性去除机理研究（2016.1-2018.12） 27.8万
[10] 四川省国际科技创新合作重点项目：基于扫描探针技术的二维材料纳米加工机理及应用（2019.1-2021.12）20万
[9] 科技创新项目（**CX026）：面向紫外光刻物镜的氟化钙材料摩擦化学去除机理研究（2016.7-2018.6） 10万 （完成课题）
[8] 国家地方联合工程实验室开发基金（201703）：面向氟化钙物镜非球面超精密加工的微观磨损机理研究 (2017.1-2018.12) 10万
[7]青年教师****资助项目（**BR016）：超薄DLC薄膜对单晶硅的纳动防护研究（2014.6-2016.6）（完成课题）


主研项目
[6] 国家自然科学基金面上项目（**）：面向高精度、低损伤闪耀光栅的摩擦诱导纳米加工机理研究 (2018.1-2021.12）
[5] 国家自然科学基金面上项目（**）：单晶硅表面原子层状去除的行为与机理（2014.1-2017.12）（完成课题）
[4] 国家自然科学基金综合管理项目(**)：NSFC机械工程学科2014年度青年/地区科学基金项目启动会（2014.11-2015.1）（完成课题）


参与项目
[3] 国家****科学基金（**）：微/纳摩擦学（2007.1-2010.12）（完成课题）
[2] 国家纳米制造重大研究计划追加项目（**）： “亚纳米精度表面制造基础研究”子课题“单晶硅表面原子级材料迁移机制及其量化表征”（2014.1-2017.12）
[1] 国家自然科学基金面上项目（**）：单晶硅表面摩擦诱导化学磨损的行为、机理及控制研究（2012.1-2015.12）（完成课题）








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研究领域 当前位置： 中文主页 >> 科学研究 >> 研究领域
1、超精密表面加工机理研究
(1) 新一代硅通孔三维互连技术为半导体芯片工艺突破5纳米线宽物理极限的限制提供了全新的途径。多针对大规模集成电路中硅通孔三维互连技术对异质材料表面超精密表面的需求，开展多晶硅、单晶硅、非晶硅等异质材料的亚纳米级可控去除机理研究。

超精密表面抛光 抛光晶圆 集成电路多晶硅硅通孔及其表面一致抛光


(2) 氟化钙晶体基于其高透光率和高抗激光损伤阈值等优异的光学性能，已成为目前极紫外光刻物镜系统中不可替代的透镜材料。针对IC关键制造装备——极紫外光刻系统对核心零部件物镜系统对表面精度和质量的苛刻要求，开展氟化钙物镜材料的各向异性去除机理研究。

极紫外光刻系统核心物镜系统对超精密非球表面加工的需求




2、航空发动机叶片高温材料—镍基单晶合金各向异性疲劳磨损机理的跨尺度研究
作为航空发动机的核心零部件之一，涡轮叶片的服役损伤直接影响发动机的可靠性，其中疲劳磨损是叶片失效的主要原因之一。具有单晶结构的镍基高温合金叶片材料尽管排除了多晶材料晶间易断裂的问题，但却由于其复杂的多元素组合和晶相结构，使其细观组织和服役性能在原子尺度、微米量级乃至近毫米尺度呈现出显著的各向异性。因此，镍基单晶合金的跨尺度各向异性疲劳磨损机理是亟待解决的关键科学问题。

航空发动机 叶片工作温度 单晶叶片失效


3、二维材料微纳结构制造
半导体芯片的特征线宽以摩尔定律持续减小，现硅基 IC 技术已趋近其物理极限，因此寻找硅的替代材料并发展新的柔性纳米电子器件成为当前科学界和半导体产业界面临的当务之急。以石墨烯、二硫化钼等为代表的二维（2D）材料已在柔性屏幕、传感器和微纳电子等方面体现出巨大的应用前景。扫描探针加工技术由于精度高、成本低、加工过程无化学污染、可实时在线原位精准测量等特点受到学术界和产业界越来越多的关注。因此，针对扫描探针技术在纳米结构和纳米器件的制造中具有广阔的应用前景，开展基于扫描探针技术的二维材料纳米加工机理及应用研究。

2D材料应用 石墨烯1 nm晶体管 二硫化钼集成电路






Copyright ? 2019 西南交通大学. All Rights Reserved.蜀ICP备**号
地址：中国四川省成都市高新区西部园区西南交通大学
川公网安备061号
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个人信息Personal Information 所在单位： 机械工程学院
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专利 当前位置： 中文主页 >> 科学研究 >> 专利
陈磊，石鹏飞，郭杰. 余丙军，钱林茂. "一种单晶硅表面纳米坑无损加工方法"
陈磊，梁慧康，石鹏飞，郭杰，钱林茂. "面向微加工的竖直稳定加载对称型微悬臂设计及应用方法"
陈磊，马韬，郭杰，石鹏飞，余丙军，钱林茂. “一种基于原子力显微镜的旋转样品台装置“
钱林茂, 汪红波, 蒋淑兰, 李斌, 余丙军, 陈磊. "基于微悬臂投影的光电式气敏传感器"
钱林茂, 汪红波, 蒋淑兰, 余丙军, 陈磊, 江亮. "一种基于紫外臭氧的单晶硅表面纳米加工方法"
钱林茂,汪红波, 蒋淑兰, 李斌, 余丙军, 陈磊. "基于微悬臂投影的光电式加速度传感器"
钱林茂，郭剑，陈磊，余丙军，宋晨飞. "基于摩擦化学诱导刻蚀的单晶硅表面无损伤纳米加工方法"
余丙军，张超杰，钱林茂，陈磊，高健，陈家良. "一种简易的真空测温系统"
余丙军，张超杰，钱林茂，陈磊，高健，陈家良. "一种真空下多探针摩擦磨损测试及原位形貌探测系统"
钱林茂，陈磊，吴治江，余丙军，周仲荣. "一种用于大面积摩擦诱导微/纳米加工的多针尖阵列的制作方法"
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个人信息Personal Information 所在单位： 机械工程学院
学历： 博士研究生毕业
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Copyright ? 2019 西南交通大学. All Rights Reserved.蜀ICP备**号
地址：中国四川省成都市高新区西部园区西南交通大学
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技术支持：信息化与网络管理处