于晓梅 职称：教授
研究所：微纳电子学研究院
研究领域：微光机电系统，生物微机电系统，纳机电器件
办公电话：86-10-6276 6592
电子邮件：yuxm@pku.edu.cn
个人主页：http://162.105.209.37/teaching/inservice/search/Detail/?ID=1783




科研/教育经历
1982年7月、1985年7月毕业于吉林大学电子科学系半导体物理专业，分别获得理学学士学位和理学硕士学位，2001年6月毕业于北京航空航天大学，获得材料学博士学位。1985年7月至2001年9月在北京航空航天大学应用物理系任教，历任助教、讲师、副教授。1999年至2000年在丹麦技术大学微米纳米技术系任访问学者。2001年10月至2003年8月在北京大学微纳电子学研究院从事博士后研究，出站后进入北京大学微纳电子学研究院任副教授，2008年被聘任为北京大学微电子学研究院教授。

研究成果概况
目前主要从事微纳机电系统方面的研究工作，研究方向包括：基于MEMS技术的非制冷红外和太赫兹焦平面阵列及其成像技术研究；超材料功能元件及其在红外和太赫兹成像技术领域的应用研究；微悬臂梁式生化传感器及其与CMOS电路的单片集成技术研究；硅基纳米结构和器件的制造技术研究等。近年来，主持国家自然科学基金项目5项、国家高技术研究发展计划项目1项、国家重点基金项目、国家探索研究项目、国家预先研究基金项目、国家重点实验室基金项目8项。并在国家自然科学基金重点项目、国家重大基础研究计划等项目中担任学术骨干。以第一作者/通信作者身份在国内外期刊和会议上发表学术论文百余篇，获得授权专利20余项。

代表性学术论著
[1] Rui Zhao, Delin Jia, Yongzheng Wen, Xiaomei Yu, Cantilever-based aptasensor for trace level detection of nerve agent simulant in aqueous matrices, Sensors and Actuators B: Chemical. Volume 238,January 2017, Pages 1231-1239.
[2] Wei Ma, Delin Jia and Xiaomei Yu, “Reflective gradient metasurfaces for polarization-independent light focusing at normal or oblique incidence”, Applied Physics Letters, 108, 071111 (2016).
[3] Wei Ma, Delin Jia, Yongzheng Wen, et al, “Diode-based microbolometer with performance enhanced by broadband metamaterial absorber”, Optics Letters, Vol. 41,Issue 13, pp. 2974-2977，(2016).
[4] Wei Ma, Rui Zhao, Shuyang Wang, Xiaomei Yu, Yun Feng and Yuejin Zhao, “Bimaterial cantilever focal plane array for uncooled infrared imaging using sandwich-framed structure”, Microelectromechanical Systems, Journal of, Vol. 25, Issue 2, pp. 413-420 (2016).
[5] Wei Ma, Deling Jia, Xiaomei Yu, Yun Feng and Yuejin Zhao, “Ultrathin flat parabolic reflector based on gradient metasurface”, IEEE International Conference on Micro Electro Mechanical Systems 2016 (IEEE MEMS 2016).
[6] Yongzheng Wen, Wei Ma, Joe Bailey, Guy Matmon and Xiaomei Yu, “Broadband Terahertz Metamaterial Absorber Based on Asymmetric Resonators With Perfect Absorption,” IEEE Transactions on Terahertz Science and Technology, vol. 5, no. 3, pp.406,411, May 2015.
[7] Wei Ma, Yongzheng Wen, Xiaomei Yu, Yun Feng and Yuejin Zhao, “Performance enhancement of uncooled infrared focal plane array by integrating metamaterial absorber”, Applied Physics Letters 106.11 (2015): 111108.
[8] Rui Zhao, Wei Ma, Yongzheng Wen, Jiancheng Yang and Xiaomei Yu, "Trace level detections of abrin with high SNR piezoresistive cantilever biosensor." Sensors and Actuators B: Chemical (SNB) 212 (2015): 112-119.
[9] Wei Ma , Shuyang Wang, Yongzheng Wen, Yuejin Zhao, Liquan Dong, and Xiaomei Yu, “Uncooled Focal Plane Array for Multiband IR Imaging Using Optical-Readout Bimaterial Cantilevers”, Microelectromechanical Systems, Journal of , vol.24, no.3, pp.582,591, June 2015.
[10] Rui Zhao, Yongzheng Wen, Jiancheng Yang, Jianlin Zhang, and Xiaomei Yu. Aptasensor for Staphylococcus Enterotoxin B Detection Using High SNR Piezoresistive Microcantilevers. Journal of Microelectromechanical Systems, 2014, 23(5):1054-1062.
[11] Yongzheng Wen, Wei Ma, Joe Bailey, Guy Matmon, Gabriel Aeppli and Xiaomei Yu. Absorption modulation of terahertz metamaterial by varying the conductivity of ground plane. Applied Physics Letters. 2014, 105(14):141111.
[12] Wei Ma, Yongzheng Wen, and Xiaomei Yu. Theoretical and Experimental Demonstrations of a Dual-Band Metamaterial Absorber at Mid-Infrared. IEEE Photonics Technology Letters. 2014, 26(19):1940-1943.
[13] Yongzheng Wen, Wei Ma, Xiaomei Yu, Yuejin Zhao, Ming Liu and Liquan Dong, “Terahertz addressed spatial light modulator based on bi-material cantilevers array,” The 18th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers 2015), Jun. 21-25, 2015, Anchorage, USA.
[14] Wei Ma, Yongzheng Wen, Xiaomei Yu, Xiaohua Liu and Yuejin Zhao, “Performance enhancement of bimaterial cantilever focal plane array by metamaterial absorber,” The 18th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers 2015), Jun. 21-25, 2015, Anchorage, USA.
[15] Rui Zhao, Yongzheng Wen and Xiaomei Yu, “Trace level detection of nerve agent simulant by using cantilever-based aptasensor,” The 18th International Conference on Solid-State Sensors, Actuators and Microsystems, Jun. 21-25, 2015, Anchorage, USA.
[16] Rui Zhao, Wei Ma, Shuyang Wang, Xiaomei Yu, Yun Feng, Yuejin Zhao, "Design and fabrication of a sandwich framed focal plane array for uncooled infrared imaging." The 18th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers 2015), Jun. 21-25, 2015, Anchorage, USA.
[17] Xiaofeng Gong, Rui Zhao, Xiaomei Yu, "High sensitive detections of Norovirus DNA and IgG by using multi-SiNW-FET biosensor", The 18th International Conference on Solid-State Sensors, Actuators and Microsystems, Jun. 21-25, 2015, Anchorage, USA.
[1] Y. Wen, W. Ma, J. Bailey, G. Matmon, X. Yu, and G. Aeppli, "Planar broadband and high absorption metamaterial using single nested resonator at terahertz frequencies," Optics Letter, 39, 1589-1592 (2014).
[18] Wei Ma, Yongzheng Wen and Xiaomei Yu*, “Broadband metamaterial absorber at mid-infrared using multiplexed cross resonators” OPTICS EXPRESS, Vol. 21, No. 25, 16 December 2013, DOI:10.1364/OE.21.030724.
[19] Picosecond dynamics of a silicon donor based terahertz detector device， Ellis T. Bowyer, B. J. Villis, Juerong Li, K. L. Litvinenko, B. N. Murdin*, Morteza Erfani, Guy Matmon, Gabriel Aeppli, Jean-Michel Ortega, Rui Prazeres, Li Dong, and Xiaomei Yu*, Applied Physics Letters 105, 021107 (2014); doi: 10.1063/1.**.
[20] Y. Wen, W. Ma, J. Bailey, G. Matmon, X. Yu, and G. Aeppli, "Planar broadband terahertz metamaterial absorber using single nested resonator," in CLEO: Applications and Technology, (Optical Society of America, 2014), JW2A. 118.
[21] WeiMa,ShuyangWang,YongzhengWen,YuejinZhao,LiquanDong,MingLiu,XiaohuaLiu,andXiaomeiYu, " UncooledMulti-BandIRImaging Using Bimaterial Cantilever FPA," 2014 IEEE 27th international Conference on Micro Electro Mechanical Systems (MEMS), San Francisco, USA, pp. 1225-1228, Jan. 26-30, 2014.