关键词: 石墨烯/
霍尔传感器/
霍尔元件/
霍尔集成电路
English Abstract
High performance graphene Hall sensors
Huang Le,Zhang Zhi-Yong,
Peng Lian-Mao
1.Key Laboratory for the Physics and Chemistry of Nanodevices and Department of Electronics, Peking University, Beijing 100871, China
Fund Project:Project supported by the Nano Technology Key Development Program of China Key Research and Development Plan (Grant No. 2016YF0201900), the National Natural Science Foundation of China (Grant Nos. 61390504, 61621061), and the Beijing Science and Technology Commission Pilot and Material Innovation Project, China (Grant No. D161100002616001-3).Received Date:07 August 2017
Accepted Date:16 September 2017
Published Online:05 November 2017
Abstract:The state-of-the-art graphene Hall elements and integrated circuits are reviewed. By optimizing the growth and transfer of graphene and the micro-fabrication process of Hall sensor, graphene Hall elements and integrated circuits outperform conventional Hall sensors in many aspects. Graphene Hall elements exhibit better sensitivities, resolutions, linearities and temperature stabilities than commercialized Hall elements. Through developing a set of passivation processes, the stabilities of graphene Hall elements are improved. Besides, the flexible magnetic sensing and multifunctional detection applications based on graphene are demonstrated. In addition, graphene/silicon hybrid Hall integrated circuits are realized. By developing a set of low temperature processes (below 180℃), graphene Hall elements are monolithically integrated onto the passivation layer of silicon complementary metal oxide semiconductor chip. This work demonstrates that graphene possesses significant performance advantages in Hall magnetic sensing and potentially practical applications.
Keywords: graphene/
Hall sensors/
Hall elements/
Hall integrated circuits
