能量控制模式下聚合物超声波微压印成形

罗怡¹, 马玉辉², 闫旭¹, 祁娜², 王晓东¹

(1. 辽宁省微纳米技术及系统重点实验室(大连理工大学),116024 辽宁 大连; 2. 精密与特种加工教育部重点实验室(大连理工大学),116024 辽宁 大连)



摘要:

针对聚合物微结构超声波压印成形中工艺窗口窄、可控性较差的问题,提出采用能量控制模式控制超声波能量,以聚甲基丙烯酸甲酯(PMMA)基片为被成形材料,通过设计对比实验,研究能量控制模式与时间控制模式对基片成形的影响．实验结果表明,在能量控制模式下,当热辅助温度65 ℃,超声压力400 N,超声振幅11.4 μm,超声能量为700～1 000 J时,均能获得92％以上的深度复制率．通过测量热影响区聚合物在超声波作用下的温升曲线知,在相似工艺参数下,能量控制模式下聚合物的温度峰值低,处于成形区的时间长,因此该控制模式下工艺窗口宽、可控性好．

关键词:  聚合物微结构成形  超声波压印  能量控制模式  时间控制模式

DOI：10.11918/j.issn.0367-6234.2015.03.018

分类号:TH706； TB559

基金项目:国家自然科学基金 (50975037);国家高技术研究发展计划资助(2012AA040406).



Replication of polymer microstructure in energy control mode using ultrasonic embossing

LUO Yi¹, MA Yuhui², YAN Xu¹, QI Na², WANG Xiaodong¹

(1. Key Laboratory for Micro／Nano Technology and System of Liaoning Province(Dalian University of Technology), 116024 Dalian, Liaoning, China; 2. Key Laboratory for Precision and Non-traditional Machining Technology of Ministry of Education(Dalian University of Technology), 116024 Dalian, Liaoning, China)

Abstract:

Ultrasonic embossing is a new replication technique for polymer microstructures, and it is difficult to control the embossing process, and the process window is very narrow. Aiming at solving this kind of problem, energy control mode for ultrasonic embossing is proposed in this paper. PMMA was selected as the substrate, and embossing experiments based on energy control mode and time control mode were carried out. The results show that, in the energy control mode, under the condition of heat-assisted temperature 65 ℃, ultrasonic pressure 400 N, ultrasonic amplitude 11.4 μm and ultrasonic energy range from 700 J to 1 000 J, the depth replication rate was better than 92％. The temperature test experiments for heat affected zone show that, using the similar embossing parameters, the peak temperature in energy control mode is low and the temperature over the glass transition point is long. And this is the main reason for energy control mode has wider processing window which makes the process more controllable.

Key words:  replication of polymer microstructure  ultrasonic embossing  energy control mode  time control mode