关键词: 光纤传感器/
法布里-珀罗干涉仪/
温度传感器/
压力传感器
English Abstract
Research progress of in-fiber Fabry-Perot interferometric temperature and pressure sensors
Li Zi-Liang,Liao Chang-Rui,
Liu Shen,
Wang Yi-Ping
1.Key Laboratory of Optoelectronic Devices and Systems of Ministry of Education and Guangdong Province, College of Optoelectronic Engineering, Shenzhen University, Shenzhen 518060, China
Fund Project:Project supported by the National Natural Science Foundation of China (Grant Nos. 61635007, 61425007 61377090, 61575128), the Guangdong Natural Science Foundation, China (Grant Nos. 2014A030308007, 2014B050504010, 2015B010105007, 2015A030313541), the Science and Technology Innovation Commission of Shenzhen, China (Grant Nos. GJHZ20150313093755757, JCYJ20160520163134575, JCYJ20160427104925452), and Pearl River Scholar Fellowships, China.Received Date:19 January 2017
Accepted Date:24 February 2017
Published Online:05 April 2017
Abstract:Optical fiber sensors based on Fabry-Perot interferometer (FPI) have attracted intensive attention for sensing applications in temperature and pressure measurement, owing to their compact, small size, fast responses, high resolution, high sensitivity, good stability, and resistance to electromagnetic interference. It's known that the in-fiber optic interferometers based on single-mode fibers can exhibit compact structures, easy fabrication and low cost. In this paper, firstly, the basic principle of in-fiber FPIs is introduced. Secondly, we review several kinds of typical in-fiber FPIs formed in single-mode fibers fabricated with different post-processing techniques, such as chemical etching, arc discharge, femtosecond laser micromachining, and polymer coating, etc. Finally, the optical sensors based on in-fiber FPIs, with a capability of simultaneous multi-parameter sensing of temperature and pressure, are summarized and prospected.
Keywords: optical fiber sensor/
Fabry-Perot interferometer/
temperature sensor/
pressure sensor
